Nanoenergetic Materials for MEMS: A Review

New energetic materials (EMs) are the key to great advances in microscale energy-demanding systems as actuation part, igniter, propulsion unit, and power. Nanoscale EMs (nEMs)particularly offer the promise of much higher energy densities, faster rate of energy release, greater stability, and more security sensitivity to unwanted initiation). nEMs could therefore give response to microenergetics challenges. This paper provides a comprehensive review of current research activities in nEMs for microenergetics application. While thermodynamic calculations of flame temperature and reaction enthalpies are tools to choose desirable EMs, they are not sufficient for the choice of good material for microscale application where thermal losses are very penalizing. A strategy to select nEM is therefore proposed based on an analysis of the material diffusivity and heat of reaction. Finally, after a description of the different nEMs synthesis approaches, some guidelines for future investigations are provided

3D Energy Harvester Evaluation

This paper discusses the characterization and evaluation of an MEMS based electrostatic generator, a part of the power supply unit of the self-powered microsystem[1,2,3]. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor [4]. The structure is designed and modeled as three-dimensional silicon based MEMS. Innovative approach involving the achievement of very low resonant frequency of the structure (about 100Hz) by usage of modified long cantilever spring design, minimum area of the chip, 3D work mode, the ability to be tuned to reach desired parameters, proves promising directions of possible further development

Parylene-based electret power generators

n electret power generator is developed using a new electret made of a charged parylene HT® thin-film polymer. Here, parylene HT® is a room-temperature chemical-vapor-deposited thin-film polymer that is MEMS and CMOS compatible. With corona charge implantation, the surface charge density of parylene HT® is measured as high as 3.69 mC m^−2. Moreover, it is found that, with annealing at 400 °C for 1 h before charge implantation, both the long-term stability and the high-temperature reliability of the electret are improved. For the generator, a new design of the stator/rotor is also developed. The new micro electret generator does not require any sophisticated gap-controlling structure such as tethers. With the conformal coating capability of parylene HT®, it is also feasible to have the electret on the rotors, which is made of either a piece of metal or an insulator. The maximum power output, 17.98 µW, is obtained at 50 Hz with an external load of 80 MΩ. For low frequencies, the generator can harvest 7.7 µW at 10 Hz and 8.23 µW at 20 Hz

Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

Modelling methodology of MEMS structures based on Cosserat theory

Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Design, fabrication and characterization of monolithic embedded parylene microchannels in silicon substrate

This paper presents a novel channel fabrication technology of bulk-micromachined monolithic embedded polymer channels in silicon substrate. The fabrication process favorably obviates the need for sacrifical materials in surface-micromachined channels and wafer-bonding in conventional bulk-micromachined channels. Single-layer-deposited parylene C (poly-para-xylylene C) is selected as a structural material in the microfabricated channels/columns to conduct life science research. High pressure capacity can be obtained in these channels by the assistance of silicon substrate support to meet the needs of high-pressure loading conditions in microfluidic applications. The fabrication technology is completely compatible with further lithographic CMOS/MEMS processes, which enables the fabricated embedded structures to be totally integrated with on-chip micro/nano-sensors/actuators/structures for miniaturized lab-on-a-chip systems. An exemplary process was described to show the feasibility of combining bulk micromachining and surface micromachining techniques in process integration. Embedded channels in versatile cross-section profile designs have been fabricated and characterized to demonstrate their capabilities for various applications. A quasi-hemi-circular-shaped embedded parylene channel has been fabricated and verified to withstand inner pressure loadings higher than 1000 psi without failure for micro-high performance liquid chromatography (µHPLC) analysis. Fabrication of a high-aspect-ratio (internal channel height/internal channel width, greater than 20) quasi-rectangular-shaped embedded parylene channel has also been presented and characterized. Its implementation in a single-mask spiral parylene column longer than 1.1 m in a 3.3 mm × 3.3 mm square size on a chip has been demonstrated for prospective micro-gas chromatography (µGC) and high-density, high-efficiency separations. This proposed monolithic embedded channel technology can be extensively implemented to fabricate microchannels/columns in high-pressure microfludics and high-performance/high-throughput chip-based micro total analysis systems (µTAS)

Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy

Inherent residual stresses during material deposition can have profound effects on the functionality and reliability of fabricated Micro-Electro-Mechanical Systems (MEMS) devices. Residual stress often causes device failure due to curling, buckling, or fracture. Typically, the material properties of thin films used in surface micromachining are not well controlled during deposition. The residual stress; for example, tends to vary significantly for different deposition methods. Currently, few nondestructive techniques are available to measure residual stress in MEMS devices prior to the final release etch. In this research, micro-Raman spectroscopy is used to measure the residual stresses in polysilicon MEMS microbridge devices. This measurement technique was selected since it is nondestructive, fast, and provides the potential for in-situ stress monitoring. Raman spectroscopy residual stress profiles on unreleased and released MEMS microbridge beams are compared to analytical and FEM models to assess the viability of micro-Raman spectroscopy as an in-situ stress measurement technique. Raman spectroscopy was used during post-processing phosphorus ion implants on unreleased MEMS devices to investigate and monitor residual stress levels at key points during the post-processing sequences. As observed through Raman stress profiles and verified using on-chip test structures, the post-processing implants and accompanying anneals resulted in residual stress relaxation of over 90%

Design of LTCC-based Ceramic Structure for Chemical Microreactor

The design of ceramic chemical microreactor for the production of hydrogen needed in portable polymer-electrolyte membrane (PEM) fuel cells is presented. The microreactor was developed for the steam reforming of liquid fuels with water into hydrogen. The complex three-dimensional ceramic structure of the microreactor includes evaporator(s), mixer(s), reformer and combustor. Low-temperature co-fired ceramic (LTCC) technology was used to fabricate the ceramic structures with buried cavities and channels, and thick-film technology was used to make electrical heaters, temperature sensors and pressure sensors. The final 3D ceramic structure consists of 45 LTCC tapes. The dimensions of the structure are 75 × 41 × 9 mm3 and the weight is about 73 g