Parasitic Motion Principle (PMP) Piezoelectric Actuators: Definition and Recent Developments

Stepping piezoelectric actuators have achieved significant improvements to satisfy the urgent demands on precision positioning with the capability of long working stroke, high accuracy and micro/nano-scale resolution, coupled with the merits of fast response and high stiffness. Among them, inchworm type, friction-inertia type, and parasitic type are three main types of stepping piezoelectric actuators. This chapter is aimed to introduce the basic definition and typical features of the parasitic motion principle (PMP), followed by summarizing the recent developments and achievements of PMP piezoelectric actuators. The emphasis of this chapter includes three key points, the structural optimization, output characteristic analysis and performance enhancement. Finally, the current existing issues and some potential research topics in the future are discussed. It is expected that this chapter can assist relevant researchers to understand the basic principle and recent development of PMP piezoelectric actuators

Mechatronics Methods for Mitigating Undesirable Effects of Pre-motion Friction in Nanopositioning Stages with Mechanical Bearings

Nanopositioning (NP) stages are used to for precise positioning in a wide range of nanotech processes, ranging from substrate patterning to micro additive manufacturing. They are often used for point-to-point (P2P) motions, where the stage is commanded to travel to and settle within a pre-specified window of the target position, and for tracking motions, where the stage is commanded to follow a reference trajectory. The settling time, in-position stability and tracking accuracy of NP stages directly affects productivity and quality of the associated processes or manufactured products. NP stages can be constructed using flexure, fluidic, magnetic or mechanical bearings (i.e., sliding and, especially, rolling-element bearings). Of these choices, mechanical bearings are the most cost-effective, and are currently the only commercially viable option for a growing number of NP applications that must be performed in high vacuum environments. However, mechanical-bearing-guided NP stages experience nonlinear pre-motion (i.e., pre-sliding/pre-rolling) friction which adversely affects their precision and speed. Control-based compensation methods, commonly used to address this problem, often suffer from poor robustness and limited practicality due to the complexity and extreme variability of friction dynamics at the micro scale. Therefore, this dissertation proposes three novel mechatronics methods, featuring a combination of mechanical design and control strategy, as more effective and robust solutions to mitigate the undesirable effects of pre-motion friction. The first approach is vibration assisted nanopositioning (VAN), which utilizes high frequency vibration (i.e., dither) to mitigate the low speed (slow settling) of mechanical-bearing-guided NP stages during P2P motions. VAN allows the use of dither to mitigate pre-motion friction while maintaining nanometer-level positioning precision. P2P positioning experiments on an in-house built VAN stage demonstrates up to 66% reductions in the settling time, compared to a conventional mechanical bearing NP stage. A major shortcoming of VAN is that it increases the cost of NP stages. To address this limitation, a friction isolator (FI) is proposed as a simple and more cost-effective method for mitigating pre-motion friction. The idea of FI is to connect the mechanical bearing to the NP stage using a joint that is very compliant in the motion direction, thus effectively isolating the stage from bearing friction. P2P positioning tests on a NP stage equipped with FI prototypes demonstrate up to 84% reductions in the settling time. The introduction of FI also enables accurate and robust reductions of motion errors during circular tracking tests, using feedforward compensation with a simple friction model. One pitfall of FI is that it causes increased error of the stage during in position. Therefore, a semi-active isolator (SAI) is proposed to mitigate the slow settling problem using the FI, while maintaining the benefits of friction on in-position stability. The proposed SAI, which connects the bearing and NP stage, is equipped with solenoids to switch its stiffness from low, during settling, to high once the stage gets into position. P2P experiments demonstrate up to 81% improvements in the settling time without sacrificing in-position stability. The proposed mechatronics methods are compared and FI stands out as a result of its simplicity, cost-effectiveness and robust performance. Therefore, the influence of design parameters on the effectiveness of FI are investigated to provide design guidelines. It is recommended that the FI should be designed with the smallest stiffness in the motion direction, while satisfying other requirements such as in-position stability and off-axis rigidity.PHDMechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/155296/1/terrydx_1.pd

Dynamics and Controls of Fluidic Pressure-Fed Mechanism (FPFM) of Nanopositioning System

Flexure or compliant mechanisms are employed in many precisions engineered devices due to their compactness, linearity, resolution, etc. Yet, critical issues remain in motion errors, thermal instability, limited bandwidth, and vibration of dynamic systems. Those issues cannot be negligible to maintain high precision and accuracy for precision engineering applications. In this thesis, a novel fluidic pressure-fed mechanism (FPFM) is proposed and investigated. The proposed method is designing internal fluidic channels inside the spring structure of the flexure mechanism using the additive manufacturing (AM) process to overcome addressed challenges. By applying pneumatic/hydraulic pressure and filling media into fluidic channels, dynamic characteristics of each spring structure of the flexure mechanism can be altered or adjusted to correct motion errors, increase operating speed, and suppress vibration. Additionally, FPFM can enhance thermal stability by flowing fluids without affecting the motion quality of the dynamic system. Lastly, the motion of the nanopositioning system driven by FPFM can provide sub-nanometer resolution motion, and this enables the nanopositioning system to have two linear motion in a monolithic structure. The main objective of this thesis is to propose and validate the feasibility of FPFM that can ultimately be used for a monolithic FPFM dual-mode stage for providing high positioning performance without motion errors while reducing vibration and increasing thermal stability and bandwidth

Sliding-Mode control for high-precision motion control systems

In many of today's mechanical systems, high precision motion has become a necessity. As performance requirements become more stringent, classical industrial controllers such as PID can no longer provide satisfactory results. Although many control approaches have been proposed in the literature, control problems related to plant parameter uncertainties, disturbances and high-order dynamics remain as big challenges for control engineers. Theory of Sliding Mode Control provides a systematic approach to controller design while allowing stability in the presence of parametric uncertainties and external disturbances. In this thesis a brief study of the concepts behind Sliding Mode Control will be shown. Description of Sliding Mode Control in discrete-time systems and the continuous Sliding Mode Control will be shown. The description will be supported with the design and robustness analysis of Sliding Mode Control for discrete-time systems. In this thesis a simplified methodology based on discrete-time Sliding Mode Control will be presented. The main issues that this thesis aims to solve are friction and internal nonlinearities. The thesis can be outlined as follows: -Implementation of discrete-time Sliding Mode Control to systems with nonlinearities and friction. Systems include; piezoelectric actuators that are known to suffer from nonlinear hysteresis behavior and ball-screw drives that suffer from high friction. Finally, the controller will be implemented on a 6-dof Stewart platform which is a system of higher complexity. -It will also be shown that performance can be enhanced with the aid of disturbance compensation based on a nominal plant disturbance observer

Performance-driven control of nano-motion systems

The performance of high-precision mechatronic systems is subject to ever increasing demands regarding speed and accuracy. To meet these demands, new actuator drivers, sensor signal processing and control algorithms have to be derived. The state-of-the-art scientific developments in these research directions can significantly improve the performance of high-precision systems. However, translation of the scientific developments to usable technology is often non-trivial. To improve the performance of high-precision systems and to bridge the gap between science and technology, a performance-driven control approach has been developed. First, the main performance limiting factor (PLF) is identified. Then, a model-based compensation method is developed for the identified PLF. Experimental validation shows the performance improvement and reveals the next PLF to which the same procedure is applied. The compensation method can relate to the actuator driver, the sensor system or the control algorithm. In this thesis, the focus is on nano-motion systems that are driven by piezo actuators and/or use encoder sensors. Nano-motion systems are defined as the class of systems that require velocities ranging from nanometers per second to millimeters per second with a (sub)nanometer resolution. The main PLFs of such systems are the actuator driver, hysteresis, stick-slip effects, repetitive disturbances, coupling between degrees-of-freedom (DOFs), geometric nonlinearities and quantization errors. The developed approach is applied to three illustrative experimental cases that exhibit the above mentioned PLFs. The cases include a nano-motion stage driven by a walking piezo actuator, a metrological AFM and an encoder system. The contributions of this thesis relate to modeling, actuation driver development, control synthesis and encoder sensor signal processing. In particular, dynamic models are derived of the bimorph piezo legs of the walking piezo actuator and of the nano-motion stage with the walking piezo actuator containing the switching actuation principle, stick-slip effects and contact dynamics. Subsequently, a model-based optimization is performed to obtain optimal drive waveforms for a constant stage velocity. Both the walking piezo actuator and the AFM case exhibit repetitive disturbances with a non-constant period-time, for which dedicated repetitive control methods are developed. Furthermore, control algorithms have been developed to cope with the present coupling between and hysteresis in the different axes of the AFM. Finally, sensor signal processing algorithms have been developed to cope with the quantization effects and encoder imperfections in optical incremental encoders. The application of the performance-driven control approach to the different cases shows that the different identified PLFs can be successfully modeled and compensated for. The experiments show that the performance-driven control approach can largely improve the performance of nano-motion systems with piezo actuators and/or encoder sensors

Investigation into vibration assisted micro milling: theory, modelling and applications

PhD ThesisPrecision micro components are increasingly in demand for various engineering industries, such as biomedical engineering, MEMS, electro-optics, aerospace and communications. The proposed requirements of these components are not only in high accuracy, but also in good surface performance, such as drag reduction, wear resistance and noise reduction, which has become one of the main bottlenecks in the development of these industries. However, processing these difficult-to-machine materials efficiently and economically is always a challenging task, which stimulates the development and subsequent application of vibration assisted machining (VAM) over the past few decades. Vibration assisted machining employs additional external energy sources to generate high frequency vibration in the conventional machining process, changing the machining (cutting) mechanism, thus reducing cutting force and cutting heat and improving machining quality. The current awareness on VAM technology is incomplete and effective implementation of the VAM process depends on a wide range of technical issues, including vibration device design and setup, process parameters optimization and performance evaluation. In this research, a 2D non-resonant vibration assisted system is developed and evaluated. Cutting mechanism and relevant applications, such as functional surface generation and microfluidic chips manufacturing is studies through both experimental and finite element analysis (FEA) method. A new two-dimensional piezoelectric actuator driven vibration stage is proposed and prototyped. A double parallel four-bar linkage structure with double layer flexible hinges is designed to guide the motion and reduce the displacement coupling effect between the two directions. The compliance modelling and dynamic analysis are carried out based on the matrix method and lagrangian principle, and the results are verified by finite element analysis. A closed loop control system is developed and proposed based on LabVIEW program consisting of data acquisition (DAQ) devices and capacitive sensors. Machining experiments have been carried out to evaluate the performance of the vibration stage and the results show a good agreement with the tool tip trajectory simulation results, which demonstrates the feasibility and effectiveness of the vibration stage for vibration assisted micro milling. The textured surface generation mechanism is investigated through both modelling and experimental methods. A surface generation model based on homogenous matrices transformation is proposed by considering micro cutter geometry and kinematics of vibration assisted milling. On this basis, series of simulations are performed to provide insights into the effects of various vibration parameters (frequency, amplitude and phase difference) on the generation mechanism of typical textured surfaces in 1D and 2D vibration-assisted micro milling. Furthermore, the wettability tests are performed on the machined surfaces with various surface texture topographies. A new contact model, which considers both liquid infiltration effects and air trapped in the microstructure, is proposed for predicting the wettability of the fish scales surface texture. The following surface textures are used for T-shaped and Y-shaped microchannels manufacturing to achieve liquid one-way flow and micro mixer applications, respectively. The liquid flow experiments have been carried out and the results indicate that liquid flow can be controlled effectively in the proposed microchannels at proper inlet flow rates. Burr formation and tool wear suppression mechanisms are studied by using both finite element simulation and experiment methods. A finite element model of vibration assisted micro milling using ABAQUS is developed based on the Johnson-Cook material and damage models. The tool-workpiece separation conditions are studied by considering the tool tip trajectories. The machining experiments are carried out on Ti-6Al-4V with coated micro milling tool (fine-grain tungsten carbides substrate with ZrO2-BaCrO4 (ZB) coating) under different vibration frequencies (high, medium and low) and cutting states (tool-workpiece separation or nonseparation). The results show that tool wear can be reduced effectively in vibration assisted micro milling due to different wear suppression mechanisms. The relationship between tool wear and cutting performance is studied, and the results indicate that besides tool wear reduction, better surface finish, lower burrs and smaller chips can also be obtained as vibration assistance is added

Low-noise Instrumentation for Near-field Microwave Microscopy

This thesis addresses circuits and systems optimized for the unique requirements of near-field microwave microscopy (NFMM). A suite of qualification measurements is conducted for the systematic characterization of the NFMM measurement system. Finally, modeling methods and quantitative analysis are performed for the interpretation of resulting measurements. An NFMM measurement typically suffers from small signal in the presence of seemingly overwhelming white and 1/f noise. As such, it requires instrumentation that provides signal enhancement, noise reduction, and long-term stability. This thesis describes the design and characterization of probe circuits and probe tips which enable sensitive and high-resolution NFMM with enhanced signals. The space efficient probe circuit is designed for ease of integration and eventual MMIC implementation. The scanning Lock-in Vector Near-field Probe (LVNP) instrument is designed for the readout of the near-field probe circuit. Selection of measurement topology for the purpose of noise reduction/mitigation is described. The LVNP is characterized with respect to noise, stability, and maximum signal sensitivity. In summary, this thesis details the design of a complete system for near-field microwave microscopy including probe tip, probe circuit, and instrument design. Performance limitations are quantified throughout the thesis in the hope of promoting a systematic approach to NFMM instrumentation, and quantitative data analysis techniques are proposed