NASA SBIR abstracts of 1991 phase 1 projects

The objectives of 301 projects placed under contract by the Small Business Innovation Research (SBIR) program of the National Aeronautics and Space Administration (NASA) are described. These projects were selected competitively from among proposals submitted to NASA in response to the 1991 SBIR Program Solicitation. The basic document consists of edited, non-proprietary abstracts of the winning proposals submitted by small businesses. The abstracts are presented under the 15 technical topics within which Phase 1 proposals were solicited. Each project was assigned a sequential identifying number from 001 to 301, in order of its appearance in the body of the report. Appendixes to provide additional information about the SBIR program and permit cross-reference of the 1991 Phase 1 projects by company name, location by state, principal investigator, NASA Field Center responsible for management of each project, and NASA contract number are included

Development and Packaging of Microsystems Using Foundry Services

Micro-electro-mechanical systems (MEMS) are a new and rapidly growing field of research. Several advances to the MEMS state of the art were achieved through design and characterization of novel devices. Empirical and theoretical model of polysilicon thermal actuators were developed to understand their behavior. The most extensive investigation of the Multi-User MEMS Processes (MUMPs) polysilicon resistivity was also performed. The first published value for the thermal coefficient of resistivity (TCR) of the MUMPs Poly 1 layer was determined as 1.25 x 10(exp -3)/K. The sheet resistance of the MUMPs polysilicon layers was found to be dependent on linewidth due to presence or absence of lateral phosphorus diffusion. The functional integration of MEMS with CMOS was demonstrated through the design of automated positioning and assembly systems, and a new power averaging scheme was devised. Packaging of MEMS using foundry multichip modules (MCMs) was shown to be a feasible approach to physical integration of MEMS with microelectronics. MEMS test die were packaged using Micro Module Systems MCM-D and General Electric High Density Intercounect and Chip-on-Flex MCM foundries. Xenon difluoride (XeF2) was found to be an excellent post-packaging etchant for bulk micromachined MEMS. For surface micromachining, hydrofluoric acid (HF) can be used

Development and Application of Integrated Silicon-in-Plastic Microfabrication in Polymer Microfluidic Systems

Polymer-based microfluidic devices can offer a number of advantages over conventional devices, and have found many applications in chemical and biological analysis. In order to fully develop a lab-on-chip (LOC) device, the functional components, such as sensors and actuators, tend to be assembled to complete a functional device. But the integration of silicon chips into polymer-based microfluidic systems remains a virtually unexplored area. In this work, a novel silicon-in-plastic microfabrication technology is developed, which involves seamlessly integrating individual microfabricated silicon chips into a larger polymer substrate, where the silicon components provide functionality, and the plastic substrate provides system-level fluid handling. This technology employs low-cost polymer substrates and simple polymer processing techniques which are amenable to mass production. The fabrication and testing of two polymer microfluidic systems using the silicon-in-plastic technology are presented in this dissertation. The first integrated microsystem is a water-based chemical monitoring system based on microhotplate gas sensor and polymer microfluidics. The chemical monitoring system is designed to sample a water source, extract solvent present within the aqueous sample into the vapor phase, and direct the solvent vapor past the integrated gas sensor for analysis. Design, fabrication, and characterization of a prototype system are described, and results from illustrative measurements performed using methanol, toluene, and 1,2-dichloroethane in water are presented. The second one is an integrated UV absorbance detection system that uses silicon-in-plastic technology to seamlessly integrate bare photodiode chips into a polymer microfluidic system. Detection platforms fabricated using this approach exhibit excellent detection limits down to 1.5 x 10 8 M for bovine serum albumin (BSA) as a model protein. In addition to providing high sensitivity, sub-nanoliter detection volumes are enabled by the use of direct photodetector integration. The fabrication methodology is detailed, and system performance metrics including minimum detection limit, detection volume, dynamic range, and linearity are reported

SUSTAINABLE ENERGY HARVESTING TECHNOLOGIES – PAST, PRESENT AND FUTURE

Chapter 8: Energy Harvesting Technologies: Thick-Film Piezoelectric Microgenerato

NASA Tech Briefs, August 1994

Topics covered include: Computer Hardware; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Computer Programs; Mechanics; Machinery; Fabrication Technology; Mathematics and Information Sciences; Life Sciences; Books and Reports

NASA Tech Briefs, May 1997

Topics covered include: Advanced Composites, Plastics and Metals; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Computer Programs; Mechanics; Machinery/Automation; Manufacturing/Fabrication; Mathematics and Information Sciences; Life Sciences; Books and Reports

Cumulative index to NASA Tech Briefs, 1986-1990, volumes 10-14

Tech Briefs are short announcements of new technology derived from the R&D activities of the National Aeronautics and Space Administration. These briefs emphasize information considered likely to be transferrable across industrial, regional, or disciplinary lines and are issued to encourage commercial application. This cumulative index of Tech Briefs contains abstracts and four indexes (subject, personal author, originating center, and Tech Brief number) and covers the period 1986 to 1990. The abstract section is organized by the following subject categories: electronic components and circuits, electronic systems, physical sciences, materials, computer programs, life sciences, mechanics, machinery, fabrication technology, and mathematics and information sciences

Toward a Flying MEMS Robot

The work in this thesis includes the design, modeling, and testing of motors and rotor blades to be used on a millimeter-scale helicopter style flying micro air vehicle (MAV). Three different types of motor designs were developed and tested, which included circular scratch drives, electrostatic motors, and comb drive resonators. Six different rotor designs were tested; five used residual stress while one design used photoresist to act as a hinge to achieve rotor blade deflection. Two key parameters of performance were used to evaluate the motor and rotor blade designs: the frequency of motor rotation and the angle of deflection achieved in the rotor blades. One successful design utilized a scratch drive motor with four attached rotor blades to try to achieve lift. While the device rotated successfully, the rotational frequency was insufficient to achieve lift-off. The electrostatic motor designs proved to be a challenge, only briefly moving before shorting out; nonetheless, lessons were learned. Comb drive designs operated over a wide range of high frequencies, lending them to be a promising method of turning a rotary MAV. None of the fabricated devices were able to achieve lift, due to insufficient rotational rates and low angles of attack on the rotor blades. With slight modifications to the current designs, the required rotational rates and rotor blade deflections would yield a viable MAV. The ultimate objective of this effort was to create an autonomous MAV on the millimeter scale, able to sense and act upon targets in its environment. Such a craft would be virtually undetectable, stealthily maneuvering and capable of precision engagement

Bibliography of Lewis Research Center technical publications announced in 1992

This compilation of abstracts describes and indexes the technical reporting that resulted from the scientific and engineering work performed and managed by the Lewis Research Center in 1992. All the publications were announced in the 1992 issues of STAR (Scientific and Technical Aerospace Reports) and/or IAA (International Aerospace Abstracts). Included are research reports, journal articles, conference presentations, patents and patent applications, and theses