EUROSENSORS XVII : book of abstracts

Fundação Calouste Gulbenkien (FCG).Fundação para a Ciência e a Tecnologia (FCT)

Microelectromechanical Systems and Devices

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators

Self-Calibration Method Based on Surface Micromaching of Light Transceiver Focal Plane for Optical Camera

In remote sensing photogrammetric applications, inner orientation parameter (IOP) calibration of remote sensing camera is a prerequisite for determining image position. However, achieving such a calibration without temporal and spatial limitations remains a crucial but unresolved issue to date. The accuracy of IOP calibration methods of a remote sensing camera determines the performance of image positioning. In this paper, we propose a high-accuracy self-calibration method without temporal and spatial limitations for remote sensing cameras. Our method is based on an auto-collimating dichroic filter combined with a surface micromachining (SM) point-source focal plane. The proposed method can autonomously complete IOP calibration without the need of outside reference targets. The SM procedure is used to manufacture a light transceiver focal plane, which integrates with point sources, a splitter, and a complementary metal oxide semiconductor sensor. A dichroic filter is used to fabricate an auto-collimation light reflection element. The dichroic filter, splitter, and SM point-source focal plane are integrated into a camera to perform an integrated self-calibration. Experimental measurements confirm the effectiveness and convenience of the proposed method. Moreover, the method can achieve micrometer-level precision and can satisfactorily complete real-time calibration without temporal or spatial limitations