Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Development of novel micropneumatic grippers for biomanipulation

Microbjects with dimensions from 1 μm to 1 mm have been developed recently for different aspects and purposes. Consequently, the development of handling and manipulation tools to fulfil this need is urgently required. Micromanipulation techniques could be generally categorized according to their actuation method such as electrostatic, thermal, shape memory alloy, piezoelectric, magnetic, and fluidic actuation. Each of which has its advantage and disadvantage. The fluidic actuation has been overlooked in MEMS despite its satisfactory output in the micro-scale. This thesis presents different families of pneumatically driven, low cost, compatible with biological environment, scalable, and controllable microgrippers. The first family demonstrated a polymeric microgripper that was laser cut and actuated pneumatically. It was tested to manipulate microparticles down to 200 microns. To overcome the assembly challenges that arise in this family, the second family was proposed. The second family was a micro-cantilever based microgripper, where the device was assembled layer by layer to form a 3D structure. The microcantilevers were fabricated using photo-etching technique, and demonstrated the applicability to manipulate micro-particles down to 200 microns using automated pick-and-place procedure. In addition, this family was used as a tactile-detector as well. Due to the angular gripping scheme followed by the above mentioned families, gripping smaller objects becomes a challenging task. A third family following a parallel gripping scheme was proposed allowing the gripping of smaller objects to be visible. It comprises a compliant structure microgripper actuated pneumatically and fabricated using picosecond laser technology, and demonstrated the capability of gripping microobject as small as 100 μm microbeads. An FEA modelling was employed to validate the experimental and analytical results, and excellent matching was achieved

Scalability study for robotic hand platform

The goal of this thesis project was to determine the lower limit of scale for the RIT robotic grasping hand. This was accomplished using a combination of computer simulation and experimental studies. A force analysis was conducted to determine the size of air muscles required to achieve appropriate contact forces at a smaller scale. Input variables, such as the actuation force and tendon return force, were determined experimentally. A dynamic computer model of the hand system was then created using Recurdyn. This was used to predict the contact (grasping) force of the fingers at full-scale, half-scale, and quarter-scale. Correlation between the computer model and physical testing was achieved for both a life-size and half-scale finger assembly. To further demonstrate the scalability of the hand design, both half and quarter-scale robotic hand rapid prototype assemblies were built using 3D printing techniques. This thesis work identified the point where further miniaturization would require a change in the manufacturing process to micro-fabrication. Several techniques were compared as potential methods for making a production intent quarter-scale robotic hand. Investment casting, Swiss machining, and Selective Laser Sintering were the manufacturing techniques considered. A quarter-scale robotic hand tested the limits of each technology. Below this scale, micro-machining would be required. The break point for the current actuation method, air muscles, was also explored. Below the quarter-scale, an alternative actuation method would also be required. Electroactive Polymers were discussed as an option for the micro-scale. In summary, a dynamic model of the RIT robotic grasping hand was created and validated as scalable at full and half-scales. The model was then used to predict finger contact forces at the quarter-scale. The quarter-scale was identified as the break point in terms of the current RIT robotic grasping hand based on both manufacturing and actuation. A novel, prototype quarter-scale robotic hand assembly was successfully built by an additive manufacturing process, a high resolution 3D printer. However, further miniaturization would require alternate manufacturing techniques and actuation mechanisms

Haptic feedback in teleoperation in Micro-and Nano-Worlds.

International audienceRobotic systems have been developed to handle very small objects, but their use remains complex and necessitates long-duration training. Simulators, such as molecular simulators, can provide access to large amounts of raw data, but only highly trained users can interpret the results of such systems. Haptic feedback in teleoperation, which provides force-feedback to an operator, appears to be a promising solution for interaction with such systems, as it allows intuitiveness and flexibility. However several issues arise while implementing teleoperation schemes at the micro-nanoscale, owing to complex force-fields that must be transmitted to users, and scaling differences between the haptic device and the manipulated objects. Major advances in such technology have been made in recent years. This chapter reviews the main systems in this area and highlights how some fundamental issues in teleoperation for micro- and nano-scale applications have been addressed. The chapter considers three types of teleoperation, including: (1) direct (manipulation of real objects); (2) virtual (use of simulators); and (3) augmented (combining real robotic systems and simulators). Remaining issues that must be addressed for further advances in teleoperation for micro-nanoworlds are also discussed, including: (1) comprehension of phenomena that dictate very small object (< 500 micrometers) behavior; and (2) design of intuitive 3-D manipulation systems. Design guidelines to realize an intuitive haptic feedback teleoperation system at the micro-nanoscale level are proposed

Workshop on "Control issues in the micro / nano - world".

International audienceDuring the last decade, the need of systems with micro/nanometers accuracy and fast dynamics has been growing rapidly. Such systems occur in applications including 1) micromanipulation of biological cells, 2) micrassembly of MEMS/MOEMS, 3) micro/nanosensors for environmental monitoring, 4) nanometer resolution imaging and metrology (AFM and SEM). The scale and requirement of such systems present a number of challenges to the control system design that will be addressed in this workshop. Working in the micro/nano-world involves displacements from nanometers to tens of microns. Because of this precision requirement, environmental conditions such as temperature, humidity, vibration, could generate noise and disturbance that are in the same range as the displacements of interest. The so-called smart materials, e.g., piezoceramics, magnetostrictive, shape memory, electroactive polymer, have been used for actuation or sensing in the micro/nano-world. They allow high resolution positioning as compared to hinges based systems. However, these materials exhibit hysteresis nonlinearity, and in the case of piezoelectric materials, drifts (called creep) in response to constant inputs In the case of oscillating micro/nano-structures (cantilever, tube), these nonlinearities and vibrations strongly decrease their performances. Many MEMS and NEMS applications involve gripping, feeding, or sorting, operations, where sensor feedback is necessary for their execution. Sensors that are readily available, e.g., interferometer, triangulation laser, and machine vision, are bulky and expensive. Sensors that are compact in size and convenient for packaging, e.g., strain gage, piezoceramic charge sensor, etc., have limited performance or robustness. To account for these difficulties, new control oriented techniques are emerging, such as[d the combination of two or more ‘packageable' sensors , the use of feedforward control technique which does not require sensors, and the use of robust controllers which account the sensor characteristics. The aim of this workshop is to provide a forum for specialists to present and overview the different approaches of control system design for the micro/nano-world and to initiate collaborations and joint projects

Objekt-Manipulation und Steuerung der Greifkraft durch Verwendung von Taktilen Sensoren

This dissertation describes a new type of tactile sensor and an improved version of the dynamic tactile sensing approach that can provide a regularly updated and accurate estimate of minimum applied forces for use in the control of gripper manipulation. The pre-slip sensing algorithm is proposed and implemented into two-finger robot gripper. An algorithm that can discriminate between types of contact surface and recognize objects at the contact stage is also proposed. A technique for recognizing objects using tactile sensor arrays, and a method based on the quadric surface parameter for classifying grasped objects is described. Tactile arrays can recognize surface types on contact, making it possible for a tactile system to recognize translation, rotation, and scaling of an object independently.Diese Dissertation beschreibt eine neue Art von taktilen Sensoren und einen verbesserten Ansatz zur dynamischen Erfassung von taktilen daten, der in regelmäßigen Zeitabständen eine genaue Bewertung der minimalen Greifkraft liefert, die zur Steuerung des Greifers nötig ist. Ein Berechnungsverfahren zur Voraussage des Schlupfs, das in einen Zwei-Finger-Greifarm eines Roboters eingebaut wurde, wird vorgestellt. Auch ein Algorithmus zur Unterscheidung von verschiedenen Oberflächenarten und zur Erkennung von Objektformen bei der Berührung wird vorgestellt. Ein Verfahren zur Objekterkennung mit Hilfe einer Matrix aus taktilen Sensoren und eine Methode zur Klassifikation ergriffener Objekte, basierend auf den Daten einer rechteckigen Oberfläche, werden beschrieben. Mit Hilfe dieser Matrix können unter schiedliche Arten von Oberflächen bei Berührung erkannt werden, was es für das Tastsystem möglich macht, Verschiebung, Drehung und Größe eines Objektes unabhängig voneinander zu erkennen

Microgripper design and evaluation for automated µ-wire assembly: a survey

Microgrippers are commonly used for micromanipulation of micro-objects from 1 to 100 µm and attain features of reliable accuracy, low cost, wide jaw aperture and variable applied force. This paper aim is to review the design of different microgrippers which can manipulate and assemble µ-wire to PCB connectors. A review was conducted on microgrippers’ technologies, comparing fundamental components of structure and actuators’ types, which determined the most suitable design for the required micromanipulation task. Various microgrippers’ design was explored to examine the suitability and the execution of requirements needed for successful micromanipulation

DEVELOPMENT OF A SOFT PNEUMATIC ACTUATOR FOR MODULAR ROBOTIC MECHANISMS

Soft robotics is a widely and rapidly growing field of research today. Soft pneumatic actuators, as a fundamental element in soft robotics, have gained huge popularity and are being employed for the development of soft robots. During the last decade, a variety of hyper-elastic robotic systems have been realized. As the name suggests, such robots are made up of soft materials, and do not have any underlying rigid mechanical structure. These robots are actuated employing various methods like pneumatic, electroactive, jamming etc. Generally, in order to achieve a desired mechanical response to produce required actuation or manipulation, two or more materials having different stiffness are utilized to develop a soft robot. However, this method introduces complications in the fabrication process as well as in further design flexibility and modifications. The current work presents a design scheme of a soft robotic actuator adapting an easier fabrication approach, which is economical and environment friendly as well. The purpose is the realization of a soft pneumatic actuator having functional ability to produce effective actuation, and which is further employable to develop modular and scalable mechanisms. That infers to scrutinize the profile and orientation of the internal actuation cavity and the outer shape of viii the actuator. Utilization of a single material for this actuator has been considered to make this design scheme convenient. A commercial silicone rubber was selected which served for an economical process both in terms of the cost as well as its accommodating fabrication process through molding. In order to obtain the material behavior, \u2018Ansys Workbench 17.1 R \u2019 has been used. Cubic outline for the actuator aided towards the realization of a body shape which can easily be engaged for the development of modular mechanisms employing multiple units. This outer body shape further facilitates to achieve the stability and portability of the actuator. The soft actuator has been named \u2018Soft Cubic Module\u2019 based on its external cubic shape. For the internal actuation cavity design, various shapes, such as spherical, elliptical and cylindrical, were examined considering their different sizes and orientations within the cubic module. These internal cavities were simulated in order to achieve single degree of freedom actuation. That means, only one face of the cube is principally required to produce effective deformation. \u2018Creo Perametric 3.0 M 130\u2019 has been used to design the model and to evaluate the performance of actuation cavities in terms of effective deformation and the resulting von-mises stress. Out of the simulated profiles, cylindrical cavity with desired outcomes has been further considered to design the soft actuator. \u2018Ansys Workbench 17.1 R \u2019 environment was further used to assess the performance of cylindrical actuation cavity. Evaluation in two different simulation environments helped to validate the initially achieved results. The developed soft cubic actuator was then employed to develop different mechanisms in a single unit configuration as well as multi-unit robotic system developments. This design scheme is considered as the first tool to investigate its capacity to perform certain given tasks in various configurations. Alongside its application as a single unit gripper and a two unit bio-mimetic crawling mechanism, this soft actuator has been employed to realize a four degree ix of freedom robotic mechanism. The formation of this primitive soft robotic four axis mechanism is being further considered to develop an equivalent mechanism similar to the well known Stewart platform, with advantages of compactness, simpler kinematics design, easier control, and lesser cost. Overall, the accomplished results indicate that the design scheme of Soft Cubic Module is helpful in realizing a simple and cost-effective soft pneumatic actuator which is modular and scalable. Another favourable point of this scheme is the use of a single material with convenient fabrication and handling

Improving rotation behaviour of robotic structures for micro-assembly.

International audienceSerial micro-assembly requires high precision robots able to produce translations and rotations to position and orient objects during assembly. In micro-scale, the translation ranges required are typically up to the millimeter and can be obtained with smart devices (piezomotor, etc...). In the other hand, the rotation ranges stay identical to the macroscale (eg. 90°) and require standard guidings like ball bearings which induce disturbances on the linear position. Thus, the ability to produce high precision robots where translations and rotations are découpled is currently one of the major stake in microassembly. This paper deals with an original modeling of the coupling between rotation and linear position. The geometrical model is presented and two calibration methods are discussed. Our method were tested on a 3 DOF planar robotic systems and the coupling was reduced by 93 %