High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection

A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive mass detection. Energy dissipation from intrinsic mechanical loss of the PZT film was successfully compressed by separating the PZT actuator from resonant structure. Excellent Q-factor, which is several times larger than conventional PZT cantilever, was achieved under both atmospheric pressure and reduced pressures. For a 30 micrometer-wide 100 micrometer-long cantilever, Q-factor was measured as high as 1113 and 7279 under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was found that high-mode vibration can be realized by the cantilever for the pursuit of great Q-factor, while support loss became significant because of the increased vibration amplitude at the actuation point. An optimized structure using node-point actuation was suggested then to suppress corresponding energy dissipation.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Real-Time Bio Sensing Using Micro-Channel Encapsulated MEMS Resonators

This work presents a label-free bio-molecular detection technique based on realtime monitoring of the resonant frequency of micromechanical thermal-piezoresistive rotational mode disk resonators encapsulated in microfluidic channels. Mass loading via adsorption of molecular layers on the surface of such devices results in a frequency shift. In order to provide a reliable platform for sample-resonator interactions and to protect the resonators from contaminants, the resonators were encapsulated in PDMS-based microfluidic channels. Micro-channel encapsulation also allows insulation of electrical signals from the analyte solution. To characterize the performance of such devices as real-time label-free bio-molecular detectors, the strong non-covalent binding of Avidin with its ligand, biotin was utilized. To further validate the measured frequency shifts and confirm that the frequency shifts are due to molecular attachments to the resonator surfaces, fluorescent labeled molecules followed by fluorescent imaging was used confirming the existence of the expected molecular layers on the resonator surfaces

Fabrication and characterization of free-standing thick-film piezoelectric cantilevers for energy harvesting

Research into energy harvesting from ambient vibration sources has attracted great interest over the last few years, largely as a result of advances in the areas of wireless technology and low-power electronics. One of the mechanisms for converting mechanical vibration to electrical energy is the use of piezoelectric materials, typically operating as a cantilever in a bending mode, which generate a voltage across the electrodes when they are stressed. Typically, the piezoelectric materials are deposited on a non-electro-active substrate and are physically clamped at one end to a rigid base. The presence of the substrate does not contribute directly to the electrical output, but merely serves as a mechanical supporting platform, which can pose difficulties for integration with other microelectronic devices. The aim of this paper is to describe a novel thick-film free-standing cantilever structure that does not use a supporting platform and has the advantage of minimizing the movement constraints on the piezoelectric material, thereby maximizing the electrical output power. Two configurations of the composite cantilever structure were investigated: unimorph and multimorph. A unimorph consists of a pair of silver/palladium (Ag/Pd) electrodes sandwiching a laminar layer of lead zirconate titanate (PZT). A mulitmorph is an extended version of the unimorph with two pairs of Ag/Pd electrodes and three laminar sections of PZT

Microelectromechanical Systems and Devices

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators

DESIGN, FABRICATION AND CHARACTERISATION OF FREE-STANDING THICK-FILM PIEZOELECTRIC CANTILEVERS FOR ENERGY HARVESTING

Research into energy harvesting from ambient vibration sources has attracted great interest over the last few years, largely due to the rapid development in the areas of wireless technology and low power electronics. One of the mechanisms for converting mechanical vibration to electrical energy is the use of piezoelectric materials, typically operating as a cantilever in a bending mode, which generate a voltage across the electrodes when they are stressed. Traditionally, the piezoelectric materials are deposited on a non-electro-active substrate and are physically clamped at one end to a rigid base, which serves as a mechanical supporting platform. In this research, a three dimensional thick-film structure in the form of a free-standing cantilever incorporated with piezoelectric materials is proposed. The advantages of this structure include minimising the movement constraints on the piezoelectric, thereby maximising the electrical output and offering the ability for integration with other microelectronic devices. A series of free-standing composite cantilevers in the form of unimorphs were fabricated and characterised for their mechanical and electric properties. The unimorph structure consists of a pair of silver/palladium (Ag/Pd) electrodes sandwiching a laminar layer of lead zirconate titanate (PZT). An extended version of this unimorph, in the form of multimorph was fabricated to improve the electrical output performance, by increasing the distance of the piezoelectric layer from the neutral axis of the structure. This research also discusses the possibility of using an array of free-standing cantilevers in harvesting vibration energy in a broader bandwidth from an unpredictable ambient environment

Analytical Modeling for the Bending Resonant Frequency of Multilayered Microresonators with Variable Cross-Section

Multilayered microresonators commonly use sensitive coating or piezoelectric layers for detection of mass and gas. Most of these microresonators have a variable cross-section that complicates the prediction of their fundamental resonant frequency (generally of the bending mode) through conventional analytical models. In this paper, we present an analytical model to estimate the first resonant frequency and deflection curve of single-clamped multilayered microresonators with variable cross-section. The analytical model is obtained using the Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. Our model is applied to two multilayered microresonators with piezoelectric excitation reported in the literature. Both microresonators are composed by layers of seven different materials. The results of our analytical model agree very well with those obtained from finite element models (FEMs) and experimental data. Our analytical model can be used to determine the suitable dimensions of the microresonator’s layers in order to obtain a microresonator that operates at a resonant frequency necessary for a particular application