Low-Pressure Measurement using an Extrinsic Fiber-Based Fabry-Perot Interferometer for Industrial Applications

The development of an extrinsic fiber-based Fabry-Perot interferometer (EFFPI) for low-pressure measurement in the industry applications has been studied in this work. Monochromatic light from a laser diode with a wavelength of 1310 nm is operated as a source for illuminating the EFFPI sensor. A 30 mm diameter PVC pipe is utilized as a target, of which one end is sealed with a rubber balloon and the end is connected to the air pressure flow controlling system. Furthermore, the center point of the balloon is secured with a reflective thin film, which has a reflectance of ~55%. For the performance validation of the fiber sensor, a low-pressure range from 5 to 50 mBar is released onto the target. With 12 rounds repeatability, the experimental results reported that the average measured pressure values from the EFFPI sensor are 4.915 – 50.988 mBar. When compared to the reference instrument, the maximum and average errors in percentage terms are, however, 3.77% and 1.45%, respectively. In addition, results showed that the measured pressure value is directly proportional to the number of interference fringes, giving a sensitivity in the pressure measurement of the EFFPI sensor of 0.248 mBar/fringe

Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications

Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a small grinding force and low surface roughness. The sensor head was formed by hermetically bonding two layers of SiC using a nickel diffusion bonding method. The pressure sensor illustrated a good linearity in the range of 0.1–0.9 MPa, with a resolution of 0.27% F.S. (full scale) at room temperature

Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications

Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a small grinding force and low surface roughness. The sensor head was formed by hermetically bonding two layers of SiC using a nickel diffusion bonding method. The pressure sensor illustrated a good linearity in the range of 0.1–0.9 MPa, with a resolution of 0.27% F.S. (full scale) at room temperature