An investigation of mechanics in nanomachining of Gallium Arsenide

The first two decades of the 21st Century have seen a wide exploitation of Gallium Arsenide (GaAs) in photoemitter device, microwave devices, hall element, solar cell, wireless communication as well as quantum computation device due to its superior material properties, such as higher temperature resistance, higher electronic mobility and energy gap that outperforms silicon. Ultra-precision multiplex two dimensional (2D) or three dimensional (3D) free-form nanostructures are often required on GaAs-based devices, such as radio frequency power amplifiers and switches used in the 5G smart mobile wireless communication. However, GaAs is extremely difficult to machine as its elastic modulus, Knoop hardness and fracture toughness are lower than other semiconductor materials such as silicon and germanium. This PhD thesis investigated the mechanics of nanomachining of GaAs through molecular dynamics (MD) simulation combined with single point diamond turning (SPDT) and atomic force microscope (AFM) based experimental characterization in order to realise ductile-regime nanomachining of GaAs, which is the most important motivation behind this thesis. The investigation of mechanics of nanomachining of GaAs included studies on cutting temperature, cutting forces, origin ductile plasticity, atomic scale friction, formation mechanism of sub-surface damage, wear mechanism of diamond cutting tool. Machinability of GaAs at elevated temperature was also studied in order to develop thermally-assisted nanomachining process in the future to facilitate plastic material deformation and removal. This thesis contributed to address the knowledge gaps such as what is the incipient plasticity, how does the sub-surface damage form and how does the diamond cutting tool wear during nanomachining of GaAs. Firstly, this thesis investigated the cutting zone temperature, cutting forces and origin of plasticity of GaAs material, including single crystal GaAs and polycrystalline GaAs during SPDT process. The experimental and MD simulation study showed GaAs has a strong anisotropic machinability. The simulation results indicated that the deformation of polycrystalline GaAs is accompanied by dislocation nucleation in the grain boundaries (GBs) leading to the initiation of plastic deformation. Furthermore, the 1/2 is the main type of dislocation responsible for ductile plasticity in polycrystalline GaAs. A phenomenon of fluctuation from wave crests to wave troughs in the cutting forces was only observed during cutting of polycrystalline GaAs, not for single-crystal GaAs. Secondly, this thesis studied the atomic scale friction during AFM-based nanomachining process. a strong size effect was observed when the scratch depths are below 2 nm in MD simulations and 15 nm from the AFM experiments respectively. A strong quantitative corroboration was obtained between the MD simulations and the AFM experiments in the specific scratch energy and more qualitative corroboration with the pile up and the kinetic coefficient of friction. This conclusion suggested that the specific scratch energy is insensitive to the tool geometry and the speed of scratch used in this investigation but the pile up and kinetic coefficient of friction are dependent on the geometry of the tool tip. Thirdly, this thesis investigated formation mechanism of sub-surface damage and wear mechanism of diamond cutting tool during nanomachining of GaAs. Transmission Electron Microscope (TEM) measurement of sub-surface of machined nanogrooves on GaAs and MD simulation of dislocation movement indicated the dual slip mechanisms i.e. shuffle-set slip mechanism and glide-set slip mechanism, and the creation of dislocation loops, multi dislocation nodes, and dislocation junctions governed the formation mechanism of sub-surface damage of GaAs during nanomachining process. Elastic-plastic deformation at the apex of the diamond tip was observed in MD simulations. Meanwhile, a transition of the diamond tip from its initial cubic diamond lattice structure sp3 hybridization to graphite lattice structure sp2 hybridization was revealed. Graphitization was, therefore, found to be the dominant wear mechanism of the diamond tip during nanometric cutting of single crystal GaAs. Finally, in MD simulations study of cutting performance at elevated temperature, hotter conditions resulted in the reduction of cutting forces by 25% however, the kinetic coefficient of friction went up by about 8%. While material removal rate was found to increase with the increase of the substrate temperature, it was accompanied by an increase of the sub-surface damage in the substrate. Moreover, a phenomenon of chip densification was found to occur during hot cutting which referred to the fact that the amorphous cutting chips obtained from cutting at low temperature will have lower density than the chips obtained from cutting at higher temperatures.The first two decades of the 21st Century have seen a wide exploitation of Gallium Arsenide (GaAs) in photoemitter device, microwave devices, hall element, solar cell, wireless communication as well as quantum computation device due to its superior material properties, such as higher temperature resistance, higher electronic mobility and energy gap that outperforms silicon. Ultra-precision multiplex two dimensional (2D) or three dimensional (3D) free-form nanostructures are often required on GaAs-based devices, such as radio frequency power amplifiers and switches used in the 5G smart mobile wireless communication. However, GaAs is extremely difficult to machine as its elastic modulus, Knoop hardness and fracture toughness are lower than other semiconductor materials such as silicon and germanium. This PhD thesis investigated the mechanics of nanomachining of GaAs through molecular dynamics (MD) simulation combined with single point diamond turning (SPDT) and atomic force microscope (AFM) based experimental characterization in order to realise ductile-regime nanomachining of GaAs, which is the most important motivation behind this thesis. The investigation of mechanics of nanomachining of GaAs included studies on cutting temperature, cutting forces, origin ductile plasticity, atomic scale friction, formation mechanism of sub-surface damage, wear mechanism of diamond cutting tool. Machinability of GaAs at elevated temperature was also studied in order to develop thermally-assisted nanomachining process in the future to facilitate plastic material deformation and removal. This thesis contributed to address the knowledge gaps such as what is the incipient plasticity, how does the sub-surface damage form and how does the diamond cutting tool wear during nanomachining of GaAs. Firstly, this thesis investigated the cutting zone temperature, cutting forces and origin of plasticity of GaAs material, including single crystal GaAs and polycrystalline GaAs during SPDT process. The experimental and MD simulation study showed GaAs has a strong anisotropic machinability. The simulation results indicated that the deformation of polycrystalline GaAs is accompanied by dislocation nucleation in the grain boundaries (GBs) leading to the initiation of plastic deformation. Furthermore, the 1/2 is the main type of dislocation responsible for ductile plasticity in polycrystalline GaAs. A phenomenon of fluctuation from wave crests to wave troughs in the cutting forces was only observed during cutting of polycrystalline GaAs, not for single-crystal GaAs. Secondly, this thesis studied the atomic scale friction during AFM-based nanomachining process. a strong size effect was observed when the scratch depths are below 2 nm in MD simulations and 15 nm from the AFM experiments respectively. A strong quantitative corroboration was obtained between the MD simulations and the AFM experiments in the specific scratch energy and more qualitative corroboration with the pile up and the kinetic coefficient of friction. This conclusion suggested that the specific scratch energy is insensitive to the tool geometry and the speed of scratch used in this investigation but the pile up and kinetic coefficient of friction are dependent on the geometry of the tool tip. Thirdly, this thesis investigated formation mechanism of sub-surface damage and wear mechanism of diamond cutting tool during nanomachining of GaAs. Transmission Electron Microscope (TEM) measurement of sub-surface of machined nanogrooves on GaAs and MD simulation of dislocation movement indicated the dual slip mechanisms i.e. shuffle-set slip mechanism and glide-set slip mechanism, and the creation of dislocation loops, multi dislocation nodes, and dislocation junctions governed the formation mechanism of sub-surface damage of GaAs during nanomachining process. Elastic-plastic deformation at the apex of the diamond tip was observed in MD simulations. Meanwhile, a transition of the diamond tip from its initial cubic diamond lattice structure sp3 hybridization to graphite lattice structure sp2 hybridization was revealed. Graphitization was, therefore, found to be the dominant wear mechanism of the diamond tip during nanometric cutting of single crystal GaAs. Finally, in MD simulations study of cutting performance at elevated temperature, hotter conditions resulted in the reduction of cutting forces by 25% however, the kinetic coefficient of friction went up by about 8%. While material removal rate was found to increase with the increase of the substrate temperature, it was accompanied by an increase of the sub-surface damage in the substrate. Moreover, a phenomenon of chip densification was found to occur during hot cutting which referred to the fact that the amorphous cutting chips obtained from cutting at low temperature will have lower density than the chips obtained from cutting at higher temperatures

Controlled surface manipulation at the nanometer scale based on the atomic force microscope

The object of this thesis is the development of theoretical and experimental methods for the controlled manipulation of surfaces at the nanometer scale, including the design, construction and experimental demonstration of an atomic force microscope (AFM) based manipulator. The transfer function description of an AFM system not only offers a theoretical dynamic characterization but, additionally, it is appropriate for the analysis of stability and controllability of different system configurations, i.e. different inputs and outputs. In this thesis, transfer functions are derived that correspond to a realistic model of the AFM sensor, including all its resonance modes and the tip-sample interaction. This theoretical description is then validated using the frequency response along an AFM cantilever. Different experimental and control techniques have been combined in the NanoManipulator system to optimize AFM lithography. Optical video microscopy allows a fast recognition of the sample and exact positioning of the AFM tip in the particular region of interest, while UV-laser ablation offers the possibility of noncontact manipulation of a wide range of materials, including biological specimens. Two different control approaches have been implemented in the NanoManipulator system: (i) automated control using a vector-scan module, and (ii) interactive control based on the use of a haptic interface. Using the NanoManipulator, the two different standard AFM lithography techniques based on dynamic methods (namely dynamic and modulated plowing) are compared by performing nanopatterning on thin resist films. The results reflect that modulated plowing, where the AFM tip is in permanent contact with the resist surface while the force is being modulated, offers the highest reliability, minimizing undesired side effects. The isolation and extraction of localized regions of human metaphase chromosomes represents a promising alternative to standard methods for the analysis of genetic material. The NanoManipulator is an excellent tool for such application, as it is here illustrated by comparing AFM based mechanical dissection and noncontact ablation on side by side chromosomes. The results are analyzed in situ using AFM imaging, revealing the high precision of mechanical dissection. Acoustical force nanolithography is a novel method for AFM based lithography where the cantilever is actuated using an acoustic wave coupled through the sample surface. The influence of acoustic wave frequency and magnitude, along with the preloading force of the cantilever are studied in detail. Acoustical force nanolithography can be used as a stand alone method or as a complement for the fine adjustment of manipulation forces

Nanotribological surface characterization by frequency modulated torsional resonance mode AFM

The aim of this work is to develop an experimental method to measure in-plane surface properties on the nanometer scale by torsional resonance mode atomic force microscopy and to understand the underlying system dynamics. The invention of the atomic force microscope (AFM) and the advances in development of new AFM based techniques have significantly enhanced the capability to probe surface properties with nanometer resolution. However, most of these techniques are based on a flexural oscillation of the force sensing cantilever which are sensitive to forces perpendicular to the surface. Therefore, there is a need for highly sensitive measurement methods for the characterization of in-plane properties. To this end, scanning shear force measurements with an AFM provide access to surface properties such as friction, shear stiffness, and other tribological surface properties with nanometer resolution. Dynamic atomic force microscopy utilizes the frequency response of the cantilever-probe assembly to reveal nanomechanical properties of the surface. The frequency response function of a cantilever in torsional motion was investigated by using a numerical model based on the finite element method (FEM). We demonstrated that the vibration of the cantilever in a torsional oscillation mode is highly sensitive to lateral elastic (conservative) and visco-elastic (non-conservative) in-plane material properties, thus, mapping of these properties is possible in the so-called torsional resonance mode AFM (TR-mode). The theoretical results were then validated by implementing a frequency modulation (FM) detection technique to torsion mode AFM. This method allows for measuring both conservative and non-conservative interactions. By monitoring changes of the resonant frequency and the oscillation amplitude, we were able to map elastic properties and dissipation caused by the tip-sample interaction. During approach and retract cycles, we observed a slight negative detuning of the torsional resonance frequency, depending on the tilt angle between the oscillation plane and the surface before contact to the HOPG surface. This angle leads to a mixing of in-plane (horizontal) and out-of-plane (vertical) sample properties. These findings have a significant implication for the imaging process and the adjustment of the microscope and may not be ignored when interpreting frequency shift or energy dissipation measurements. To elucidate the sensitivity of the frequency modulated torsional resonance mode AFM (FM-TR-AFM) for the energy dissipation measurement, different types of samples such as a compliant material (block copolymer), a mineral (chlorite) and a macromolecule (DNA) were investigated. The measurement of energy dissipation on these specimens indicated that the TR-AFM images reveal a clear difference for the domains which have different mechanical properties. Simultaneously a topographic and a chemical contrast are obtained by recording the detuning and the dissipation signal caused by the tip-surface interaction. Using FM-TR-AFM spectroscopically, we investigated frequency shift versus distance curves on the homopolymer polystyrene (PS). Depending on the molecular weight, the frequency detuning curve displayed two distinct regions. Firstly, a rather compliant surface layer was probed; secondly, the less mobile bulk of the polymer was sensed by the oscillatory motion of the tip. The high sensitivity of this technique to mechanical in-plane properties suggests that it can be used to discriminate different chemical properties (e.g. wetting) of the material by simultaneously measuring energy dissipation and surface topography

Investigation into vibration assisted micro milling: theory, modelling and applications

PhD ThesisPrecision micro components are increasingly in demand for various engineering industries, such as biomedical engineering, MEMS, electro-optics, aerospace and communications. The proposed requirements of these components are not only in high accuracy, but also in good surface performance, such as drag reduction, wear resistance and noise reduction, which has become one of the main bottlenecks in the development of these industries. However, processing these difficult-to-machine materials efficiently and economically is always a challenging task, which stimulates the development and subsequent application of vibration assisted machining (VAM) over the past few decades. Vibration assisted machining employs additional external energy sources to generate high frequency vibration in the conventional machining process, changing the machining (cutting) mechanism, thus reducing cutting force and cutting heat and improving machining quality. The current awareness on VAM technology is incomplete and effective implementation of the VAM process depends on a wide range of technical issues, including vibration device design and setup, process parameters optimization and performance evaluation. In this research, a 2D non-resonant vibration assisted system is developed and evaluated. Cutting mechanism and relevant applications, such as functional surface generation and microfluidic chips manufacturing is studies through both experimental and finite element analysis (FEA) method. A new two-dimensional piezoelectric actuator driven vibration stage is proposed and prototyped. A double parallel four-bar linkage structure with double layer flexible hinges is designed to guide the motion and reduce the displacement coupling effect between the two directions. The compliance modelling and dynamic analysis are carried out based on the matrix method and lagrangian principle, and the results are verified by finite element analysis. A closed loop control system is developed and proposed based on LabVIEW program consisting of data acquisition (DAQ) devices and capacitive sensors. Machining experiments have been carried out to evaluate the performance of the vibration stage and the results show a good agreement with the tool tip trajectory simulation results, which demonstrates the feasibility and effectiveness of the vibration stage for vibration assisted micro milling. The textured surface generation mechanism is investigated through both modelling and experimental methods. A surface generation model based on homogenous matrices transformation is proposed by considering micro cutter geometry and kinematics of vibration assisted milling. On this basis, series of simulations are performed to provide insights into the effects of various vibration parameters (frequency, amplitude and phase difference) on the generation mechanism of typical textured surfaces in 1D and 2D vibration-assisted micro milling. Furthermore, the wettability tests are performed on the machined surfaces with various surface texture topographies. A new contact model, which considers both liquid infiltration effects and air trapped in the microstructure, is proposed for predicting the wettability of the fish scales surface texture. The following surface textures are used for T-shaped and Y-shaped microchannels manufacturing to achieve liquid one-way flow and micro mixer applications, respectively. The liquid flow experiments have been carried out and the results indicate that liquid flow can be controlled effectively in the proposed microchannels at proper inlet flow rates. Burr formation and tool wear suppression mechanisms are studied by using both finite element simulation and experiment methods. A finite element model of vibration assisted micro milling using ABAQUS is developed based on the Johnson-Cook material and damage models. The tool-workpiece separation conditions are studied by considering the tool tip trajectories. The machining experiments are carried out on Ti-6Al-4V with coated micro milling tool (fine-grain tungsten carbides substrate with ZrO2-BaCrO4 (ZB) coating) under different vibration frequencies (high, medium and low) and cutting states (tool-workpiece separation or nonseparation). The results show that tool wear can be reduced effectively in vibration assisted micro milling due to different wear suppression mechanisms. The relationship between tool wear and cutting performance is studied, and the results indicate that besides tool wear reduction, better surface finish, lower burrs and smaller chips can also be obtained as vibration assistance is added

Remanufacturing and Advanced Machining Processes for New Materials and Components

"Remanufacturing and Advanced Machining Processes for Materials and Components presents current and emerging techniques for machining of new materials and restoration of components, as well as surface engineering methods aimed at prolonging the life of industrial systems. It examines contemporary machining processes for new materials, methods of protection and restoration of components, and smart machining processes. • Details a variety of advanced machining processes, new materials joining techniques, and methods to increase machining accuracy • Presents innovative methods for protection and restoration of components primarily from the perspective of remanufacturing and protective surface engineering • Discusses smart machining processes, including computer-integrated manufacturing and rapid prototyping, and smart materials • Provides a comprehensive summary of state-of-the-art in every section and a description of manufacturing methods • Describes the applications in recovery and enhancing purposes and identifies contemporary trends in industrial practice, emphasizing resource savings and performance prolongation for components and engineering systems The book is aimed at a range of readers, including graduate-level students, researchers, and engineers in mechanical, materials, and manufacturing engineering, especially those focused on resource savings, renovation, and failure prevention of components in engineering systems.

Remanufacturing and Advanced Machining Processes for New Materials and Components

Remanufacturing and Advanced Machining Processes for Materials and Components presents current and emerging techniques for machining of new materials and restoration of components, as well as surface engineering methods aimed at prolonging the life of industrial systems. It examines contemporary machining processes for new materials, methods of protection and restoration of components, and smart machining processes. • Details a variety of advanced machining processes, new materials joining techniques, and methods to increase machining accuracy • Presents innovative methods for protection and restoration of components primarily from the perspective of remanufacturing and protective surface engineering • Discusses smart machining processes, including computer-integrated manufacturing and rapid prototyping, and smart materials • Provides a comprehensive summary of state-of-the-art in every section and a description of manufacturing methods • Describes the applications in recovery and enhancing purposes and identifies contemporary trends in industrial practice, emphasizing resource savings and performance prolongation for components and engineering systems The book is aimed at a range of readers, including graduate-level students, researchers, and engineers in mechanical, materials, and manufacturing engineering, especially those focused on resource savings, renovation, and failure prevention of components in engineering systems

Remanufacturing and Advanced Machining Processes for New Materials and Components

"Remanufacturing and Advanced Machining Processes for Materials and Components presents current and emerging techniques for machining of new materials and restoration of components, as well as surface engineering methods aimed at prolonging the life of industrial systems. It examines contemporary machining processes for new materials, methods of protection and restoration of components, and smart machining processes. • Details a variety of advanced machining processes, new materials joining techniques, and methods to increase machining accuracy • Presents innovative methods for protection and restoration of components primarily from the perspective of remanufacturing and protective surface engineering • Discusses smart machining processes, including computer-integrated manufacturing and rapid prototyping, and smart materials • Provides a comprehensive summary of state-of-the-art in every section and a description of manufacturing methods • Describes the applications in recovery and enhancing purposes and identifies contemporary trends in industrial practice, emphasizing resource savings and performance prolongation for components and engineering systems The book is aimed at a range of readers, including graduate-level students, researchers, and engineers in mechanical, materials, and manufacturing engineering, especially those focused on resource savings, renovation, and failure prevention of components in engineering systems.