A Two-Step Global Maximum Error Controller-Based TPWL MOR with POD Basis Vectors and Its Applications to MEMS

In our previous study, we have proposed a linearization point (LP) selection method based on a global maximum error controller for the trajectory piecewise-linear (TPWL) method. It has been demonstrated that this method has many advantages over other existing methods. In this paper, a more efficient version of this method is presented, which introduces a preliminary LP selection procedure and constructs projection matrix by the proper orthogonal decomposition (POD) method. Compared with the original method, the improved method takes much less time for extracting a reduced-order model (ROM) of similar quality and gets some other benefits (such as being easier to implement, having lower memory requirement, and enhanced flexibility). The effectiveness of the new method is fully demonstrated by a diode transmission line RLC circuit. And then, the method is applied to three more complicated microelectromechanical systems (MEMS) devices, which are a micromachined switch, an electrostatic micropump diaphragm, and a thermomechanical in-plane microactuator

Python-based MEMS inertial sensors design, simulation and optimization

With the rapid growth in microsensor technology, a never-ending range of possible applications emerged. The developments in fabrication techniques gave room to the creation of numerous new products that significantly improve human life. However, the evolution in the design, simulation, and optimization process of these devices did not observe a similar rapid growth. Thus, the microsensor technology would benefit from significant improvements in this domain. This work presents a novel methodology for electro-mechanical co optimization of microelectromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the co-optimization methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized - these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to its original state