Design of high frequency ultrasonic transducers with flexure decoupling flanges for thermosonic bonding

This paper presents the design of high frequency ultrasonic transducers for micro/nano device thermosonic bonding. The transducers are actuated by piezoelectric ceramics and decoupled with their connecting parts through novel flexure decoupling flanges. Firstly, the initial geometric dimensions of the transducers were calculated using electromechanical equivalent method, then dynamic optimization design was carried out based on 3D finite element method (FEM), and the geometric dimensions of the transducer were finally determined. Flexure decoupling flanges were presented, and the decoupling principle of the flanges was explained through compliance modeling using compliance matrix method and FEM. After that the dynamic characteristics of the transducers were analyzed through finite element analysis (FEA). The vibration frequencies and modes of the piezoelectric converter, concentrators and transducers were obtained through modal analysis, and the displacement nodes were determined. The longitudinal ultrasonic energy transmission was presented and the decoupling effects of the flexure flanges were compared. Finally, the transducers were manufactured and experimental tests were conducted to examine the transducer characteristics using an impedance analyzer. The experimental results match well with the FEA. The results show that the longitudinal vibration frequencies of the transducers with ring, prismatic beam and circular notched hinge based flanges are 126.6 kHz, 125.8 kHz and 125.52 kHz, respectively. The decoupling flange with circular notched hinges shows the best decoupling effect among the three types of flanges

A three-DOF ultrasonic motor using four piezoelectric ceramic plates in bonded-type structure

A three-DOF ultrasonic motor is presented in this paper. The proposed motor consists of four piezoelectric ceramic plates and a mental base with a flange that can fix the motor on a rack. The proposed motor takes advantage of a longitudinal mode and two bending modes, different hybrids of which can realize three-DOF actuation. Because of symmetric structure of the proposed motor, the resonance frequencies of the two bending modes are identical. And the resonance frequency of the longitudinal mode was tuned closed to the ones of the bending modes by adjusting the structural parameters in modal analysis. Then trajectories of nodes on the driving foot were obtained by the transient analysis to verify the feasibility of driving principle. Experiments including vibration shape test and output characteristic test were executed. The starting voltages of the rotation along horizontal axes are about 10 Vp-p. Under driving voltages of 200 Vp-p, the output velocities of three DOF can reach 280 rpm, 277 rpm and 327 rpm, respectively. The results of the experiments indicate that the proposed motor is characterized by low starting voltages and high output velocities

Energy Harvesters and Self-powered Sensors for Smart Electronics

This book is a printed edition of the Special Issue “Energy Harvesters and Self-Powered Sensors for Smart Electronics” that was published in Micromachines, which showcases the rapid development of various energy harvesting technologies and novel devices. In the current 5G and Internet of Things (IoT) era, energy demand for numerous and widely distributed IoT nodes has greatly driven the innovation of various energy harvesting technologies, providing key functionalities as energy harvesters (i.e., sustainable power supplies) and/or self-powered sensors for diverse IoT systems. Accordingly, this book includes one editorial and nine research articles to explore different aspects of energy harvesting technologies such as electromagnetic energy harvesters, piezoelectric energy harvesters, and hybrid energy harvesters. The mechanism design, structural optimization, performance improvement, and a wide range of energy harvesting and self-powered monitoring applications have been involved. This book can serve as a guidance for researchers and students who would like to know more about the device design, optimization, and applications of different energy harvesting technologies