Doctor of Philosophy

dissertationTactile sensors are a group of sensors that are widely being developed for transduction of touch, force and pressure in the field of robotics, contact sensing and gait analysis. These sensors are employed to measure and register interactions between contact surfaces and the surrounding environment. Since these sensors have gained usage in the field of robotics and gait analysis, there is a need for these sensors to be ultra flexible, highly reliable and capable of measuring pressure and two-axial shear simultaneously. The sensors that are currently available are not capable of achieving all the aforementioned qualities. The goal of this work is to design and develop such a flexible tactile sensor array based on a capacitive sensing scheme and we call it the flexible tactile imager (FTI). The developed design can be easily multiplexed into a high-density array of 676 multi-fingered capacitors that are capable of measuring pressure and two-axial shear simultaneously while maintaining sensor flexibility and reliability. The sensitivity of normal and shear stress for the FTI are 0.74/MPa and 79.5/GPa, respectively, and the resolvable displacement and velocity are as low as 60 µm and 100 µm/s, respectively. The developed FTI demonstrates the ability to detect pressure and shear contours of objects rolling on top of it and capability to measure microdisplacement and microvelocities that are desirable during gait analysis

Fused Filament Fabrication of Prosthetic Components for Trans-Humeral Upper Limb Prosthetics

abstract: Presented below is the design and fabrication of prosthetic components consisting of an attachment, tactile sensing, and actuator systems with Fused Filament Fabrication (FFF) technique. The attachment system is a thermoplastic osseointegrated upper limb prosthesis for average adult trans-humeral amputation with mechanical properties greater than upper limb skeletal bone. The prosthetic designed has: a one-step surgical process, large cavities for bone tissue ingrowth, uses a material that has an elastic modulus less than skeletal bone, and can be fabricated on one system. FFF osseointegration screw is an improvement upon the current two-part osseointegrated prosthetics that are composed of a fixture and abutment. The current prosthetic design requires two invasive surgeries for implantation and are made of titanium, which has an elastic modulus greater than bone. An elastic modulus greater than bone causes stress shielding and overtime can cause loosening of the prosthetic. The tactile sensor is a thermoplastic piezo-resistive sensor for daily activities for a prosthetic’s feedback system. The tactile sensor is manufactured from a low elastic modulus composite comprising of a compressible thermoplastic elastomer and conductive carbon. Carbon is in graphite form and added in high filler ratios. The printed sensors were compared to sensors that were fabricated in a gravity mold to highlight the difference in FFF sensors to molded sensors. The 3D printed tactile sensor has a thickness and feel similar to human skin, has a simple fabrication technique, can detect forces needed for daily activities, and can be manufactured in to user specific geometries. Lastly, a biomimicking skeletal muscle actuator for prosthetics was developed. The actuator developed is manufactured with Fuse Filament Fabrication using a shape memory polymer composite that has non-linear contractile and passive forces, contractile forces and strains comparable to mammalian skeletal muscle, reaction time under one second, low operating temperature, and has a low mass, volume, and material costs. The actuator improves upon current prosthetic actuators that provide rigid, linear force with high weight, cost, and noise.Dissertation/ThesisDoctoral Dissertation Biomedical Engineering 201

Piezoelectric Transducers Based on Aluminum Nitride and Polyimide for Tactile Applications

The development of micro systems with smart sensing capabilities is paving the way to progresses in the technology for humanoid robotics. The importance of sensory feedback has been recognized the enabler of a high degree of autonomy for robotic systems. In tactile applications, it can be exploited not only to avoid objects slipping during their manipulation but also to allow safe interaction with humans and unknown objects and environments. In order to ensure the minimal deformation of an object during subtle manipulation tasks, information not only on contact forces between the object and fingers but also on contact geometry and contact friction characteristics has to be provided. Touch, unlike other senses, is a critical component that plays a fundamental role in dexterous manipulation capabilities and in the evaluation of objects properties such as type of material, shape, texture, stiffness, which is not easily possible by vision alone. Understanding of unstructured environments is made possible by touch through the determination of stress distribution in the surrounding area of physical contact. To this aim, tactile sensing and pressure detection systems should be integrated as an artificial tactile system. As illustrated in the Chapter I, the role of external stimuli detection in humans is provided by a great number of sensorial receptors: they are specialized endings whose structure and location in the skin determine their specific signal transmission characteristics. Especially, mechanoreceptors are specialized in the conversion of the mechanical deformations caused by force, vibration or slip on skin into electrical nerve impulses which are processed and encoded by the central nervous system. Highly miniaturized systems based on MEMS technology seem to imitate properly the large number of fast responsive mechanoreceptors present in human skin. Moreover, an artificial electronic skin should be lightweight, flexible, soft and wearable and it should be fabricated with compliant materials. In this respect a big challenge of bio-inspired technologies is the efficient application of flexible active materials to convert the mechanical pressure or stress into a usable electric signal (voltage or current). In the emerging field of soft active materials, able of large deformation, piezoelectrics have been recognized as a really promising and attractive material in both sensing and actuation applications. As outlined in Chapter II, there is a wide choice of materials and material forms (ceramics: PZT; polycrystalline films: ZnO, AlN; polymers and copolymers: PVDF, PVDF-TrFe) which are actively piezoelectric and exhibit features more or less attractive. Among them, aluminum nitride is a promising piezoelectric material for flexible technology. It has moderate piezoelectric coefficient, when available in c-axis oriented polycrystalline columnar structure, but, at same time, it exhibits low dielectric constant, high temperature stability, large band gap, large electrical resistivity, high breakdown voltage and low dielectric loss which make it suitable for transducers and high thermal conductivity which implies low thermal drifts. The high chemical stability allows AlN to be used in humid environments. Moreover, all the above properties and its deposition method make AlN compatible with CMOS technology. Exploiting the features of the AlN, three-dimensional AlN dome-shaped cells, embedded between two metal electrodes, are proposed in this thesis. They are fabricated on general purpose Kapton™ substrate, exploiting the flexibility of the polymer and the electrical stability of the semiconductor at the same time. As matter of fact, the crystalline layers release a compressive stress over the polymer, generating three-dimensional structures with reduced stiffness, compared to the semiconductor materials. In Chapter III, a mathematical model to calculate the residual stresses which arise because of mismatch in coefficient of thermal expansion between layers and because of mismatch in lattice constants between the substrate and the epitaxially grown films is adopted. The theoretical equation is then used to evaluate the dependence of geometrical features of the fabricated three-dimensional structures on compressive residual stress. Moreover, FEM simulations and theoretical models analysis are developed in order to qualitative explore the operation principle of curved membranes, which are labelled dome-shaped diaphragm transducers (DSDT), both as sensors and as piezo-actuators and for the related design optimization. For the reliability of the proposed device as a force/pressure sensor and piezo-actuator, an exhaustive electromechanical characterization of the devices is carried out. A complete description of the microfabrication processes is also provided. As shown in Chapter IV, standard microfabrication techniques are employed to fabricate the array of DSDTs. The overall microfabrication process involves deposition of metal and piezoelectric films, photolithography and plasma-based dry and wet etching to pattern thin films with the desired features. The DSDT devices are designed and developed according to FEM and theoretical analysis and following the typical requirements of force/pressure systems for tactile applications. Experimental analyses are also accomplished to extract the relationship between the compressive residual stress due to the aluminum nitride and the geometries of the devices. They reveal different deformations, proving the dependence of the geometrical features of the three-dimensional structures on residual stress. Moreover, electrical characterization is performed to determine capacitance and impedance of the DSDTs and to experimentally calculate the relative dielectric constant of sputtered AlN piezoelectric film. In order to investigate the mechanical behaviour of the curved circular transducers, a characterization of the flexural deflection modes of the DSDT membranes is carried out. The natural frequency of vibrations and the corresponding displacements are measured by a Laser Doppler Vibrometer when a suitable oscillating voltage, with known amplitude, is applied to drive the piezo-DSDTs. Finally, being developed for tactile sensing purpose, the proposed technology is tested in order to explore the electromechanical response of the device when impulsive dynamic and/or long static forces are applied. The study on the impulsive dynamic and long static stimuli detection is then performed by using an ad hoc setup measuring both the applied loading forces and the corresponding generated voltage and capacitance variation. These measurements allow a thorough test of the sensing abilities of the AlN-based DSDT cells. Finally, as stated in Chapter V, the proposed technology exhibits an improved electromechanical coupling with higher mechanical deformation per unit energy compared with the conventional plate structures, when the devices are used as piezo-actuator. On the other hand, it is well suited to realize large area tactile sensors for robotics applications, opening up new perspectives to the development of latest generation biomimetic sensors and allowing the design and the fabrication of miniaturized devices

Electrospun Bundled Carbon Nanofibers for Skin-Inspired Tactile Sensing, Proprioception and Gesture Tracking Applications

Abstract In this work, we report a class of wearable, stitchable, and sensitive carbon nanofiber (CNF)-polydimethylsiloxane (PDMS) composite-based piezoresistive sensors realized by carbonizing electrospun polyacrylonitrile (PAN) nanofibers and subsequently embedding in PDMS elastomeric thin films. Electro-mechanical tactile sensing characterization of the resulting piezoresistive strain sensors revealed a linear response with an average force sensitivity of ~1.82 kN−1 for normal forces up to 20 N. The real-time functionality of the CNF-PDMS composite sensors in wearable body sensor networks and advanced bionic skin applications was demonstrated through human motion and gesture monitoring experiments. A skin-inspired artificial soft sensor capable of demonstrating proprioceptive and tactile sensory perception utilizing CNF bundles has been shown. Furthermore, a 16-point pressure-sensitive flexible sensor array mimicking slow adapting low threshold mechanoreceptors of glabrous skin was demonstrated. Such devices in tandem with neuromorphic circuits can potentially recreate the sense of touch in robotic arms and restore somatosensory perception in amputees

Flexible Carbon-Based Electronics and Sensorized Neuroprosthesis

In the United States alone, there are more than 2 million people living with limb loss and prosthetic devices have long been the solution to recover their activities of daily living. However, many of the prosthetic users reported their dissatisfaction with current prostheses and some even abandoned theirs due to poor comfort and limited performance. To improve prosthetic control, advancements in surgical interfaces and sensorized neuroprosthesis are two major focus and have seen great potential. Both perspectives are presented in this work. Several reinnervated muscle surgeries have been invented to enable a better communication with muscle and nerves and a stable interface is essential to record robust muscle signals which are utilized to control a neuroprosthesis. Each muscle target may have slightly different anatomy and the current state-of-the-art implantable electrodes are complex and not easily reproducible and customizable. To address this problem, I present a simple, rapid electrode fabrication method to record muscle signals and easy-to-use electrode materials using carbon black/polydimethylsiloxane (PDMS) composite. Acute in vivo testing shows that the electrodes are highly functional and have the potential to enable large-scale muscle signal recordings with extensive data to improve the neuroprosthetic control. In addition to novel neural interfaces, sensory perception is also critical to improve the manipulation of objects with a prosthesis and enhances prosthetic performance and embodiment with feedback to the user. With recent advances in tactile sensing technology and neuromorphic stimulation interface, efficient real-time communication and functioning between them are still missing. In this work, I build and test a closed-loop system that integrates tactile sensing and neuromorphic electrical stimulation. The system functions in real time and the parameters of the sensory stimulation through transcutaneous electrical nerve stimulation (TENS) convey temporal information and dynamically change responding to real-time tactile data

Fabrication and Application of Flexible Sensors

A transfer printing method was developed to transfer carbon nanotubes (CNTs) from polyethylene terephthalate (PET) film to poly(dimethyl siloxane) (PDMS) polymer. Carbon nanotubes are composed of carbon atoms arranged in a honeycomb lattice structure, which are electrically conducting. When embedded in a nonconducting polymer, carbon nanotubes impart electrical conductivity to the nanocomposite, thus forming a nanocomposite that has potential applications in highly sensitive strain and pressure sensors. Several printing methods have been studied to deposit carbon nanotubes onto PDMS, including inkjet printing. Inkjet printing is a desirable deposition method since it is low-cost, simple, and allows the processing of aqueous-based inks. However, directly inkjet printing carbon nanotubes onto PDMS has been a challenge because the printed film becomes non-uniform due to the uneven drying of the droplets. Therefore, a method of transfer printing was developed to embed carbon nanotubes uniformly in PDMS. The transfer printing method consists of first inkjet printing patterns of carbon nanotubes onto a PET film, which quickly absorbs the aqueous ink and allows uniformity of the printed carbon nanotube patterns. The next step is spin-coating PDMS on the PET film to cover the carbon nanotube patterns, followed by curing the PDMS. The following step is thermally treating the PET film to promote the transfer of carbon nanotubes to PDMS, and finally peeling off PDMS from PET film to complete the transfer of carbon nanotube patterns. The transferred patterns had widths as small as 125 µm, while the obtained PDMS thickness was as low as 27.1 µm, which enabled the fabrication of highly sensitive force and pressure sensors. The transfer printing method was employed to fabricate a two-dimensional force sensor, which was composed of lines of carbon nanotubes in the x and y directions. The transduction mechanism lies in the generation of strain on the carbon nanotube pattern. When strain is produced, the resistance of the pattern changes due to the increase or decrease of the number of conduction paths in the carbon nanotube pattern. The practical application as a two-dimensional sensor was shown by monitoring the touch force exerted by multiple objects on the sensor. Due to the flexibility and stretchability of PDMS, fabricated air pressure sensors were capable of detecting small pressure differences. The sensors were composed of a circular diaphragm containing inkjet-printed carbon nanotube patterns. When air pressure increased on one side of the diaphragm, the deflection caused a strain on the CNT line, thus changing its resistance. Pressure sensors with a diaphragm diameter of five millimeters, diaphragm thickness of 27.1 µm showed sensitivity of 10.99 percent change in resistance per kilopascal (%/kPa) and limit of detection of 3.1 Pa. The pressure sensor has potential applications in monitoring minute air pressure differences such as those generated by the breathing pattern. The application of the highly sensitive and biocompatible pressure sensor was shown through the measurement of the pressure generated by a 3D-printed respiratory system