A Review of Haptic Feedback Teleoperation Systems for Micromanipulation and Microassembly

International audienceThis paper presents a review of the major haptic feedback teleoperation systems for micromanipulation. During the last decade, the handling of micrometer-sized objects has become a critical issue. Fields of application from material science to electronics demonstrate an urgent need for intuitive and flexible manipulation systems able to deal with small-scale industrial projects and assembly tasks. Two main approaches have been considered: fully automated tasks and manual operation. The first one require fully pre determined tasks, while the later necessitates highly trained operators. To overcome these issues the use of haptic feedback teleoperation where the user manipulates the tool through a joystick whilst feeling a force feedback, appears to be a promising solution as it allows high intuitiveness and flexibility. Major advances have been achieved during this last decade, starting with systems that enable the operator to feel the substrate topology, to the current state-of-the-art where 3D haptic feedback is provided to aid manipulation tasks. This paper details the major achievements and the solutions that have been developed to propose 3D haptic feedback for tools that often lack 3D force measurements. The use of virtual reality to enhance the immersion is also addressed. The strategies developed provide haptic feedback teleoperation systems with a high degree of assistance and for a wide range of micromanipulation tools. Based on this expertise on haptic for micromanipulation and virtual reality assistance it is now possible to propose microassembly systems for objects as small as 1 to 10 micrometers. This is a mature field and will benefit small-scale industrial projects where precision and flexibility in microassembly are required

Haptic feedback in teleoperation in Micro-and Nano-Worlds.

International audienceRobotic systems have been developed to handle very small objects, but their use remains complex and necessitates long-duration training. Simulators, such as molecular simulators, can provide access to large amounts of raw data, but only highly trained users can interpret the results of such systems. Haptic feedback in teleoperation, which provides force-feedback to an operator, appears to be a promising solution for interaction with such systems, as it allows intuitiveness and flexibility. However several issues arise while implementing teleoperation schemes at the micro-nanoscale, owing to complex force-fields that must be transmitted to users, and scaling differences between the haptic device and the manipulated objects. Major advances in such technology have been made in recent years. This chapter reviews the main systems in this area and highlights how some fundamental issues in teleoperation for micro- and nano-scale applications have been addressed. The chapter considers three types of teleoperation, including: (1) direct (manipulation of real objects); (2) virtual (use of simulators); and (3) augmented (combining real robotic systems and simulators). Remaining issues that must be addressed for further advances in teleoperation for micro-nanoworlds are also discussed, including: (1) comprehension of phenomena that dictate very small object (< 500 micrometers) behavior; and (2) design of intuitive 3-D manipulation systems. Design guidelines to realize an intuitive haptic feedback teleoperation system at the micro-nanoscale level are proposed

Guest Editorial Microassembly for Manufacturing at Small Scales.

International audienceMICROELECTRONICS brought an information revolution through integrating a vast number of microscopic transistors. Much progress has beenmade inminiaturization and integration of MEMS or MOEMS (Micro-(Opto-)Electro-Mechanical-Systems to produce accelerometers, inkjet printer heads, micro-mirrors, micro-relays, and pressure sensors. A new generation of MEMS is rapidly moving toward highly integrated, more complex heterogeneous microsystems with increased functionalities. Many limitations remain that are extremelydifficult to overcome, especially concerning processes and materials incompatibilities. microassembly is a natural and powerful approach to overcome these processes incompatibilities and to facilitate complex, heterogeneous, 3D, or out of plane integration. By using basic micro-scale components, microassembly constitutes a new alternative of Microsystems production that may lead to cost savings and shorter development cycle times. Because of the size of the components and of the required precision, automation is needed

Bilateral Macro-Micro Teleoperation Using A Magnetic Actuation Mechanism

In recent years, there has been increasing interest in the advancement of microrobotic systems in micro-engineering, micro-fabrication, biological research and biomedical applications. Untethered magnetic-based microrobotic systems are one of the most widely developing groups of microrobotic systems that have been extensively explored for biological and biomedical micro-manipulations. These systems show promise in resolving problems related to on-board power supply limitations as well as mechanical contact sealing and lubrication. In this thesis, a high precision magnetic untethered microrobotic system is demonstrated for micro-handling tasks. A key aspect of the proposed platform concerns the integration of magnetic levitation technology and bilateral macro-micro teleoperation for human intervention to avoid imperceptible failures in poorly observed micro-domain environments. The developed platform has three basic subsystems: a magnetic untethered microrobotic system (MUMS), a haptic device, and a scaled bilateral teleoperation system. The MUMS produces and regulates a magnetic field for non-contact propelling of a microrobot. In order to achieve a controlled motion of the magnetically levitated microrobot, a mathematical force model of the magnetic propulsion mechanism is developed and used to design various control systems. In the workspace of 30 × 32 × 32 mm 3, both PID and LQG\LTR controllers perform similarly the position accuracy of 10 µ m in a vertical direction and 2 µ m in a horizontal motion. The MUMS is equipped with an eddy-current damper to enhance its inherent damping factor in the microrobot's horizontal motions. This paper deals with the modeling and analysis of an eddy-current damper that is formed by a conductive plate placed below the levitated microrobot to overcome inherent dynamical vibrations and improve motion precision. The modeling of eddy-current distribution in the conductive plate is investigated by solving the diffusion equation for vector magnetic potential, and an analytical expression for the horizontal damping force is presented and experimentally validated. It is demonstrated that eddy-current damping is a crucial technique for increasing the damping coefficient in a non-contact way and for improving levitation performance. The damping can be widely used in applications of magnetic actuation systems in micro-manipulation and micro-fabrication. To determine the position of the microrobot in a workspace, the MUMS uses high-accuracy laser sensors. However, laser positioning techniques can only be used in highly transparent environments. A novel technique based on real-time magnetic flux measurement has been proposed for the position estimation of the microrobot in case of laser beam blockage, whereby a combination of Hall-effect sensors is employed to find the microrobot's position in free motion by using the produced magnetic flux. In free motion, the microrobot tends to move toward the horizontally zero magnetic field gradient, Bmax location. As another key feature of the magnetic flux measurement, it was realized that the applied force from the environment to the microrobot can be estimated as linearly proportional to the distance of the microrobot from the Bmax location. The developed micro-domain force estimation method is verified experimentally with an accuracy of 1.27 µ N. A bilateral macro-micro teleoperation technique is employed in the MUMS for the telepresence of a human operator in the task environment. A gain-switching position-position teleoperation scheme is employed and a human operator controls the motion of the microrobot via a master manipulator for dexterous micro-manipulation tasks. The operator can sense a strong force during micro-domain tasks if the microrobot encounters a stiff environment, and the effect of hard contact is fed back to the operator's hand. The position-position method works for both free motion and hard contact. However, to enhance the feeling of a micro-domain environment in the human operator, the scaled force must be transferred to a human, thereby realizing a direct-force-reflection bilateral teleoperation. Additionally, a human-assisted virtual reality interface is developed to improve a human operator's skills in using the haptic-enabled platform, before carrying out an actual dexterous task.1 yea

Modeling and experimental validation of a parallel microrobot for biomanipulation

The main purpose of this project is the development of a commercial micropositioner's (SmarPod 115.25, SmarAct GmbH) geometrical model. SmarPod is characterized by parallel kinematics and is employed for precise and accurate sample's positioning under SEM microscope, being vacuum-compatible, for various applications. Geometrical modeling represents the preliminar step to fully understand, and possibly improve, robot's closed loop behaviour in terms of task's quality precision, when enterprises does not provide sufficient documentation. The robotic system, in fact, represents in this case a "black box" from which it's possible to extract information. This step is essential in order to improve, consequently, the reliability of bio-microsystem manipulation and characterization. Disposing of a detailed microrobot's model becomes essential to deal with the typical lack of sensing at microscale, as it allows a 3D precise and adequate reconstruction, realized through proper softwares, of the manipulation set-up. The roles of Virtual Reality (VR) and of simulations, carried out, in this case, in Blender environment, are asserted as well as an essential helping tool in mycrosystem's task planning. Blender is a professional free and open-source 3D computer graphics software and it is proven to be a basic instrument to validate microrobot's model, even to simplify it in case of complex system's geometries

Stability and Transparency Analysis of a Teleoperation Chain For Microscale Interaction.

International audienceMicroscale teleoperation with haptic feedback requires scaling gains in the order of 104 107. These high gains impose a trade-off between stability and transparency. Due to the conservative approach used in most designs, transparency is reduced since damping is added to the system to guarantee stability. Starting from the fact that series, negative feedback and parallel connection of passive systems is a passive system, a new approach is addressed in this work. We propose here a complete teleoperation chain designed from the ground up for full transparency and stability, including a novel self-sensing probe and a high fidelity force-feedback haptic interface. By guaranteeing the passivity of each device and assuming that the human operator and the environment are passive systems, a homothetic direct coupling can be used without jeopardizing the stability and provides best transparency. The system is experimentally demonstrated in the complex case of a probe interacting with a water droplet under human control, while accurately transcribing the interaction back to operator

Micromanipulation-force feedback pushing

In micromanipulation applications, it is often desirable to position and orient polygonal micro-objects lying on a planar surface. Pushing micro-objects using point contact provides more flexibility and less complexity compared to pick and place operation. Due to the fact that in micro-world surface forces are much more dominant than inertial forces and these forces are distributed unevenly, pushing through the center of mass of the micro-object will not yield a pure translational motion. In order to translate a micro-object, the line of pushing should pass through the center of friction. Moreover, due to unexpected nature of the frictional forces between the micro-object and substrate, the maximum force applied to the micro-object needs to be limited to prevent any damage either to the probe or micro-object. In this dissertation, a semi-autonomous manipulation scheme is proposed to push microobjects with human assistance using a custom built tele-micromanipulation setup to achieve pure translational motion. The pushing operation can be divided into two concurrent processes: In one process human operator who acts as an impedance controller to switch between force-position controllers and alters the velocity of the pusher while in contact with the micro-object through scaled bilateral teleoperation with force feedback. In the other process, the desired line of pushing for the micro-object is determined continuously so that it always passes through the varying center of friction. Visual feedback procedures are adopted to align the resultant velocity vector at the contact point to pass through the center of friction in order to achieve pure translational motion of the micro-object. Experimental results are demonstrated to prove the effectiveness of the proposed controller along with nanometer scale position control, nano-Newton range force sensing, scaled bilateral teleoperation with force feedback

Design and implementation of a vision system for microassembly workstation

Rapid development of micro/nano technologies and the evolvement of biotechnology have led to the research of assembling micro components into complex microsystems and manipulation of cells, genes or similar biological components. In order to develop advanced inspection/handling systems and methods for manipulation and assembly of micro products and micro components, robust micromanipulation and microassembly strategies can be implemented on a high-speed, repetitive, reliable, reconfigurable, robust and open-architecture microassembly workstation. Due to high accuracy requirements and specific mechanical and physical laws which govern the microscale world, micromanipulation and microassembly tasks require robust control strategies based on real-time sensory feedback. Vision as a passive sensor can yield high resolutions of micro objects and micro scenes along with a stereoscopic optical microscope. Visual data contains useful information for micromanipulation and microassembly tasks, and can be processed using various image processing and computer vision algorithms. In this thesis, the initial work on the design and implementation of a vision system for microassembly workstation is introduced. Both software and hardware issues are considered. Emphasis is put on the implementation of computer vision algorithms and vision based control techniques which help to build strong basis for the vision part of the microassembly workstation. The main goal of designing such a vision system is to perform automated micromanipulation and microassembly tasks for a variety of applications. Experiments with some teleoperated and semiautomated tasks, which aim to manipulate micro particles manually or automatically by microgripper or probe as manipulation tools, show quite promising results

Workshop on "Control issues in the micro / nano - world".

International audienceDuring the last decade, the need of systems with micro/nanometers accuracy and fast dynamics has been growing rapidly. Such systems occur in applications including 1) micromanipulation of biological cells, 2) micrassembly of MEMS/MOEMS, 3) micro/nanosensors for environmental monitoring, 4) nanometer resolution imaging and metrology (AFM and SEM). The scale and requirement of such systems present a number of challenges to the control system design that will be addressed in this workshop. Working in the micro/nano-world involves displacements from nanometers to tens of microns. Because of this precision requirement, environmental conditions such as temperature, humidity, vibration, could generate noise and disturbance that are in the same range as the displacements of interest. The so-called smart materials, e.g., piezoceramics, magnetostrictive, shape memory, electroactive polymer, have been used for actuation or sensing in the micro/nano-world. They allow high resolution positioning as compared to hinges based systems. However, these materials exhibit hysteresis nonlinearity, and in the case of piezoelectric materials, drifts (called creep) in response to constant inputs In the case of oscillating micro/nano-structures (cantilever, tube), these nonlinearities and vibrations strongly decrease their performances. Many MEMS and NEMS applications involve gripping, feeding, or sorting, operations, where sensor feedback is necessary for their execution. Sensors that are readily available, e.g., interferometer, triangulation laser, and machine vision, are bulky and expensive. Sensors that are compact in size and convenient for packaging, e.g., strain gage, piezoceramic charge sensor, etc., have limited performance or robustness. To account for these difficulties, new control oriented techniques are emerging, such as[d the combination of two or more ‘packageable' sensors , the use of feedforward control technique which does not require sensors, and the use of robust controllers which account the sensor characteristics. The aim of this workshop is to provide a forum for specialists to present and overview the different approaches of control system design for the micro/nano-world and to initiate collaborations and joint projects