Accelerating Electromigration Aging: Fast Failure Detection for Nanometer ICs

For practical testing and detection of electromigration (EM) induced failures in dual damascene copper interconnects, one critical issue is creating stressing conditions to induce the chip to fail exclusively under EM in a very short period of time so that EM sign-off and validation can be carried out efficiently. Existing acceleration techniques, which rely on increasing temperature and current densities beyond the known limits, also accelerate other reliability effects making it very difficult, if not impossible, to test EM in isolation. In this article, we propose novel EM wear-out acceleration techniques to address the aforementioned issue. First we show that multi-segment interconnects with reservoir and sink structures can be exploited to significantly speedup the EM wear-out process. Based on this observation, we propose three strategies to accelerate EM induced failure: reservoir-enhanced acceleration, sink-enhanced acceleration, and a hybrid method that combines both reservoir and sink structures. We then propose several configurable interconnect structures that exploit atomic reservoirs and sinks for accelerated EM testing. Such configurable interconnect structures are very flexible and can be used to achieve significant lifetime reductions at the cost of some routing resources. Using the proposed technique, EM testing can be carried out at nominal current densities, and at a much lower temperature compared to traditional testing methods. This is the most significant contribution of this work since, to our knowledge, this is the only method that allows EM testing to be performed in a controlled environment without the risk of invoking other reliability effects that are also accelerated by elevated temperature and current density. Simulation results show that, using the proposed method, we can reduce the EM lifetime of a chip from 10 years down to a few hours 10^5X acceleration under the 150C temperature limit, which is sufficient for practical EM testing of typical nanometer CMOS ICs

Physics-Based Electromigration Modeling and Analysis and Optimization

Long-term reliability is a major concern in modern VLSI design. Literature has shown that reliability gets worse as technology advances. It is expected that the future VLSI systems would have shorter reliability-induced lifetime comparing with previous generations. Being one of the most serious reliability effects, electromigration (EM) is a physical phenomenon of the migration of metal atoms due to the momentum exchange between atoms and the conducting electrons. It can cause wire resistance change or open circuit and result in functional failure of the circuit. Power-ground networks are the most vulnerable part to EM effect among all the interconnect wires since the current flow on this part is the largest on the chip. With new generation oftechnology node and aggressive design strategies, more accurate and efficient EM models are required. However, traditional EM approaches are very conservative and cannot meet current aggressive design strategies. Besides circuit level, EM also need to be thoroughly studied in system level due to limited power and temperature budgets among cores on chip. This research focuses on developing physical level EM model for VLSI circuits and system level EM optimization for multi-core systems in order to overcome the aforementioned problems. Specifically, for physical level, we develop two EM immortality check methods and a power grid EM check method. Firstly, a voltage based EM immortality analysis has been developed. Immortality condition in nucleation phase can be determined fast and accurately for multi-segment interconnect wires. Secondly, a saturation volume based incubation phase immortality check method has been proposed. This method can further reduce the redundancy in VLSI circuit design by immortality check in multiphase. Furthermore, both immortality check methods are integrated into a new power grid EM check methodology (EMspice) as filter for EM analysis. These filters can accelerate the simulation by filtering out immortal trees so that we only need to do simulation on fewer trees that are mortal. Coupled EM simulation considering both hydrostatic stress and electronic current/voltage in the power grid network will be applied to these mortal trees. This tool can work seamlessly with commercial synthesis flow. Besides physical level reliability models, system level reliability optimization is also discussed in this research. A deep reinforcement learning based EM optimization has been proposed for multi-core system. Both long term reliability effect (hard error) and transient soft error are considered. Energy can be optimized with all the reliability and other constraints fast and accurately compared to existing reliability management techniques. Last but not least, a scheduling based reliability optimization method for multi-core systems has been proposed. NBTI, HCI and EM are considered jointly. Lifetime of the system can be improved significantly compared to traditional methods which mainly focus on utilization

Simulation for Reliability, Hardware Security, and Ising Computing in VLSI Chip Design

The continued scaling of VLSI circuits has provided a wealth of opportunities andchallenges to the VLSI circuit design area. Both these challenges and opportunities, however,require new simulation tools that can enable their solution or exploitation as classicalmethods typically dealt with problem domains with smaller scales or less complexity. Inthis dissertation, simulation methods are presented to address the emerging VLSI designtopics of Electromigration induced aging and Ising computing and are then applied to theapplication areas of hardware security and graph partitioning respectively.The Electromigration aging effect in VLSI circuits is a long-term reliability issueaffecting current carrying metal wires leading to IR drop degradation. Typically, simpleanalytical equations can determine a wire’s effective age or if it will be affected by the EMaging effect at all. However, these classical methods are overly conservative and can lead toover design or unnecessary design iterations. Furthermore, it is expected that the EM agingeffect will become more severe in future Integrated Cirucits (ICs) due to increasing currentdensities and the prevalance of polycrystaline copper atom structures seen at small wiredimensions. For this reason, more comprehensive simulation techniques that can efficientlysimulate the EM effect with less conservative results can help mitigate overdesign andincrease design margins while reducing design iterations.The area of Hardware Security is becoming increasingly important as the chipsupply chain becomes more globalized and the integrity of chips becomes more diffiuclt toverify. Utilizing the accurate simulation techniques for EM, we can utilize this reliabilityeffect to demonstrate how a reliability based attack could be perpatrated. Furthermore, wecan utilize this aging effect as a defense mechanism to help us validate the integrity of anIC and detect counterfeit chips in the component supply chain market.Ising computing is an emerging method of solving combinatorial optimization problemsby simulating the interactions of so-called spin glasses and their interactions. Borrowingconcepts from quantum computing, this methods mimics the quantum interaction betweenspin glasses in such a way that finding a ground state of these spin glass models leadsto the solution of a particular problem. In this dissertation, effective methods of simulatingthe spin glass interactions using General Purpose Graphics Processing Units (GPGPUs)and finding their ground state are developed.In addition to the GPU based Ising model simulations, important combinatorialproblems can be mapped to the Ising model. In this dissertation the Ising solver is appliedto graph partitioning which can be utilized in VLSI design and many other domains as well.Specifically, solvers for the maxcut problem and the balanced min-cut partitioning problemare developed

Analog layout design automation: ILP-based analog routers

The shrinking design window and high parasitic sensitivity in the advanced technology have imposed special challenges on the analog and radio frequency (RF) integrated circuit design. In this thesis, we propose a new methodology to address such a deficiency based on integer linear programming (ILP) but without compromising the capability of handling any special constraints for the analog routing problems. Distinct from the conventional methods, our algorithm utilizes adaptive resolutions for various routing regions. For a more congested region, a routing grid with higher resolution is employed, whereas a lower-resolution grid is adopted to a less crowded routing region. Moreover, we strengthen its speciality in handling interconnect width control so as to route the electrical nets based on analog constraints while considering proper interconnect width to address the acute interconnect parasitics, mismatch minimization, and electromigration effects simultaneously. In addition, to tackle the performance degradation due to layout dependent effects (LDEs) and take advantage of optical proximity correction (OPC) for resolution enhancement of subwavelength lithography, in this thesis we have also proposed an innovative LDE-aware analog layout migration scheme, which is equipped with our special routing methodology. The LDE constraints are first identified with aid of a special sensitivity analysis and then satisfied during the layout migration process. Afterwards the electrical nets are routed by an extended OPC-inclusive ILP-based analog router to improve the final layout image fidelity while the routability and analog constraints are respected in the meantime. The experimental results demonstrate the effectiveness and efficiency of our proposed methods in terms of both circuit performance and image quality compared to the previous works

Study of initial void formation and electron wind force for scaling effects on electromigration in Cu interconnects

textThe continuing scaling of integrated circuits beyond 22nm technology node poses increasing challenges to Electromigration (EM) reliability for Cu on-chip interconnects. First, the width of Cu lines in advanced technology nodes is less than the electron mean free path which is 39nm in Cu at room temperature. This is a new size regime where any new scaling effect on EM is of basic interest. And second, the reduced line width necessitates the development of new methods to analyze the EM characteristics. Such studies will require the development of well controlled processes to fabricate suitable test structures for EM study and model verification. This dissertation is to address these critical issues for EM in Cu interconnects. The dissertation first studies the initial void growth under EM, which is critical for measurement of the EM lifetime and statistics. A method based on analyzing the resistance traces obtained from EM tests of multi-link structures has been developed. The results indicated that there are three stages in the resistance traces where the rate of the initial void growth in Stage I is lower than that in Stage III after interconnect failure and they are linearly correlated. An analysis extending the Korhonen model has been formulated to account for the initial void formation. In this analysis, the stress evolution in the line during void growth under EM was analyzed in two regions and an analytic solution was deduced for the void growth rate. A Monte Carlo grain growth simulation based on the Potts model was performed to obtain grain structures for void growth analysis. The results from this analysis agreed reasonably well with the EM experiments. The next part of the dissertation is to study the size effect on the electron wind force for a thin film and for a line with a rectangular cross section. The electron wind force was modeled by considering the momentum transfer during collision between electrons and an atom. The scaling effect on the electron wind force was found to be represented by a size factor depending on the film/line dimensions. In general, the electron wind force is enhanced with increasing dimensional confinement. Finally, a process for fabrication of Si nanotrenches was developed for deposition of Cu nanolines with well-defined profiles. A self-aligned sub-lithographic mask technique was developed using polymer residues formed on Si surfaces during reactive ion etching of Si dioxide in a fluorocarbon plasma. This method was capable to fabricate ultra-narrow Si nanotrenches down to 20nm range with rectangular profiles and smooth sidewalls, which are ideal for studying EM damage mechanisms and model verification for future technology nodes.Physic

A CAD tool for the prediction of VLSI interconnect reliability.

Thesis (Ph.D.)-University of Natal, Durban, 1988.This thesis proposes a new approach to the design of reliable VLSI interconnects, based on predictive failure models embedded in a software tool for reliability analysis. A method for predicting the failure rate of complex integrated circuit interconnects subject to electromigration, is presented. This method is based on the principle of fracturing an interconnect pattern into a number of statistically independent conductor segments. Five commonly-occurring segment types are identified: straight runs, steps resulting from a discontinuity in the wafer surface, contact windows, vias and bonding pads. The relationship between median time-to-failure (Mtf) of each segment and physical dimensions, temperature and current density are determined. This model includes the effect of time-varying current density. The standard deviation of lifetime is also determined as a function of dimensions. A· minimum order statistical method is used to compute the failure rate of the interconnect system. This method, which is applicable to current densities below 106 AI cm2 , combines mask layout and simulation data from the design data base with process data to calculate failure rates. A suite of software tools called Reliant (RELIability Analyzer for iNTerconnects) which implements the algorithms described above, is presented. Reliant fractures a conductor pattern into segments and extracts electrical equivalent circuits for each segment. The equivalent circuits are used in conjunction with a modified version of the SPICE circuit simulator to determine the currents in all segments and to compute reliability. An interface to a data base query system provides the capability to access reliability data interactively. The performance of Reliant is evaluated, based on two CMOS standard cell layouts. Test structures for the calibration of the reliability models are provided. Reliant is suitable for the analysis of leaf cells containing a few hundred transistors. For MOS VLSI circuits, an alternative approach based on the use of an event-driven switch-level simulator is presented

Dependable Embedded Systems

This Open Access book introduces readers to many new techniques for enhancing and optimizing reliability in embedded systems, which have emerged particularly within the last five years. This book introduces the most prominent reliability concerns from today’s points of view and roughly recapitulates the progress in the community so far. Unlike other books that focus on a single abstraction level such circuit level or system level alone, the focus of this book is to deal with the different reliability challenges across different levels starting from the physical level all the way to the system level (cross-layer approaches). The book aims at demonstrating how new hardware/software co-design solution can be proposed to ef-fectively mitigate reliability degradation such as transistor aging, processor variation, temperature effects, soft errors, etc. Provides readers with latest insights into novel, cross-layer methods and models with respect to dependability of embedded systems; Describes cross-layer approaches that can leverage reliability through techniques that are pro-actively designed with respect to techniques at other layers; Explains run-time adaptation and concepts/means of self-organization, in order to achieve error resiliency in complex, future many core systems