Transfer of Individual Micro- and Nanoparticles for High- Precision 3D Analysis Using 360° Electron Tomography

A versatile approach is demonstrated, providing a general routine for an extensive and advanced 3D characterization of individually selected micro- and nanoparticles, enabling the combination of complementary and scale-bridging techniques. Quintessential to the method is the transfer of individual particles onto tailored tips using a conventional scanning electron microscope equipped with a suitable micromanipulator. The method enables a damage- and contamination-free preparation of freestanding particles. This is of significant importance for applications addressing the measurement of structural, physical, and chemical properties of specifically selected particles, such as 360° electron tomography, atom probe tomography, nano X-ray tomography, or optical near-field measurements. In this context, the method is demonstrated for 360° electron tomography of micro-/macroporous zeolite particles with sizes in the micrometer range and mesoporous alpha-hematite nanoparticles exhibiting sizes of 50–100 nm, including detailed pre- and postcharacterization on the nanoscale.“Deutsche Forschungsgemeinschaft” (DFG) within the framework of the SPP 1570 (project DFG SP 648/4-3 “3D analysis of complex pore structures using ET and high-resolution TEM”) and the research training group GRK 1896 (“In situ Microscopy with Electrons, X-rays and Scanning Probes”) as well as through the Cluster of Excellence “Engineering of Advanced Materials” at the Friedrich-Alexander-Universität Erlangen-Nürnberg (Germany)FIBJulian Losche

Investigation of ion induced bending mechanism for nanostructures

Ion induced bending is a promising controlled technique for manipulating nanoscale structures. However, the underlying mechanism of the process is not well understood. In this letter, we report a detailed study of the bending mechanism of Si nanowires (NWs) under Ga+ irradiation. The microstructural changes in the NW due to ion beam irradiation are studied and molecular dynamics simulations are used to explore the ion–NW interaction processes. The simulation results are compared with the microstructural studies of the NW. The investigations inform a generic understanding of the bending process in crystalline materials, which we suggest to be feasible as a versatile manipulation and integration technique in nanotechnology

マルチ スケール キノウ ヲ ユウスル コウソク ジドウ マイクロ マニピュレーション システム

Ebubekir Avci, Chanh-Nghiem Nguyen, Kenichi Ohara, Yasushi Mae, Tatsuo Arai, Analysis and suppression of residual vibration in microhand for high-speed single-cell manipulation, International Journal of Mechatronics and Automation, 2013-Vol.3, No.2, pp.110-11

MICROMANIPULATOR-RESONATOR SYSTEM FOR SELECTIVE WEIGHING OF INDIVIDUAL MICROPARTICLES

Over the past decade, MEMS-based cantilever sensors have been widely used in the detection of biomolecules, environmental pollutants, chemicals and pathogens. Cantilever-based sensors rely on attachment of target entities on their surface. The attachment causes either change in surface stress or resonance frequency of the cantilever, which is detected using various schemes that range from optical to piezoelectric. The majority of these sensors rely on probabilistic attachment of multiple target entities to the sensor surface. This introduces uncertainties since the location of the adsorbed target entity can modify the signal generated by the sensor. In addition, it does not allow the measurement of individually selected target entities. The goal of this dissertation is to exploit the cantilever-based sensors\u27 mass sensing capability to develop a supermarket weight scale for the micro world: a scheme that can enable the user to pick an individual target entity and weigh only that particular entity by precisely positioning it on a micro- weight scale

Investigating the Morphology and Mechanics of Biogenic Hierarchical Materials at and below Micrometer Scale

Investigating and understanding the intrinsic material properties of biogenic materials, which have evolved over millions of years into admirable structures with difficult to mimic hierarchical levels, holds the potential of replacing trial-and-error-based materials optimization in our efforts to make synthetic materials of similarly advanced complexity and properties. An excellent example is biogenic silica which is found in the exoskeleton of unicellular photosynthetic algae termed diatoms. Because of the complex micro-and nanostructures found in their exoskeleton, deter-mining the intrinsic mechanical properties of biosilica in diatoms has only partly been accomplished. Here, a general method is presented in which a combination of in situ deformation tests inside an SEM with a realistic 3D model of the frustule of diatom Craspedostauros sp. (C. sp.) obtained by electron tomography, alongside finite element method (FEM) simulations, enables quantification of the Young’s modulus (E = 2.3 ± 0.1 GPa) of this biogenic hierarchical silica. The workflow presented can be readily extended to other diatom species, biominerals, or even synthetic hierarchical materials.</p

Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary