ANN-based estimation of MEMS diaphragm response: An application for three leaf clover diaphragm based Fabry-Perot interferometer

In this study, an artificial neural network (ANN) based model is developed for MEMS diaphragm analysis, which does not require difficult and time-consuming FEM processes. ANN-based estimator is generated for static pressure response (d) and dynamic pressure response (f) analysis of TLC (three leaf clover) diaphragms for Fabry-Perot interferometers as an example. TLC is one of the unsealed MEMS design diaphragms formed by three leaves of equal angles. The diaphragms used to train ANNs are designed with SOLIDWORKS and analyzed with ANSYS. A total of 1680 TLC diaphragms are simulated with eight diaphragm parameters (3 for SiO2 material, 4 for geometry, and 1 for pressure) to create a data pool for ANN's training, validation, and testing processes. 80% of the data is used for training, 15% for validation, and the remaining for testing. Only four geometric parameters are used as input in the ANN estimator, and the material parameters are added to the model with an analytical multiplier. Thus, network models that estimate d and f values for all kinds of diaphragm materials are proposed, with a material-independently trained ANN structure. The performance of the ANN model is compared with the empirical equation suggested in the literature, and its superiority is demonstrated. In addition, the d and f parameters of TLC diaphragms designed with five different materials (Si, In2Se3, Ag, EPDM, Graphene) are estimated to be very close to the real ones. By using the proposed method, analyses of TLC diaphragms are quickly performed without the need for time-consuming and costly design and analysis programs. © 2022 Elsevier Lt

THE EFFECT OF MESA DIMENSIONS ON MEMS DIAPHRAGMS FOR FABRY-PEROT INTERFEROMETER-BASED FIBER OPTIC SENSORS

In this study, the effects of mesa dimensions on sensor response in diaphragm-based FabryPerot fiber optic sensors (FOSs) were investigated in detail. Mesa diaphragms, also called centerembossed diaphragms, have been discussed sufficiently in the literature, but the effect of mesa thickness on sensor performance has not been discussed in detail. Moreover, there is no precise analytical solution for such diaphragms. For this reason, diaphragms with different thicknesses and radii were selected, and the deflection and frequency responses of the diaphragm according to the applied acoustic pressure were analyzed using the ANSYS software, depending on whether the mesa is thinner or thicker than the diaphragm. If the thickness of the mesa is smaller than the thickness of the diaphragm, the center deflection changes drastically. However, if the thickness of the mesa is two times greater than the thickness of the diaphragm, there is no significant change in the deflection results. Similarly, if the mesa thickness is thinner than the diaphragm, the sensor’s frequency response changes drastically with increasing mesa radius. In cases where the mesa thickness is larger than the diaphragm thickness, the frequency response changes less. According to the results, mesa dimensions should be considered when designing a mesa diaphragm-based Fabry-Perot FOS

High-resolution 3D printing enabled, minimally invasive fibre optic sensing and imaging probes

Minimally invasive surgical procedures have become more favourable to their traditional surgical counterparts due to their reduced risks, faster recovery times and decreased trauma. Despite this, there are still some limitations involved with these procedures, such as the spatial confinement of operating through small incisions and the intrinsic lack of visual or tactile feedback. Specialised tools and imaging equipment are required to overcome these issues. Providing better feedback to surgeons is a key area of research to enhance the outcomes and safety profiles of minimally invasive procedures. This thesis is centred on the development of new microfabrication methods to create novel fibre optic imaging and sensing probes that could ultimately be used for improving the guidance of minimally invasive surgeries. Several themes emerged in this process. The first theme involved the use and optimisation of high-resolution 3D injection of polymers as sacrificial layers onto which parylene-C was deposited. One outcome from this theme was a series of miniaturised parylene-C based membranes to create fibre optic pressure sensors for physiological pressure measurements and for ultrasound reception. The pressure sensor sensitivity was found to vary from 0.02 to 0.14 radians/mmHg, as the thickness of parylene was decreased from 2 to 0.5 μm. The ultrasound receivers were characterised and exhibited a noise equivalent pressure (NEP) value of ~100 Pa (an order of magnitude improvement compared to similarly sized piezoelectric hydrophones). A second theme employed high-resolution 3D printing to create microstructures of polydimethylsiloxane (PDMS) and subsequently formed nanocomposites, to create microscale acoustic hologram structures. This theme included the development of innovative manufacturing processes such as printing directly onto optical fibres, micro moulding and precise deposition which enabled the creation of such devices. These microstructures were investigated for reducing the divergence of photoacoustically-generated ultrasound beams. Taken together, the developments in this thesis pave the way for 3D microfabricated polymer-based fibre optic sensors that could find broad clinical utility in minimally invasive procedures

Index to 1986 NASA Tech Briefs, volume 11, numbers 1-4

Short announcements of new technology derived from the R&D activities of NASA are presented. These briefs emphasize information considered likely to be transferrable across industrial, regional, or disciplinary lines and are issued to encourage commercial application. This index for 1986 Tech Briefs contains abstracts and four indexes: subject, personal author, originating center, and Tech Brief Number. The following areas are covered: electronic components and circuits, electronic systems, physical sciences, materials, life sciences, mechanics, machinery, fabrication technology, and mathematics and information sciences

Cumulative index to NASA Tech Briefs, 1986-1990, volumes 10-14

Tech Briefs are short announcements of new technology derived from the R&D activities of the National Aeronautics and Space Administration. These briefs emphasize information considered likely to be transferrable across industrial, regional, or disciplinary lines and are issued to encourage commercial application. This cumulative index of Tech Briefs contains abstracts and four indexes (subject, personal author, originating center, and Tech Brief number) and covers the period 1986 to 1990. The abstract section is organized by the following subject categories: electronic components and circuits, electronic systems, physical sciences, materials, computer programs, life sciences, mechanics, machinery, fabrication technology, and mathematics and information sciences

Microfluidics and Nanofluidics Handbook

The Microfluidics and Nanofluidics Handbook: Two-Volume Set comprehensively captures the cross-disciplinary breadth of the fields of micro- and nanofluidics, which encompass the biological sciences, chemistry, physics and engineering applications. To fill the knowledge gap between engineering and the basic sciences, the editors pulled together key individuals, well known in their respective areas, to author chapters that help graduate students, scientists, and practicing engineers understand the overall area of microfluidics and nanofluidics. Topics covered include Finite Volume Method for Numerical Simulation Lattice Boltzmann Method and Its Applications in Microfluidics Microparticle and Nanoparticle Manipulation Methane Solubility Enhancement in Water Confined to Nanoscale Pores Volume Two: Fabrication, Implementation, and Applications focuses on topics related to experimental and numerical methods. It also covers fabrication and applications in a variety of areas, from aerospace to biological systems. Reflecting the inherent nature of microfluidics and nanofluidics, the book includes as much interdisciplinary knowledge as possible. It provides the fundamental science background for newcomers and advanced techniques and concepts for experienced researchers and professionals

Cumulative index to NASA Tech Briefs, 1970-1975

Tech briefs of technology derived from the research and development activities of the National Aeronautics and Space Administration are presented. Abstracts and indexes of subject, personal author, originating center, and tech brief number for the 1970-1975 tech briefs are presented

NASA Tech Briefs Index, 1976

Abstracts of new technology derived from the research and development activities of the National Aeronautics and Space Administration are presented. Emphasis is placed on information considered likely to be transferrable across industrial, regional, or disciplinary lines. Subject matter covered includes: electronic components and circuits; electronic systems; physical sciences; materials; life sciences; mechanics; machinery; fabrication technology; and mathematics and information sciences

BioMEMS

As technological advancements widen the scope of applications for biomicroelectromechanical systems (BioMEMS or biomicrosystems), the field continues to have an impact on many aspects of life science operations and functionalities. Because BioMEMS research and development require the input of experts who use different technical languages and come from varying disciplines and backgrounds, scientists and students can avoid potential difficulties in communication and understanding only if they possess a skill set and understanding that enables them to work at the interface of engineering and biosciences. Keeping this duality in mind throughout, BioMEMS: Science and Engineering Perspectives supports and expedites the multidisciplinary learning involved in the development of biomicrosystems. Divided into nine chapters, it starts with a balanced introduction of biological, engineering, application, and commercialization aspects of the field. With a focus on molecules of biological interest, the book explores the building blocks of cells and viruses, as well as molecules that form the self-assembled monolayers (SAMs), linkers, and hydrogels used for making different surfaces biocompatible through functionalization. The book also discusses: Different materials and platforms used to develop biomicrosystems Various biological entities and pathogens (in ascending order of complexity) The multidisciplinary aspects of engineering bioactive surfaces Engineering perspectives, including methods of manufacturing bioactive surfaces and devices Microfluidics modeling and experimentation Device level implementation of BioMEMS concepts for different applications. Because BioMEMS is an application-driven field, the book also highlights the concepts of lab-on-a-chip (LOC) and micro total analysis system (μTAS), along with their pertinence to the emerging point-of-care (POC) and point-of-need (PON) applications