Multilayer electret activated by direct contact silicon electrode.

Electrets used in microelectromechanical systems (MEMS) devices are often formed by corona charging, where ionized gases are generated in an electric field to introduce a charge to the electret surface. The purpose of this study was to investigate a new technique for creating an electret from a plasma enhanced chemical vapor deposition (PECVD) multilayer film of SiO2/Si3N4/SiO2 using a direct contact electrode of silicon. The electret formation takes advantage of deep traps in silicon nitride, which are known to develop from hydrogen interactions with silicon dangling bonds and, in some stoichiometries, nitrogen dangling bonds. The electret activation process has been optimized for maximum effective surface voltage (ESV). The deposition and activation process for the electret has the additional benefit of using commercially available equipment present in many microelectronic fabrication facilities. Standardized processes for depositing the PECVD film stack and activating the electret with a wafer level bonder have been developed.Using this new process, electret films have been produced with positive and negative effective surface voltages in excess of +/‐194.0 V. Extrapolated lifetimes, based on thermal decay studies, are calculated to be 57 years and 23 years for positive and negative electrets respectively if they are maintained in moderate to low humidity environments below 125°C. Activation energy levels in positive and negative electrets are 1.4 eV and 1.2 eV respectively. This new electret multilayer film stack and direct charging method produced thin film electrets with a half‐life 5 times greater than that reported in literature by other groups using PECVD multilayer electrets [1, 2]. A new application was investigated to see how an electret may benefit semiconductor‐liquid interactions. The PECVD electret was used to apply a gate bias to the back side of a double side polished silicon wafer to determine the effect of gate bias on the etch rates of an anisotropic silicon etch in 25% wt. tetramethylammonium hydroxide (TMAH). Our results show that the positively charged electret produced a statistically significant increase in etch rate, when compared to neutral and negatively charged electrets, as the silicon‐TMAH interface approached the depletion region produced by the electret. The mean values of the silicon etch rate were evaluated for the last hour of etching with samples categorized by electret potentials as positive, negative or neutral. The positive potential electret had a mean etch rate of 12.0 um/hr for silicon as compared to 8.8 um/hr and 8.6 um/hr for negatively and neutrally charge electrets respectively. The one way Analysis Of Variance (ANOVA) of the silicon etch rates between the neutral (control) PECVD film and the positive electret had a P value of 0.009 and falls within the 1% significance level, showing that it is very likely that the positive electret film has an effect on the final etch rate of the silicon under null hypothesis testing

Generic wireless sensor network for dynamic monitoring of a new generation of building material

Existing testing methods for building materials before deployment include a series of procedures as stipulated in British Standards, and most tests are performed in a controlled laboratory environment. Types of equipment used for measurements, data logging, and visualisation are commonly bulky, hard-wired, and consume a significant amount of power. Most of the off-the-shelf sensing nodes have been designed for a few specific applications and cannot be used for general purpose applications. This makes it difficult to modify or extend the sensing features when needed. This thesis takes the initiative of designing and implementing a low-powered, open-source, flexible, and small-sized Generic wireless sensor network (GWSN) that can continuously monitor the building materials and building environment, to address the limitations of the conventional measurement methods and the technological gap. The designed system is comprised of two custom-made sensor nodes and a gateway, as well as purpose designed firmware for data collection and processing. For the proof of concept and experimental studies, several measurement strategies were designed, to demonstrate, evaluate, and validate the effectiveness of the system. The data was collected from selected case study areas in the School of Energy, Geoscience, Infrastructure and Society (EGIS) laboratories by measuring and monitoring building structures and indoor environment quality parameters using the designed GWSN. The measured data includes heat flux through the material, surface and air temperatures on both sides of the material/structure, moisture variation, ambient temperature, relative humidity, carbon dioxide, volatile organic compounds, particulate matter, and sound/acoustic levels. The initial results show the potential of the designed system to become the new benchmark for tracking the variation of building materials with the environment and investigating the impact of variation of building materials on indoor environment quality. Based on the estimates of the thermal performance data, the sample used in the experiment had a typical U-value between 4.8 and 5.8 W/m2K and a thermal resistance value of 0.025m2 ·K/W[1][2]. Thermal resistance values from the GWSN real-time measurement were between 0.025 and 0.03 m2K/W, with an average of 0.025 m2K/W, and thermal transmission values varied between 4.55 and 5.11 W/m2K. Based on the data obtained, the results are within the range of typical values[3]. For thermal comfort measurements, the results of humidity and temperature from GWSN were compared to values in the Kambic climatic chamber in the EGIS laboratory, and the accuracies were 99 % and 98 % respectively. For the IAQ measurements, the values of CO2 and TVOCs were compared to the commercial off-the-shelf measuring system, and the accuracies were 98 %, and 97 %. Finally, the GWSN was tested for acoustic measurements in the range of 55 dB to 106 dB. The results were compared to class one Bruel & Kjaer SLM. The accuracy of GWSN was 97 %. The GWSN can be used for in lab and in-situ applications, to measure and analyse the thermal physical properties of building materials/building structures (thermal transmittance, thermal conductivity, and thermal resistance). The system can also measure indoor air quality, thermal comfort, and airborne sound insulation of the building envelope. The key point here is to establish a direct link between how building materials vary with the environment and how this impacts indoor environment quality. Such a link is essential for long-term analysis of building materials, which cannot be achieved using current methods. Regarding increasing the power efficient of the implemented GWSN as well as its performance and functionality, a new sensing platforms using backscatter technology have been introduced. The theory of modulation and spread spectrum technique used in backscattering has been explored. The trade-off between hardware complexity/power consumption and link performance has been investigated. Theoretical analysis and simulation validation of the new sensing technique, using backscatter communication, has been performed. A novel multicarrier backscatter tag compatible with Wireless Fidelity has been implemented and an IEEE 802.11g OFDM preamble was synthesized by simulation. The tag consists of only two transistors with current consumption no larger than 0.2 μA at voltage of less than 0.6 V. Novel harmonic suppression approaches for frequency-shifted backscatter communication has been proposed and demonstrated. The proposed approaches independently manipulate mirror harmonics and higher order harmonics whereby; specified higher order harmonics can be removed by carefully designing the real-valued (continuous and discrete) reflection coefficients-based backscatter tags. When successfully implemented, the backscatter system will reduce sensor node power consumption by shifting the power-consuming radio frequency carrier synthesis functions to carrier emitters.Engineering and Physical Sciences Research Council (EPSRC) Funding EP/H009612/

Ultra-high-speed imaging of bubbles interacting with cells and tissue

Ultrasound contrast microbubbles are exploited in molecular imaging, where bubbles are directed to target cells and where their high-scattering cross section to ultrasound allows for the detection of pathologies at a molecular level. In therapeutic applications vibrating bubbles close to cells may alter the permeability of cell membranes, and these systems are therefore highly interesting for drug and gene delivery applications using ultrasound. In a more extreme regime bubbles are driven through shock waves to sonoporate or kill cells through intense stresses or jets following inertial bubble collapse. Here, we elucidate some of the underlying mechanisms using the 25-Mfps camera Brandaris128, resolving the bubble dynamics and its interactions with cells. We quantify acoustic microstreaming around oscillating bubbles close to rigid walls and evaluate the shear stresses on nonadherent cells. In a study on the fluid dynamical interaction of cavitation bubbles with adherent cells, we find that the nonspherical collapse of bubbles is responsible for cell detachment. We also visualized the dynamics of vibrating microbubbles in contact with endothelial cells followed by fluorescent imaging of the transport of propidium iodide, used as a membrane integrity probe, into these cells showing a direct correlation between cell deformation and cell membrane permeability

Understanding Acoustics

This open access textbook, like Rayleigh’s classic Theory of Sound, focuses on experiments and on approximation techniques rather than mathematical rigor. The second edition has benefited from comments and corrections provided by many acousticians, in particular those who have used the first edition in undergraduate and graduate courses. For example, phasor notation has been added to clearly distinguish complex variables, and there is a new section on radiation from an unbaffled piston. Drawing on over 40 years of teaching experience at UCLA, the Naval Postgraduate School, and Penn State, the author presents a uniform methodology, based on hydrodynamic fundamentals for analysis of lumped-element systems and wave propagation that can accommodate dissipative mechanisms and geometrically-complex media. Five chapters on vibration and elastic waves highlight modern applications, including viscoelasticity and resonance techniques for measurement of elastic moduli, while introducing analytical techniques and approximation strategies that are revisited in nine subsequent chapters describing all aspects of generation, transmission, scattering, and reception of waves in fluids. Problems integrate multiple concepts, and several include experimental data to provide experience in choosing optimal strategies for extraction of experimental results and their uncertainties. Fundamental physical principles that do not ordinarily appear in other acoustics textbooks, like adiabatic invariance, similitude, the Kramers-Kronig relations, and the equipartition theorem, are shown to provide independent tests of results obtained from numerical solutions, commercial software, and simulations. Thanks to the Veneklasen Research Foundation, this popular textbook is now open access, making the e-book available for free download worldwide. Provides graduate-level treatment of acoustics and vibration suitable for use in courses, for self-study, and as a reference Highlights fundamental physical principles that can provide independent tests of the validity of numerical solutions, commercial software, and computer simulations Demonstrates approximation techniques that greatly simplify the mathematics without a substantial decrease in accuracy Incorporates a hydrodynamic approach to the acoustics of sound in fluids that provides a uniform methodology for analysis of lumped-element systems and wave propagation Emphasizes actual applications as examples of topics explained in the text Includes realistic end-of-chapter problems, some including experimental data, as well as a Solutions Manual for instructors. Features “Talk Like an Acoustician“ boxes to highlight key terms introduced in the text

Design et développement d'un capteur acoustique imprimé.

The objective of this work was to design and fabricate a low cost resonant capacitive acoustic sensor using printing techniques. It falls within the frame of a collaborative research project named “Spinnaker”, set up by TAGSYS RFID, a French company, which has planned to integrate this sensor to improve the geolocalization of their RFID tags. This work started with the design and optimization of the sensor using finite element modeling (COMSOL) and design of experiments (DOE). This first step has enabled the identification of the optimum set of parameters and demonstrated that the output responses were in accordance with the specifications. Then, we have developed the different technological building blocks required for the fabrication of the prototypes using jointly the 2D inkjet printing technique and 3D printing method. The functionality of the sensors has been characterized using both capacitive and acoustic measurements using laser Doppler vibrometer. Experimental results showed that sensitivity and selectivity were within the specifications and in good agreement with the modeling results. Finally, we investigated the piezoelectric approach which could be an interesting option to the capacitive one. Since no inkjet printable piezoelectric ink is commercially available, stable inkjet printable polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) ink has been developed. PVDF-TrFE layers were then successfully printed and characterized. The results were quite promising, however further improvements of the ink and printing process are required before stepping towards piezoelectric based device fabrication.L’objectif de ce travail était de concevoir et réaliser par impression un capteur acoustique capacitif résonant bas coût. Il s’inscrit dans le cadre d’un projet collaboratif de recherche intitulé « Spinnaker », défini par la société Tagsys RFID qui souhaite intégrer ce capteur afin d’améliorer la géolocalisation des étiquettes RFID. Ce travail a débuté par la conception et l’optimisation du design en utilisant la simulation par éléments finis (COMSOL) ainsi que des plans d’expériences (DOE : Design of Experiment). Cette première étape a permis de déterminer les paramètres optimaux et démontrer que les performances obtenues étaient conformes aux spécifications. Nous avons ensuite développé les différentes briques technologiques nécessaires à la réalisation des prototypes en utilisant conjointement l’impression 2D par inkjet et l’impression 3D. Nous avons vérifié la fonctionnalité de ces capteurs à l’aide de mesures électriques capacitives et acoustiques par vibrométrie laser. Nous avons démontré la sélectivité en fréquence des capteurs réalisés et comparé les résultats expérimentaux à ceux obtenus par simulation. Enfin, nous avons enfin exploré la « voie piezoélectrique » qui nous semble être une alternative intéressante au principe capacitif. En l’absence d’encre piézoélectrique commerciale imprimable par jet de matière, nous avons formulé une encre imprimable à base du co-polymère PVDF-TrFE et démontré le caractère piézoélectrique des couches imprimées. Les résultats sont prometteurs mais des améliorations doivent encore être apportées à cette encre et au procédé d’impression avant de pouvoir fabriquer des premiers prototypes

Investigating the build-up of precedence effect using reflection masking

The auditory processing level involved in the build‐up of precedence [Freyman et al., J. Acoust. Soc. Am. 90, 874–884 (1991)] has been investigated here by employing reflection masked threshold (RMT) techniques. Given that RMT techniques are generally assumed to address lower levels of the auditory signal processing, such an approach represents a bottom‐up approach to the buildup of precedence. Three conditioner configurations measuring a possible buildup of reflection suppression were compared to the baseline RMT for four reflection delays ranging from 2.5–15 ms. No buildup of reflection suppression was observed for any of the conditioner configurations. Buildup of template (decrease in RMT for two of the conditioners), on the other hand, was found to be delay dependent. For five of six listeners, with reflection delay=2.5 and 15 ms, RMT decreased relative to the baseline. For 5‐ and 10‐ms delay, no change in threshold was observed. It is concluded that the low‐level auditory processing involved in RMT is not sufficient to realize a buildup of reflection suppression. This confirms suggestions that higher level processing is involved in PE buildup. The observed enhancement of reflection detection (RMT) may contribute to active suppression at higher processing levels