A Review of Modeling and Control of Piezoelectric Stick-Slip Actuators

Piezoelectric stick-slip actuators with high precision, large actuating force, and high displacement resolution are currently widely used in the field of high-precision micro-nano processing and manufacturing. However, the non-negligible, non-linear factors and complexity of their characteristics make its modeling and control quite difficult and affect the positioning accuracy and stability of the system. To obtain higher positioning accuracy and efficiency, modeling and control of piezoelectric stick-slip actuators are meaningful and necessary. Firstly, according to the working principle of stick-slip drive, this paper introduces the sub-models with different characteristics, such as hysteresis, dynamics, and friction, and presents the comprehensive modeling representative piezoelectric stick-slip actuators. Next, the control approaches suggested by different scholars are also summarized. Appropriate control strategies are adopted to reduce its tracking error and position error in response to the influence of various factors. Lastly, future research and application prospects in modeling and control are pointed out

Modeling and control of undesirable dynamics in atomic force microscopes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.Includes bibliographical references (leaves 156-165).The phenomenal resolution and versatility of the atomic force microscope (AFM), has made it a widely-used instrument in nanotechnology. In this thesis, a detailed model of AFM dynamics has been developed. It includes a new model for the piezoelectric scanner coupled longitudinal and lateral dynamics, creep, and hysteresis. Models for probe-sample interactions and cantilever dynamics were also included. The models were used to improve the dynamic response and hence image quality of contact-mode AFM. An extensive parametric study has been performed to experimentally analyze in-contact dynamics. Nonlinear variations in the frequency response were observed, in addition to changes in the pole-zero structure. The choice of scan parameters was found to have a major impact on image quality and feedback performance. Further, compensation for scanner creep was experimentally tested yielding a reduction in creep by a factor of 3 to 4 from the uncompensated system. Moreover, fundamental performance limitations in the AFM feedback system were identified. These limitations resulted in a severe bound on the maximum achievable feedback bandwidth, as well as a fundamental trade-off between step response overshoot and response time. A careful analysis has revealed that a PID controller has no real advantage over an integral controller.(cont.) Therefore, a procedure for automatically selecting key scan parameters and controller gain was developed and experimentally tested for I-control. This approach, in contrast to the commonly used trial and error method, can substantially improve image quality and fidelity. In addition, a robust adaptive output controller (RAOC), was designed to guarantee global boundedness and asymptotic regulation in the presence and absence of disturbances, respectively. Simulations have shown that a substantial reduction in contact force can be achieved with the RAOC, in comparison with a well-tuned I-controller, yet with no increase in the maximum scan speed. Furthermore, a new method was developed to allow calibrating the scanner's vertical displacement up to its full range, in addition to characterizing scanner hysteresis. This work has identified and addressed crucial problems and proposed practical solutions to factors limiting the dynamic performance of the AFM.by Osamah M. El Rifai.Ph.D

Precision Control of Piezo Electric Actuator

芝浦工業大学201

Linear Macro-Micro Positioning System Using a Shape Memory Alloy Actuator

The use of high-precision automated equipment is steadily increasing due in part to the progressively smaller sizes of electronic circuits. Currently, piezoelectric transducers (piezos) dominate as the actuation device for high precision machines, but shape memory alloys (SMA) may be a viable alternative to reduce monetary costs. This work explores the implementation of a low-cost linear macro-micro positioning system. The system consists of a modified printer carriage to provide long range, macro scale linear motion (approximately 200 mm range and 200 µm precision) and a micro scale system (approximately 4 mm range and 5 µm target precision) that uses an SMA actuator. A detailed description of the design and implementation of the system is given in this research. A model of the macro-stage is then generated by first identifying and inverting a simple friction model to linearize the system, thereby allowing for modified least squares (MLS) identification of a linear model. Various controllers are attempted for the macro-stage and compared with an experimentally tuned nonlinear PD controller that is implemented in the final design. A model of the micro-stage is derived through analysis of the SMA actuator. The model for the actuator is separated into two portions, an electro-thermal model, and a hysteresis model. The hysteresis model is derived using the Preisach model, and the electro-thermal model through MLS identification. To control the micro-stage, a PI controller with antiwindup is developed experimentally. The two stages are then executed together in closed loop and the resulting coupling between the two stages is briefly examined. Experimental data used for the modelling and design is presented, along with results of the final macro-micro linear positioning system

Feedback Systems: An Introduction for Scientists and Engineers

This book provides an introduction to the basic principles and tools for the design and analysis of feedback systems. It is intended to serve a diverse audience of scientists and engineers who are interested in understanding and utilizing feedback in physical, biological, information and social systems.We have attempted to keep the mathematical prerequisites to a minimum while being careful not to sacrifice rigor in the process. We have also attempted to make use of examples from a variety of disciplines, illustrating the generality of many of the tools while at the same time showing how they can be applied in specific application domains. A major goal of this book is to present a concise and insightful view of the current knowledge in feedback and control systems. The field of control started by teaching everything that was known at the time and, as new knowledge was acquired, additional courses were developed to cover new techniques. A consequence of this evolution is that introductory courses have remained the same for many years, and it is often necessary to take many individual courses in order to obtain a good perspective on the field. In developing this book, we have attempted to condense the current knowledge by emphasizing fundamental concepts. We believe that it is important to understand why feedback is useful, to know the language and basic mathematics of control and to grasp the key paradigms that have been developed over the past half century. It is also important to be able to solve simple feedback problems using back-of-the-envelope techniques, to recognize fundamental limitations and difficult control problems and to have a feel for available design methods. This book was originally developed for use in an experimental course at Caltech involving students from a wide set of backgrounds. The course was offered to undergraduates at the junior and senior levels in traditional engineering disciplines, as well as first- and second-year graduate students in engineering and science. This latter group included graduate students in biology, computer science and physics. Over the course of several years, the text has been classroom tested at Caltech and at Lund University, and the feedback from many students and colleagues has been incorporated to help improve the readability and accessibility of the material. Because of its intended audience, this book is organized in a slightly unusual fashion compared to many other books on feedback and control. In particular, we introduce a number of concepts in the text that are normally reserved for second-year courses on control and hence often not available to students who are not control systems majors. This has been done at the expense of certain traditional topics, which we felt that the astute student could learn independently and are often explored through the exercises. Examples of topics that we have included are nonlinear dynamics, Lyapunov stability analysis, the matrix exponential, reachability and observability, and fundamental limits of performance and robustness. Topics that we have deemphasized include root locus techniques, lead/lag compensation and detailed rules for generating Bode and Nyquist plots by hand. Several features of the book are designed to facilitate its dual function as a basic engineering text and as an introduction for researchers in natural, information and social sciences. The bulk of the material is intended to be used regardless of the audience and covers the core principles and tools in the analysis and design of feedback systems. Advanced sections, marked by the “dangerous bend” symbol shown here, contain material that requires a slightly more technical background, of the sort that would be expected of senior undergraduates in engineering. A few sections are marked by two dangerous bend symbols and are intended for readers with more specialized backgrounds, identified at the beginning of the section. To limit the length of the text, several standard results and extensions are given in the exercises, with appropriate hints toward their solutions. To further augment the printed material contained here, a companion web site has been developed and is available from the publisher’s web page: http://press.princeton.edu/titles/8701.html The web site contains a database of frequently asked questions, supplemental examples and exercises, and lecture material for courses based on this text. The material is organized by chapter and includes a summary of the major points in the text as well as links to external resources. The web site also contains the source code for many examples in the book, as well as utilities to implement the techniques described in the text. Most of the code was originally written using MATLAB M-files but was also tested with LabView MathScript to ensure compatibility with both packages. Many files can also be run using other scripting languages such as Octave, SciLab, SysQuake and Xmath. The first half of the book focuses almost exclusively on state space control systems. We begin in Chapter 2 with a description of modeling of physical, biological and information systems using ordinary differential equations and difference equations. Chapter 3 presents a number of examples in some detail, primarily as a reference for problems that will be used throughout the text. Following this, Chapter 4 looks at the dynamic behavior of models, including definitions of stability and more complicated nonlinear behavior. We provide advanced sections in this chapter on Lyapunov stability analysis because we find that it is useful in a broad array of applications and is frequently a topic that is not introduced until later in one’s studies. The remaining three chapters of the first half of the book focus on linear systems, beginning with a description of input/output behavior in Chapter 5. In Chapter 6, we formally introduce feedback systems by demonstrating how state space control laws can be designed. This is followed in Chapter 7 by material on output feedback and estimators. Chapters 6 and 7 introduce the key concepts of reachability and observability, which give tremendous insight into the choice of actuators and sensors, whether for engineered or natural systems. The second half of the book presents material that is often considered to be from the field of “classical control.” This includes the transfer function, introduced in Chapter 8, which is a fundamental tool for understanding feedback systems. Using transfer functions, one can begin to analyze the stability of feedback systems using frequency domain analysis, including the ability to reason about the closed loop behavior of a system from its open loop characteristics. This is the subject of Chapter 9, which revolves around the Nyquist stability criterion. In Chapters 10 and 11, we again look at the design problem, focusing first on proportional-integral-derivative (PID) controllers and then on the more general process of loop shaping. PID control is by far the most common design technique in control systems and a useful tool for any student. The chapter on frequency domain design introduces many of the ideas of modern control theory, including the sensitivity function. In Chapter 12, we combine the results from the second half of the book to analyze some of the fundamental trade-offs between robustness and performance. This is also a key chapter illustrating the power of the techniques that have been developed and serving as an introduction for more advanced studies. The book is designed for use in a 10- to 15-week course in feedback systems that provides many of the key concepts needed in a variety of disciplines. For a 10-week course, Chapters 1–2, 4–6 and 8–11 can each be covered in a week’s time, with the omission of some topics from the final chapters. A more leisurely course, spread out over 14–15 weeks, could cover the entire book, with 2 weeks on modeling (Chapters 2 and 3) — particularly for students without much background in ordinary differential equations — and 2 weeks on robust performance (Chapter 12). The mathematical prerequisites for the book are modest and in keeping with our goal of providing an introduction that serves a broad audience. We assume familiarity with the basic tools of linear algebra, including matrices, vectors and eigenvalues. These are typically covered in a sophomore-level course on the subject, and the textbooks by Apostol [10], Arnold [13] and Strang [187] can serve as good references. Similarly, we assume basic knowledge of differential equations, including the concepts of homogeneous and particular solutions for linear ordinary differential equations in one variable. Apostol [10] and Boyce and DiPrima [42] cover this material well. Finally, we also make use of complex numbers and functions and, in some of the advanced sections, more detailed concepts in complex variables that are typically covered in a junior-level engineering or physics course in mathematical methods. Apostol [9] or Stewart [186] can be used for the basic material, with Ahlfors [6], Marsden and Hoffman [146] or Saff and Snider [172] being good references for the more advanced material. We have chosen not to include appendices summarizing these various topics since there are a number of good books available. One additional choice that we felt was important was the decision not to rely on a knowledge of Laplace transforms in the book. While their use is by far the most common approach to teaching feedback systems in engineering, many students in the natural and information sciences may lack the necessary mathematical background. Since Laplace transforms are not required in any essential way, we have included them only in an advanced section intended to tie things together for students with that background. Of course, we make tremendous use of transfer functions, which we introduce through the notion of response to exponential inputs, an approach we feel is more accessible to a broad array of scientists and engineers. For classes in which students have already had Laplace transforms, it should be quite natural to build on this background in the appropriate sections of the text. Acknowledgments: The authors would like to thank the many people who helped during the preparation of this book. The idea for writing this book came in part from a report on future directions in control [155] to which Stephen Boyd, Roger Brockett, John Doyle and Gunter Stein were major contributors. Kristi Morgansen and Hideo Mabuchi helped teach early versions of the course at Caltech on which much of the text is based, and Steve Waydo served as the head TA for the course taught at Caltech in 2003–2004 and provided numerous comments and corrections. Charlotta Johnsson and Anton Cervin taught from early versions of the manuscript in Lund in 2003–2007 and gave very useful feedback. Other colleagues and students who provided feedback and advice include Leif Andersson, John Carson, K. Mani Chandy, Michel Charpentier, Domitilla Del Vecchio, Kate Galloway, Per Hagander, Toivo Henningsson Perby, Joseph Hellerstein, George Hines, Tore Hägglund, Cole Lepine, Anders Rantzer, Anders Robertsson, Dawn Tilbury and Francisco Zabala. The reviewers for Princeton University Press and Tom Robbins at NI Press also provided valuable comments that significantly improved the organization, layout and focus of the book. Our editor, Vickie Kearn, was a great source of encouragement and help throughout the publishing process. Finally, we would like to thank Caltech, Lund University and the University of California at Santa Barbara for providing many resources, stimulating colleagues and students, and pleasant working environments that greatly aided in the writing of this book

Fuzzy logic based online adaptation of current and speed controllers for improved performance of IPMSM drive

Precise torque and speed control of electric motors is a key issue in industries for variable speed drives (VSD). Over the years the induction motors have been widely utilized in industries for VSD applications. However, induction motor has some significant drawbacks like low efficiency, lagging power factor, asynchronous speed, low torque density etc. Nowadays the interior permanent magnet synchronous motor (IPMSM) is becoming popular for high performance variable speed drive (HPVSD) due to its high torque-current ratio, large power-weight ratio, high efficiency, high power factor, low noise and robustness as compared to conventional induction and other ac motors. Smooth torque response, fast and precise speed response, quick recovery of torque and speed from any disturbance and parameter insensitivity, robustness in variable speed domain and maintenance free operations are the main concerns for HPVSD. This work proposes a closed loop vector control of an IPMSM drive incorporating two separate fuzzy logic controllers (FLCs). Among them one FLC is designed. to minimize the developed torque ripple by varying online the hysteresis band of the PWM current controller. Another Sugeno type FLC is used to tune the gains of a proportional-integral (PI) controller where the PI controller actually serves as the primary speed controller. Thus, the limitations of traditional PI controllers will be avoided and the performance of the drive system can be improved. A flux controller is also incorporated in such a way that both torque and flux of the motor can be controlled while maintaining current and voltage constraints. The flux controller is designed based on maximum-torque- per-ampere (MTPA) operation below the rated speed and flux weakening operation above the rated speed. Thus, the proposed drive extends the operating speed limits for the motor and enables the effective use of the reluctance torque. In order to verify the performance of the proposed IPMSM drive, first a simulation model is developed using Matlab/Simulink. Then the complete IPMSM drive has been implemented in real-time using digital signal processor (DSP) controller board DS1104 for a laboratory 5 HP motor. The effectiveness of the proposed drive is verified both in simulation and experiment at different operating conditions. In this regard, a performance comparison of the proposed FLC based tuned PI and adapted hysteresis controllers based drive with the conventional PI and fixed bandwidth hysteresis controllers based drive is provided. These comparison results demonstrate the better dynamic response in torque and speed for the proposed IPMSM drive over a wide speed range

Model reference control for ultra-high precision positioning systems

Due to the increasing demands of high-density semiconductors, molecular biology, optoelectronics, and MEMS/NEMS in the past decades, control of ultra-high precision positioning using piezoelectricity has become an important area because of its high displacement resolution, wide bandwidth, low power consumption, and potential low cost. However, the relatively small displacement range limits its application. This work proposed a practical ultra-high precision piezoelectric positioning system with a complementary high displacement range actuation technology. Solenoids are low cost, high speed electromagnetic actuators which are commonly used in on-off mode only because of the inherent high nonlinear force-stroke characteristics and unipolar forces (push/pull) generated by the magnetic fields. In this work, an integrated positioning system based on a monolithic piezoelectric positioner and a set of push-pull dual solenoid actuators is designed for high speed and high precision positioning applications. The overall resolution can be sub-nanometer while the moving range is in millimeters, a three order of magnitude increase from using piezoelectric positioner alone. The dynamic models of the dual solenoid actuator and piezoelectric nanopositioner are derived. The main challenge of designing such positioning systems is to maintain the accuracy and stability in the presence of un-modeled dynamics, plant variations, and parasitic nonlinearities, specifically in this work, the friction and forcestroke nonlinearities of the dual solenoid actuator, and the friction, hysteresis and coupling effects of piezoelectric actuator, which are impossible to be modeled accurately and even time-varying. A model reference design approach is presented to attenuate linear as well as nonlinear uncertainties, with a fixed order controller augmenting a reference model that embeds the nominal dynamics of the plant. To improve transient characteristics, a Variable Model Reference Zero Vibration (VMRZV) control is also proposed to stabilize the system and attenuate the adverse effect of parasitic nonlinearities of micro-/nano- positioning actuators and command-induced vibrations. The speed of the ultra-high precision system with VMRZV control can also be quantitatively adjusted by systematically varying the reference model. This novel control method improves the robustness and performance significantly. Preliminary experimental data on dual solenoid system confirm the feasibility of the proposed method

Power Management ICs for Internet of Things, Energy Harvesting and Biomedical Devices

This dissertation focuses on the power management unit (PMU) and integrated circuits (ICs) for the internet of things (IoT), energy harvesting and biomedical devices. Three monolithic power harvesting methods are studied for different challenges of smart nodes of IoT networks. Firstly, we propose that an impedance tuning approach is implemented with a capacitor value modulation to eliminate the quiescent power consumption. Secondly, we develop a hill-climbing MPPT mechanism that reuses and processes the information of the hysteresis controller in the time-domain and is free of power hungry analog circuits. Furthermore, the typical power-performance tradeoff of the hysteresis controller is solved by a self-triggered one-shot mechanism. Thus, the output regulation achieves high-performance and yet low-power operations as low as 12 µW. Thirdly, we introduce a reconfigurable charge pump to provide the hybrid conversion ratios (CRs) as 1⅓× up to 8× for minimizing the charge redistribution loss. The reconfigurable feature also dynamically tunes to maximum power point tracking (MPPT) with the frequency modulation, resulting in a two-dimensional MPPT. Therefore, the voltage conversion efficiency (VCE) and the power conversion efficiency (PCE) are enhanced and flattened across a wide harvesting range as 0.45 to 3 V. In a conclusion, we successfully develop an energy harvesting method for the IoT smart nodes with lower cost, smaller size, higher conversion efficiency, and better applicability. For the biomedical devices, this dissertation presents a novel cost-effective automatic resonance tracking method with maximum power transfer (MPT) for piezoelectric transducers (PT). The proposed tracking method is based on a band-pass filter (BPF) oscillator, exploiting the PT’s intrinsic resonance point through a sensing bridge. It guarantees automatic resonance tracking and maximum electrical power converted into mechanical motion regardless of process variations and environmental interferences. Thus, the proposed BPF oscillator-based scheme was designed for an ultrasonic vessel sealing and dissecting (UVSD) system. The sealing and dissecting functions were verified experimentally in chicken tissue and glycerin. Furthermore, a combined sensing scheme circuit allows multiple surgical tissue debulking, vessel sealer and dissector (VSD) technologies to operate from the same sensing scheme board. Its advantage is that a single driver controller could be used for both systems simplifying the complexity and design cost. In a conclusion, we successfully develop an ultrasonic scalpel to replace the other electrosurgical counterparts and the conventional scalpels with lower cost and better functionality

Nanopositionnement 3D à base de mesure à courant tunnel et piezo-actionnement

The objective of this thesis was to elaborate high performance control strategies and their real-time validation on a tunneling current-based 3D nanopositioning system developed in GIPSA-lab. The thesis lies in the domain of micro-/nano mechatronic systems (MEMS) focused on applications of fast and precise positioning and scanning tunneling microscopy (STM). More precisely, the aim is to position the metallic tunneling tip (like in STM) over the metallic surface using piezoelectric actuators in X, Y and Z directions and actuated micro-cantilever (like in Atomic Force Microscope AFM), electrostatically driven in Z direction, with high precision, over possibly high bandwidth. However, the presence of different adverse effects appearing at such small scale (e.g. measurement noise, nonlinearities of different nature, cross-couplings, vibrations) strongly affect the overall performance of the 3D system. Therefore a high performance control is needed. To that end, a novel 3D model of the system has been developed and appropriate control methods for such a system have been elaborated. First the focus is on horizontal X and Y directions. The nonlinear hysteresis and creep effects exhibited by piezoelectric actuators have been compensated and a comparison between different compensation methods is provided. Modern SISO and MIMO robust control methods are next used to reduce high frequency effects of piezo vibration and cross-couplings between X and Y axes. Next, the horizontal motion is combined with the vertical one (Z axis) with tunneling current and micro-cantilever control. Illustrative experimental results for 3D nanopositioning of tunneling tip, as well as simulation results for surface topography reconstruction and multi-mode cantilever positioning, are finally given.L'objectif de la thèse est l'élaboration de lois de commande de haute performance et leur validation en temps réel sur une plateforme expérimentale 3D de nano-positionnement à base de courant à effet tunnel, développée au laboratoire GIPSA-lab. Elle s'inscrit donc dans le cadre des systèmes micro-/nano-mécatronique (MEMS), et de la commande. Plus précisément, le principal enjeu considéré est de positionner la pointe métallique à effet tunnel (comme en microscopie à effet tunnel STM) contre la surface métallique en utilisant des actionneurs piézoélectriques en X, Y et Z et un micro-levier (comme en microscopie à force atomique AFM) actionné électrostatiquement en Z avec une grande précision et une bande passante élevée. Cependant, la présence de différents effets indésirables apparaissant à cette petite échelle (comme le bruit de mesure, des non-linéarités de natures différentes, les couplages, les vibrations) affectent fortement la performance globale du système 3D. En conséquence, une commande de haute performance est nécessaire. Pour cela, un nouveau modèle 3D du système a été développé et des méthodes de contrôle appropriées pour un tel système ont été élaborées. Tout d'abord l'accent est mis sur de positionnement selon les axes X et Y. Les effets d'hystérésis et de fluage non linéaires présents dans les actionneurs piézoélectriques ont été compensés et une comparaison entre les différentes méthodes de compensation est effectuée. Des techniques modernes de commande robuste SISO et MIMO sont ensuite utilisées pour réduire les effets des vibrations piézoélectriques et des couplages entre les axes X et Y. Le mouvement horizontal est alors combiné avec le mouvement vertical (Axe Z) et une commande du courant tunnel et du micro-levier. Des résultats expérimentaux illustrent le nano positionnement 3D de la pointe, et des résultats de simulation pour la reconstruction de la topographie de la surface ainsi que le positionnement du micro-levier à base d'un modèle multi-modes

Development and characterisation of traceable force measurement for nanotechnology

Traceable low force metrology should be an essential tool for nanotechnology. Traceable measurement of micro- and nanonewton forces would allow independent measurement and comparison on material properties, MEMS behaviour and nanodimensional measurement uncertainties. Yet the current traceability infrastructure in the UK is incomplete. This thesis describes the incremental development of the low force facility at the National Physical Laboratory (NPL). The novel contribution of this thesis has three components. First, specific modifications to the NPL Low Force Balance were undertaken. This involved developing novel or highly modified solutions to address key issues, as well as undertaking detailed comparions with external ans internal traceability references. Second, a triskelion force sensor flexure was proposed and mathematically modelled using both analytical and finite element techniques, and compared to experimentally measured spring constant estimates. The models compared satisfactorily, though fabrication defects in developed prototype artefacts limited the experimental confirmation of the models. Third, a piezoelectric sensor approach for quasistatic force measurement was proposed, experimentally evaluated and rejected. Finally, an improved design for a low force transfer artefact system is presented, harnessing the findings of the reported investigations. The proposed design combines proven strain-sensing technology with the advantageous triskelion flexure, incorporating an external stage and packaging aspects to achieve the requirements for a traceable low force transfer artefact