A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on the accuracy of the piezoactuator. However, nonlinear properties of piezoactuators can distort the image, necessitating sensor-based closed-loop actuators to achieve high accuracy AFM imaging. The advent of high-speed AFM has made the requirements on the position sensors in such a system even more stringent, requiring higher bandwidths and lower sensor mass than traditional sensors can provide. In this paper, we demonstrate a way for high-speed, high-precision closed-loop AFM nanopositioning using a novel, miniaturized micro-electro-mechanical system position sensor in conjunction with a simple PID controller. The sensor was developed to respond to the need for small, lightweight, high-bandwidth, long-range and sub-nm-resolution position measurements in high-speed AFM applications. We demonstrate the use of this sensor for closed-loop operation of conventional as well as high-speed AFM operation to provide distortion-free images. The presented implementation of this closed-loop approach allows for positioning precision down to 2.1 Å, reduces the integral nonlinearity to below 0.2%, and allows for accurate closed loop imaging at line rates up to 300 Hz

Robust control of systems with output hysteresis and input saturation using a finite time stability approach

© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.This paper presents a robust control approach for a class of nonlinear dynamic systems consisting of a linear plant connected in series with a hysteresis operator, and affected by control input saturation. Such a class of systems commonly appears in applications concerning smart materials, in particular thermal shape memory alloys wire actuators. The goal of this paper is to design a robust controller, in the form of an output PI law, which ensures set-point regulation with a desired decay rate and, at the same time, accounts for the effects of both hysteresis and input saturation. The resulting controller appears as attractive on the implementation stand-point, since no accurate hysteresis compensator is required. In order to deal with the proposed problem, the hysteretic plant is first reformulated as a linear parameter-varying system. Subsequently, a finite time stability approach is used to impose constraints on the control input. A new set of bilinear matrix inequalities is developed, in order to perform the design with reduced conservatism by properly exploiting some structural properties of the model. The effectiveness of the method is finally validated by means of a numerical case of study. © 2018 IEEE.Peer ReviewedPostprint (author's final draft

Frequency domain approach for dynamics identification of the actuator with asymmetric hysteresis

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The design, hysteresis modeling and control of a novel SMA-fishing-line actuator

Fishing line can be combined with shape memory alloy (SMA) to form novel artificial muscle actuators which have low cost, are lightweight and soft. They can be applied in bionic, wearable and rehabilitation robots, and can reduce system weight and cost, increase power-to-weight ratio and offer safer physical human-robot interaction. However, these actuators possess several disadvantages, for example fishing line based actuators possess low strength and are complex to drive, and SMA possesses a low percentage contraction and has high hysteresis. This paper presents a novel artificial actuator (known as an SMA-fishing-line) made of fishing line and SMA twisted then coiled together, which can be driven directly by an electrical voltage. Its output force can reach 2.65N at 7.4V drive voltage, and the percentage contraction at 4V driven voltage with a 3N load is 7.53%. An antagonistic bionic joint driven by the novel SMA-fishing-line actuators is presented, and based on an extended unparallel Prandtl-Ishlinskii (EUPI) model, its hysteresis behavior is established, and the error ratio of the EUPI model is determined to be 6.3%. A Joule heat model of the SMA-fishing-line is also presented, and the maximum error of the established model is 0.510mm. Based on this accurate hysteresis model, a composite PID controller consisting of PID and an integral inverse (I-I) compensator is proposed and its performance is compared with a traditional PID controller through simulations and experimentation. These results show that the composite PID controller possesses higher control precision than basic PID, and is feasible for implementation in an SMA-fishing-line driven antagonistic bionic joint

Study and Development of Mechatronic Devices and Machine Learning Schemes for Industrial Applications

Obiettivo del presente progetto di dottorato è lo studio e sviluppo di sistemi meccatronici e di modelli machine learning per macchine operatrici e celle robotizzate al fine di incrementarne le prestazioni operative e gestionali. Le pressanti esigenze del mercato hanno imposto lavorazioni con livelli di accuratezza sempre più elevati, tempi di risposta e di produzione ridotti e a costi contenuti. In questo contesto nasce il progetto di dottorato, focalizzato su applicazioni di lavorazioni meccaniche (e.g. fresatura), che includono sistemi complessi quali, ad esempio, macchine a 5 assi e, tipicamente, robot industriali, il cui utilizzo varia a seconda dell’impiego. Oltre alle specifiche problematiche delle lavorazioni, si deve anche considerare l’interazione macchina-robot per permettere un’efficiente capacità e gestione dell’intero impianto. La complessità di questo scenario può evidenziare sia specifiche problematiche inerenti alle lavorazioni (e.g. vibrazioni) sia inefficienze più generali che riguardano l’impianto produttivo (e.g. asservimento delle macchine con robot, consumo energetico). Vista la vastità della tematica, il progetto si è suddiviso in due parti, lo studio e sviluppo di due specifici dispositivi meccatronici, basati sull’impiego di attuatori piezoelettrici, che puntano principalmente alla compensazione di vibrazioni indotte dal processo di lavorazione, e l’integrazione di robot per l’asservimento di macchine utensili in celle robotizzate, impiegando modelli di machine learning per definire le traiettorie ed i punti di raggiungibilità del robot, al fine di migliorarne l’accuratezza del posizionamento del pezzo in diverse condizioni. In conclusione, la presente tesi vuole proporre soluzioni meccatroniche e di machine learning per incrementare le prestazioni di macchine e sistemi robotizzati convenzionali. I sistemi studiati possono essere integrati in celle robotizzate, focalizzandosi sia su problematiche specifiche delle lavorazioni in macchine operatrici sia su problematiche a livello di impianto robot-macchina. Le ricerche hanno riguardato un’approfondita valutazione dello stato dell’arte, la definizione dei modelli teorici, la progettazione funzionale e l’identificazione delle criticità del design dei prototipi, la realizzazione delle simulazioni e delle prove sperimentali e l’analisi dei risultati.The aim of this Ph.D. project is the study and development of mechatronic systems and machine learning models for machine tools and robotic applications to improve their performances. The industrial demands have imposed an ever-increasing accuracy and efficiency requirement whilst constraining the cost. In this context, this project focuses on machining processes (e.g. milling) that include complex systems such as 5-axes machine tool and industrial robots, employed for various applications. Beside the issues related to the machining process itself, the interaction between the machining centre and the robot must be considered for the complete industrial plant’s improvement. This scenario´s complexity depicts both specific machining problematics (e.g. vibrations) and more general issues related to the complete plant, such as machine tending with an industrial robot and energy consumption. Regarding the immensity of this area, this project is divided in two parts, the study and development of two mechatronic devices, based on piezoelectric stack actuators, for the active vibration control during the machining process, and the robot machine tending within the robotic cell, employing machine learning schemes for the trajectory definition and robot reachability to improve the corresponding positioning accuracy. In conclusion, this thesis aims to provide a set of solutions, based on mechatronic devices and machine learning schemes, to improve the conventional machining centre and the robotic systems performances. The studied systems can be integrated within a robotic cell, focusing on issues related to the specific machining process and to the interaction between robot-machining centre. This research required a thorough study of the state-of-the-art, the formulation of theoretical models, the functional design development, the identification of the critical aspects in the prototype designs, the simulation and experimental campaigns, and the analysis of the obtained results