Single-Chip Reduced-Wire CMUT-on-CMOS System for Intracardiac Echocardiography

CMUT-on-CMOS integration is particularly suitable for catheter based ultrasound imaging applications, where electronics integration enables multiplexing capabilities to reduce the number of electrical connections leading to smaller catheter cable profiles. Here, a single-chip CMUT-on-CMOS system for intracardiac echocardiography (ICE) is presented. In this system, a 64 element 1-D CMUT array is fabricated over an application specific integrated circuit (ASIC) that features a programmable transmit beamformer with high voltage (HV) pulsers and receive circuits using 8:1 time division multiplexing (TDM). Integration of pitch matched 64 channel front-end circuits with CMUT arrays in a single-chip configuration allows for implementation of catheter probes with miniaturization, reduced number of cables, and better mechanical flexibility. The ASIC is implemented in 60 V 0.18 μm HV process. It occupies 2.6×11 mm 2 which can fit in the catheter size of 9F, and reduces the number of wires from more than 64 to 22. This system is used for B-mode imaging of imaging phantoms and its potential application for 2D CMUT-on-CMOS arrays is discussed

Single-Chip Reduced-Wire Active Catheter System with Programmable Transmit Beamforming and Receive Time-Division Multiplexing for Intracardiac Echocardiography

Intracardiac echocardiography (ICE) provides real-time ultrasound imaging of the heart anatomy from inside, guiding interventions like valve repair, closure of atrial septal defects (ASD) and catheter-based ablation to treat atrial fibrillation. With its better image quality and ease of use, ICE is becoming the preferred imaging modality over transesophageal echography (TEE) for structural heart interventions. The existing commercial ICE catheters, however, offer a limited 2-D or 3-D field of view despite catheters utilizing large number of wires. In these catheters, each element in the ICE array is connected to the backend data-acquisition channel with a separate wire, which is a critical barrier for improving image quality and widening the field of view. In order to use ICE catheters under MRI instead of the ionizing X-ray radiation-based angiography, the number of interconnect wires in the catheter should be minimized to reduce RF-induced heating. Furthermore, reducing the number of wires improves the flexibility and lowers the cost of the single-use ICE catheters

Integrated Electronics for Wireless Imaging Microsystems with CMUT Arrays

Integration of transducer arrays with interface electronics in the form of single-chip CMUT-on-CMOS has emerged into the field of medical ultrasound imaging and is transforming this field. It has already been used in several commercial products such as handheld full-body imagers and it is being implemented by commercial and academic groups for Intravascular Ultrasound and Intracardiac Echocardiography. However, large attenuation of ultrasonic waves transmitted through the skull has prevented ultrasound imaging of the brain. This research is a prime step toward implantable wireless microsystems that use ultrasound to image the brain by bypassing the skull. These microsystems offer autonomous scanning (beam steering and focusing) of the brain and transferring data out of the brain for further processing and image reconstruction. The objective of the presented research is to develop building blocks of an integrated electronics architecture for CMUT based wireless ultrasound imaging systems while providing a fundamental study on interfacing CMUT arrays with their associated integrated electronics in terms of electrical power transfer and acoustic reflection which would potentially lead to more efficient and high-performance systems. A fully wireless architecture for ultrasound imaging is demonstrated for the first time. An on-chip programmable transmit (TX) beamformer enables phased array focusing and steering of ultrasound waves in the transmit mode while its on-chip bandpass noise shaping digitizer followed by an ultra-wideband (UWB) uplink transmitter minimizes the effect of path loss on the transmitted image data out of the brain. A single-chip application-specific integrated circuit (ASIC) is de- signed to realize the wireless architecture and interface with array elements, each of which includes a transceiver (TRX) front-end with a high-voltage (HV) pulser, a high-voltage T/R switch, and a low-noise amplifier (LNA). Novel design techniques are implemented in the system to enhance the performance of its building blocks. Apart from imaging capability, the implantable wireless microsystems can include a pressure sensing readout to measure intracranial pressure. To do so, a power-efficient readout for pressure sensing is presented. It uses pseudo-pseudo differential readout topology to cut down the static power consumption of the sensor for further power savings in wireless microsystems. In addition, the effect of matching and electrical termination on CMUT array elements is explored leading to new interface structures to improve bandwidth and sensitivity of CMUT arrays in different operation regions. Comprehensive analysis, modeling, and simulation methodologies are presented for further investigation.Ph.D

Capacitive micromachined ultrasound transducer (CMUT) design and fabrication for intracardiac echocardiography

The objective of this research is to develop capacitive micromachined ultrasonic transducer (CMUT) arrays with novel geometry for intracardiac echocardiography (ICE) imaging along with a novel reliable CMUT fabrication process to improve the system performance. We used custom CMOS electronics and monolithically integrated our CMUT arrays to CMOS chips. The arrays are designed for 9-Fr (<3mm) ICE catheters over a total area of about 2.6x11 mm2 at around 7MHz center frequency with ~80% fractional bandwidth in both 1-D and 2-D configurations. The 1-D array transducer includes 64 channels with beam-steering capabilities for cross sectional ICE imaging application at distance range of about 5-cm. The ICE image with 40dB dynamic range from 7 metal wires has been obtained. Several 2-D (sparse) arrays are designed based on signal-to-noise ratio (SNR) optimization capable of generating volumetric images. The CMUT-on-CMOS technique is used for arrays integration with our ASICs using vias for top and bottom electrode connections to the related electronics pads. A 60V pulse is optimized during transmit operation and 2MPa surface pressure has been achieved that is in agreement with our simulation results. We also developed an improved CMOS compatible low temperature sacrificial layer fabrication process for CMUTs. The process adds the fabrication step of silicon oxide evaporation which is followed by a lift-off step to define the membrane support area without a need for an extra mask. The parasitic capacitance is reduced about 15% and device long-term test demonstrates 72-hours stable output pressure showing no significant degradation on performance. We have also developed a new energy-based calculation method for CMUT performance evaluation that is valid during both small and large signal operation since well-known frequency and capacitance based coupling coefficients definitions are not valid for large signal and nonlinear operation regimes. The quantitative modeling results show that CMUTs do not need DC bias to achieve high efficiency large signal transduction: AC only signals at half the operation frequency with amplitudes beyond the collapse voltage can provide energy conversion ratio (ECR) above 0.9 with harmonic content below -25dB. The overall modeling approach is also qualitatively validated by experiments.Ph.D

Integrated Circuits for Medical Ultrasound Applications: Imaging and Beyond

Medical ultrasound has become a crucial part of modern society and continues to play a vital role in the diagnosis and treatment of illnesses. Over the past decades, the develop- ment of medical ultrasound has seen extraordinary progress as a result of the tremendous research advances in microelectronics, transducer technology and signal processing algorithms. How- ever, medical ultrasound still faces many challenges including power-efficient driving of transducers, low-noise recording of ultrasound echoes, effective beamforming in a non-linear, high- attenuation medium (human tissues) and reduced overall form factor. This paper provides a comprehensive review of the design of integrated circuits for medical ultrasound applications. The most important and ubiquitous modules in a medical ultrasound system are addressed, i) transducer driving circuit, ii) low- noise amplifier, iii) beamforming circuit and iv) analog-digital converter. Within each ultrasound module, some representative research highlights are described followed by a comparison of the state-of-the-art. This paper concludes with a discussion and recommendations for future research directions

Agile and Bright Intracardiac Catheters

Intracardiac imaging catheters represent unique instruments to diagnose and treat a diseased heart. While there are imminent advances in medical innovation, many of the commercially available imaging catheters are outdated. Some of them have been designed more than 20 years and therefore they lack novel sensor technology, multi-functionality, and often require manual assembly process. Introduction chapter of this thesis discusses clinical needs and introduces new technological concepts that are needed to progress the functionality and clinical value of the intracardiac catheters along with efficient and simple designs to make the catheters affordable for the patients. The following chapters are grouped into two parts that explore complementary transducer technology and a novel optical fiber-link solution for catheter-based intracardiac imaging. _Part I_ focuses on developing a new intracardiac catheter that has an advanced functionality, which provides clinician with high penetration or close-up high resolution ultrasound imaging in a single device. This agile ultrasound visualization is enabled by a capacitive-micromachined ultrasound transducer (CMUT), operated in collapse-mode, of which the operating frequency can be tuned. Acoustic performance of a fabricated CMUT is modelled and measured. Imaging performance of the CMUT array is quantified on a tissue-mimicking phantom and demonstrated both ex vivo and in vivo experiments. It is found that the combination of the forward-looking design, frequency-tuning and agile deflectability of the catheter allow for visualizing intracardiac structures of various sizes at different distances relative to the catheter tip, providing both wide overviews and detailed close-ups. _Part II_ is devoted to a novel optical technology for transmitting signals and transferring power inside catheters. A novel concept of an all-optical fiber link is introduced. A key insight obtained is that a blue light-emitting diode (LED) may be used as a photo-voltaic converter. Used in reverse under illumination with violet light, it converts significant amount of photonic energy to electricity and at the same time it may emit blue light back, which makes it a unique miniature power and communication channel for catheters. A pressure-sensing catheter prototype is built to demonstrate the concept of transmitting signals and delivering power using a single optical fiber and an LED. The potential of the power and signal fiber link solution is exploited further for ultrasound imaging. A bench-top demonstrator scalable to catheter dimensions is built, in which electrical wires for ultrasound-sensor signal and power tra