Modeling, simulation and control of microrobots for the microfactory.

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated with top-down manipulation requiring precision. However, bottom-up manufacturing methods have certain limitations, such as components needing to have predefined shapes and surface coatings, and the number of assembly components being limited to very few. For example, in the case of self-assembly of nano-cubes with an origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nanoscale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nanopositioners. To fulfill the microfactory vision, numerous challenges related to design, power, control, and nanoscale task completion by these microrobots must be overcome. In this work, we study two classes of microrobots for the microfactory: stationary microrobots and mobile microrobots. For the stationary microrobots in our microfactory application, we have designed and modeled two different types of microrobots, the AFAM (Articulated Four Axes Microrobot) and the SolarPede. The AFAM is a millimeter-size robotic arm working as a nanomanipulator for nanoparticles with four degrees of freedom, while the SolarPede is a light-powered centimeter-size robotic conveyor in the microfactory. For mobile microrobots, we have introduced the world’s first laser-driven micrometer-size locomotor in dry environments, called ChevBot to prove the concept of the motion mechanism. The ChevBot is fabricated using MEMS technology in the cleanroom, following a microassembly step. We showed that it can perform locomotion with pulsed laser energy on a dry surface. Based on the knowledge gained with the ChevBot, we refined tits fabrication process to remove the assembly step and increase its reliability. We designed and fabricated a steerable microrobot, the SerpenBot, in order to achieve controllable behavior with the guidance of a laser beam. Through modeling and experimental study of the characteristics of this type of microrobot, we proposed and validated a new type of deep learning controller, the PID-Bayes neural network controller. The experiments showed that the SerpenBot can achieve closed-loop autonomous operation on a dry substrate

Towards tactile sensing active capsule endoscopy

Examination of the gastrointestinal(GI) tract has traditionally been performed using tethered endoscopy tools with limited reach and more recently with passive untethered capsule endoscopy with limited capability. Inspection of small intestines is only possible using the latter capsule endoscopy with on board camera system. Limited to visual means it cannot detect features beneath the lumen wall if they have not affected the lumen structure or colour. This work presents an improved capsule endoscopy system with locomotion for active exploration of the small intestines and tactile sensing to detect deformation of the capsule outer surface when it follows the intestinal wall. In laboratory conditions this system is capable of identifying sub-lumen features such as submucosal tumours.Through an extensive literary review the current state of GI tract inspection in particular using remote operated miniature robotics, was investigated, concluding no solution currently exists that utilises tactile sensing with a capsule endoscopy. In order to achieve such a platform, further investigation was made in to tactile sensing technologies, methods of locomotion through the gut, and methods to support an increased power requirement for additional electronics and actuation. A set of detailed criteria were compiled for a soft formed sensor and flexible bodied locomotion system. The sensing system is built on the biomimetic tactile sensing device, Tactip, \cite{Chorley2008, Chorley2010, Winstone2012, Winstone2013} which has been redesigned to fit the form of a capsule endoscopy. These modifications have required a $360^{o}$ cylindrical sensing surface with $360^{o}$ panoramic optical system. Multi-material 3D printing has been used to build an almost complete sensor assembly with a combination of hard and soft materials, presenting a soft compliant tactile sensing system that mimics the tactile sensing methods of the human finger. The cylindrical Tactip has been validated using artificial submucosal tumours in laboratory conditions. The first experiment has explored the new form factor and measured the device's ability to detect surface deformation when travelling through a pipe like structure with varying lump obstructions. Sensor data was analysed and used to reconstruct the test environment as a 3D rendered structure. A second tactile sensing experiment has explored the use of classifier algorithms to successfully discriminate between three tumour characteristics; shape, size and material hardness. Locomotion of the capsule endoscopy has explored further bio-inspiration from earthworm's peristaltic locomotion, which share operating environment similarities. A soft bodied peristaltic worm robot has been developed that uses a tuned planetary gearbox mechanism to displace tendons that contract each worm segment. Methods have been identified to optimise the gearbox parameter to a pipe like structure of a given diameter. The locomotion system has been tested within a laboratory constructed pipe environment, showing that using only one actuator, three independent worm segments can be controlled. This configuration achieves comparable locomotion capabilities to that of an identical robot with an actuator dedicated to each individual worm segment. This system can be miniaturised more easily due to reduced parts and number of actuators, and so is more suitable for capsule endoscopy. Finally, these two developments have been integrated to demonstrate successful simultaneous locomotion and sensing to detect an artificial submucosal tumour embedded within the test environment. The addition of both tactile sensing and locomotion have created a need for additional power beyond what is available from current battery technology. Early stage work has reviewed wireless power transfer (WPT) as a potential solution to this problem. Methods for optimisation and miniaturisation to implement WPT on a capsule endoscopy have been identified with a laboratory built system that validates the methods found. Future work would see this combined with a miniaturised development of the robot presented. This thesis has developed a novel method for sub-lumen examination. With further efforts to miniaturise the robot it could provide a comfortable and non-invasive procedure to GI tract inspection reducing the need for surgical procedures and accessibility for earlier stage of examination. Furthermore, these developments have applicability in other domains such as veterinary medicine, industrial pipe inspection and exploration of hazardous environments

Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Advanced medical micro-robotics for early diagnosis and therapeutic interventions

Recent technological advances in micro-robotics have demonstrated their immense potential for biomedical applications. Emerging micro-robots have versatile sensing systems, flexible locomotion and dexterous manipulation capabilities that can significantly contribute to the healthcare system. Despite the appreciated and tangible benefits of medical micro-robotics, many challenges still remain. Here, we review the major challenges, current trends and significant achievements for developing versatile and intelligent micro-robotics with a focus on applications in early diagnosis and therapeutic interventions. We also consider some recent emerging micro-robotic technologies that employ synthetic biology to support a new generation of living micro-robots. We expect to inspire future development of micro-robots toward clinical translation by identifying the roadblocks that need to be overcome

MRI-Based Communication with Untethered Intelligent Medical Microrobots

RESUME Les champs magnétiques présent dans un système clinique d’Imagerie par Résonance Magnétique (IRM) peuvent être exploités non seulement, afin d’induire une force de déplacement sur des microrobots magnétiques tout en permettant l’asservissement de leur position - une technique connue sous le nom de Navigation par Résonance Magnétique (NRM), mais aussi pour mettre en œuvre un procédé de communication. Pour des microrobots autonomes équipés de senseurs ayant un certain niveau d'intelligence et opérant à l'intérieur du corps humain, la puissance de transmission nécessaire pour communiquer des informations à un ordinateur externe par des méthodes présentement connues est insuffisante. Dans ce travail, une technique est décrite où une telle perte de puissance d'émission en raison de la mise à l'échelle de ces microrobots peut être compensée par le scanner IRM agissant aussi comme un récepteur très sensible. La technique de communication prend la forme d'une modification de la fréquence du courant électrique circulant le long d'une bobine miniature incorporé dans un microrobot. La fréquence du courant électrique peut être réglée à partir d'une entrée de seuil prédéterminée du senseur mis en place sur le microrobot. La fréquence devient alors corrélée à l’information de l’état du senseur recueilli par le microrobot et elle est déterminée en utilisant l'IRM. La méthode proposée est indépendante de la position et l'orientation du microrobot et peut être étendue à un grand nombre de microrobots pour surveiller et cartographier les conditions physiologiques spécifiques dans une région plus vaste à n’importe quelle profondeur à l'intérieur du corps.----------ABSTRACT The magnetic environment provided by a clinical Magnetic Resonance Imaging (MRI) scanner can be exploited to not only induce a displacement force on magnetic microrobots while allowing MR-tracking for serving control purpose or positional assessment - a technique known as Magnetic Resonance Navigation (MRN), but also for implementing a method of communication with intelligent microrobots. For untethered sensory microrobots having some level of intelligence and operating inside the body, the transmission power necessary to communicate information to an external computer via known methods is insufficient. In this work, a technique is described where such loss of transmission power due to the scaling of these microrobots can be compensated by the same MRI scanner acting as a more sensitive receiver. A communication scheme is implemented in the form of a frequency alteration in the electrical current circulating along a miniature coil embedded in a microrobot. The frequency of the electrical current could be regulated from a predetermined sensory threshold input implemented on the microrobot. Such a frequency provides information on the level of sensory information gathered by the microrobot, and it is determined using MR imaging. The proposed method is independent of the microrobot's position and orientation and can be extended to a larger number of microrobots for monitoring and mapping specific physiological conditions inside a larger region at any depths within the body

3D Self‐Assembled Microelectronic Devices: Concepts, Materials, Applications

Modern microelectronic systems and their components are essentially 3D devices that have become smaller and lighter in order to improve performance and reduce costs. To maintain this trend, novel materials and technologies are required that provide more structural freedom in 3D over conventional microelectronics, as well as easier parallel fabrication routes while maintaining compatability with existing manufacturing methods. Self‐assembly of initially planar membranes into complex 3D architectures offers a wealth of opportunities to accommodate thin‐film microelectronic functionalities in devices and systems possessing improved performance and higher integration density. Existing work in this field, with a focus on components constructed from 3D self‐assembly, is reviewed, and an outlook on their application potential in tomorrow's microelectronics world is provided

Stepper microactuators driven by ultrasonic power transfer

Advances in miniature devices for biomedical applications are creating ever-increasing requirements for their continuous, long lasting, and reliable energy supply, particularly for implanted devices. As an alternative to bulky and cost inefficient batteries that require occasional recharging and replacement, energy harvesting and wireless power delivery are receiving increased attention. While the former is generally only suited for low-power diagnostic microdevices, the latter has greater potential to extend the functionality to include more energy demanding therapeutic actuation such as drug release, implant mechanical adjustment or microsurgery. This thesis presents a novel approach to delivering wireless power to remote medical microdevices with the aim of satisfying higher energy budgets required for therapeutic functions. The method is based on ultrasonic power delivery, the novelty being that actuation is powered by ultrasound directly rather than via piezoelectric conversion. The thesis describes a coupled mechanical system remotely excited by ultrasound and providing conversion of acoustic energy into motion of a MEMS mechanism using a receiving membrane coupled to a discrete oscillator. This motion is then converted into useful stepwise actuation through oblique mechanical impact. The problem of acoustic and mechanical impedance mismatch is addressed. Several analytical and numerical models of ultrasonic power delivery into the human body are developed. Major design challenges that have to be solved in order to obtain acceptable performance under specified operating conditions and with minimum wave reflections are discussed. A novel microfabrication process is described, and the resulting proof-of-concept devices are successfully characterized.Open Acces

Advanced medical micro-robotics for early diagnosis and therapeutic interventions

Recent technological advances in micro-robotics have demonstrated their immense potential for biomedical applications. Emerging micro-robots have versatile sensing systems, flexible locomotion and dexterous manipulation capabilities that can significantly contribute to the healthcare system. Despite the appreciated and tangible benefits of medical micro-robotics, many challenges still remain. Here, we review the major challenges, current trends and significant achievements for developing versatile and intelligent micro-robotics with a focus on applications in early diagnosis and therapeutic interventions. We also consider some recent emerging micro-robotic technologies that employ synthetic biology to support a new generation of living micro-robots. We expect to inspire future development of micro-robots toward clinical translation by identifying the roadblocks that need to be overcome

Cooperative Manipulation using a Magnetically Navigated Microrobot and a Micromanipulator

The cooperative manipulation of a common object using two or more manipulators is a popular research field in both industry and institutions. Different types of manipulators are used in cooperative manipulation for carrying heavy loads and delicate operations. Their applications range from macro to micro. In this thesis, we are interested in the development of a novel cooperative manipulator for manipulation tasks in a small workspace. The resultant cooperative manipulation system consists of a magnetically navigated microrobot (MNM) and a motorized micromanipulator (MM). The MNM is a small cylinder permanent magnet with 10mm diameter and 10mm height. The MM model is MP-285 which is a commercialized product. Here, the MNM is remotely controlled by an external magnetic field. The property of non-contact manipulation makes it a suitable choice for manipulation in a confined space. The cooperative manipulation system in this thesis used a master/slave mechanism as the central control strategy. The MM is the master side. The MNM is the slave side. During the manipulation process, the master manipulator MM is always position controlled, and it leads the object translation according to the kinematic constraints of the cooperative manipulation task. The MNM is position controlled at the beginning of the manipulation. In the translation stage, the MNM is switched to force control to maintain a successful holding of the object, and at the same time to prevent damaging the object by large holding force. Under the force control mode, the motion command to the MNM is calculated from a position-based impedance controller that enforces a relationship between the position of the MNM and the force. In this research, the accurate motion control of both manipulators are firstly studied before the cooperative manipulation is conducted. For the magnetic navigation system, the magnetic field in its workspace is modeled using an experimental measurement data-driven technique. The developed model is then used to develop a motion controller for navigating of a small cylindrical permanent magnet. The accuracy of motion control is reached at 20 µm in three degrees of freedom. For the motorized micromanipulator, a standard PID controller is designed to control its motion stage. The accuracy of the MM navigation is 0.8 µm. Since the MNM is remotely manipulated by an external magnetic field in a small space, it is challenging to install an on-board force sensor to measure the contact force between the MNM and the object. Therefore, a dual-axial o_-board force determination mechanism is proposed. The force is determined according to the linear relation between the minimum magnetic potential energy point and the real position of the MNM in the workspace. For convenience, the minimum magnetic potential energy point is defined as the Bmax in the literature. In this thesis, the dual-axial Bmax position is determined by measuring the magnetic ux density passing through the workspace using four Hall-effect sensors installed at the bottom of an iron pole-piece. The force model is experimentally validated in a horizontal plane with an accuracy of 2 µN in the x- and y- direction of horizontal planes. The proposed cooperative manipulator is then used to translate a hard-shell small object in two directions of a vertical plane, while one direction is constrained with a desired holding force. During the manipulation process, a digital camera is used to capture the real-time position of the MNM, the MM end-effector, and the manipulated object. To improve the performance of force control on the MNM, the proposed dual-axial force model is used to examine the compliant force control of the MNM while it is navigated to contact with uncertain environments. Here, uncertain refers to unknown environmental stiffness. An adaptive position-based impedance controller is implemented to estimate the stiffness of the environment and the contact force. The controller is examined by navigating the MNM to push a thin aluminum beam whose stiffness is unknown. The studied cooperative manipulation system has potential applications in biomedical microsurgery and microinjection. It should be clarified that the current system setup with 10mm ×10 mm MNM is not proper for this micromanipulation. In order to conduct research on microinjection, the size of the MNM and the end-effector of the MNM should be down-scaled to micrometers. In addition, the navigation accuracy of the MNM should also be improved to adopt the micromanipulation tasks

ENABLING HARDWARE TECHNOLOGIES FOR AUTONOMY IN TINY ROBOTS: CONTROL, INTEGRATION, ACTUATION

The last two decades have seen many exciting examples of tiny robots from a few cm3 to less than one cm3. Although individually limited, a large group of these robots has the potential to work cooperatively and accomplish complex tasks. Two examples from nature that exhibit this type of cooperation are ant and bee colonies. They have the potential to assist in applications like search and rescue, military scouting, infrastructure and equipment monitoring, nano-manufacture, and possibly medicine. Most of these applications require the high level of autonomy that has been demonstrated by large robotic platforms, such as the iRobot and Honda ASIMO. However, when robot size shrinks down, current approaches to achieve the necessary functions are no longer valid. This work focused on challenges associated with the electronics and fabrication. We addressed three major technical hurdles inherent to current approaches: 1) difficulty of compact integration; 2) need for real-time and power-efficient computations; 3) unavailability of commercial tiny actuators and motion mechanisms. The aim of this work was to provide enabling hardware technologies to achieve autonomy in tiny robots. We proposed a decentralized application-specific integrated circuit (ASIC) where each component is responsible for its own operation and autonomy to the greatest extent possible. The ASIC consists of electronics modules for the fundamental functions required to fulfill the desired autonomy: actuation, control, power supply, and sensing. The actuators and mechanisms could potentially be post-fabricated on the ASIC directly. This design makes for a modular architecture. The following components were shown to work in physical implementations or simulations: 1) a tunable motion controller for ultralow frequency actuation; 2) a nonvolatile memory and programming circuit to achieve automatic and one-time programming; 3) a high-voltage circuit with the highest reported breakdown voltage in standard 0.5 μm CMOS; 4) thermal actuators fabricated using CMOS compatible process; 5) a low-power mixed-signal computational architecture for robotic dynamics simulator; 6) a frequency-boost technique to achieve low jitter in ring oscillators. These contributions will be generally enabling for other systems with strict size and power constraints such as wireless sensor nodes