Nanowire Zinc Oxide MOSFET Pressure Sensor

Fabrication and characterization of a new kind of pressure sensor using self-assembly Zinc Oxide (ZnO) nanowires on top of the gate of a Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) is presented. Self-assembly ZnO nanowires were fabricated with a diameter of 80 nm and 800 nm height (80:8 aspect ratio) on top of the gate of the MOSFET. The sensor showed a 110% response in the drain current due to pressure, even with the expected piezoresistive response of the silicon device removed from the measurement. The pressure sensor was fabricated through low temperature bottom up ultrahigh aspect ratio ZnO nanowire growth using anodic alumina oxide (AAO) templates. The pressure sensor has two main components: MOSFET and ZnO nanowires. Silicon Dioxide growth, photolithography, dopant diffusion, and aluminum metallization were used to fabricate a basic MOSFET. In the other hand, a combination of aluminum anodization, alumina barrier layer removal, ZnO atomic layer deposition (ALD), and wet etching for nanowire release were optimized to fabricate the sensor on a silicon wafer. The ZnO nanowire fabrication sequence presented is at low temperature making it compatible with CMOS technology

Room temperature self-assembly of mixed nanoparticles into complex material systems and devices

The ability to manufacture nanomaterials with complex and structured composition using otherwise incompatible materials increasingly underpins the next generation of technologies. This is translating into growing efforts integrating a wider range of materials onto key technology platforms1 - in photonics, one such platform is silica, a passive, low loss and robust medium crucial for efficient optical transport2. Active functionalisation, either through added gain or nonlinearity, is mostly possible through the integration of active materials3, 4. The high temperatures used in manufacturing of silica waveguides, unfortunately, make it impossible to presently integrate many organic and inorganic species critical to achieving this extended functionality. Here, we demonstrate the fabrication of novel waveguides and devices made up of complex silica based materials using the self-assembly of nanoparticles. In particular, the room temperature fabrication of silica microwires integrated with organic dyes (Rhodamine B) and single photon emitting nanodiamonds is presented.Comment: Key words: nanotechnology, nanoparticles, self-assembly, quantum science, singel photon emitters, telecommunications, sensing, new materials, integration of incompatible materials, silica, glass, breakthrough scienc

Roadmap on semiconductor-cell biointerfaces.

This roadmap outlines the role semiconductor-based materials play in understanding the complex biophysical dynamics at multiple length scales, as well as the design and implementation of next-generation electronic, optoelectronic, and mechanical devices for biointerfaces. The roadmap emphasizes the advantages of semiconductor building blocks in interfacing, monitoring, and manipulating the activity of biological components, and discusses the possibility of using active semiconductor-cell interfaces for discovering new signaling processes in the biological world