Improvement of Tuning Fork Gyroscope Drive-mode Oscillation Matched using a Differential Driving Suspension Frame

This paper presents a novel design of a vibration tuning fork gyroscope (TFG) based on a differential driving suspension coupling spring between two gyroscopes. The proposed TFG is equivalent to a transistor differential amplifier circuit. The mechanical vibrations of driving frames are, therefore, well matched. The matching level depends on stiffness of spring. When three various TFG structures respond to differential stiffness of spring, their the driving frame mechanical vibration is well matched in case the input excitation driving differential phase is less than 3.5°, 2.5°, and 4°, respectively. The fabricated tuning fork gyroscope linearly operates in the range from -200 to +200 degree/s with the resolution of about 0.45 mV/degree/s

MEMS Gyroscopes for Consumers and Industrial Applications

none2mixedAntonello, Riccardo; Oboe, RobertoAntonello, Riccardo; Oboe, Robert

Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes

The objective of this research dissertation is to design and implement two novel micromachined silicon vibratory gyroscopes, which attempt to incorporate all the necessary attributes of sub-deg/hr noise performance requirements in a single framework: large resonant mass, high drive-mode oscillation amplitudes, large device capacitance (coupled with optimized electronics), and high-Q resonant mode-matched operation. Mode-matching leverages the high-Q (mechanical gain) of the operating modes of the gyroscope and offers significant improvements in mechanical and electronic noise floor, sensitivity, and bias stability. The first micromachined silicon vibratory gyroscope presented in this work is the resonating star gyroscope (RSG): a novel Class-II shell-type structure which utilizes degenerate flexural modes. After an iterative cycle of design optimization, an RSG prototype was implemented using a multiple-shell approach on (111) SOI substrate. Experimental data indicates sub-5 deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 30,000 at 23ºC (in vacuum). The second micromachined silicon vibratory gyroscope presented in this work is the mode-matched tuning fork gyroscope (M2-TFG): a novel Class-I tuning fork structure which utilizes in-plane non-degenerate resonant flexural modes. Operated under vacuum, the M2-TFG represents the first reported high-Q perfectly mode-matched operation in Class-I vibratory microgyroscope. Experimental results of device implemented on (100) SOI substrate demonstrates sub-deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 50,000 at 23ºC. In an effort to increase capacitive aspect ratio, a new fabrication technology was developed that involved the selective deposition of doped-polysilicon inside the capacitive sensing gaps (SPD Process). By preserving the structural composition integrity of the flexural springs, it is possible to accurately predict the operating-mode frequencies while maintaining high-Q operation. Preliminary characterization of vacuum-packaged prototypes was performed. Initial results demonstrated high-Q mode-matched operation, excellent thermal stability, and sub-deg/hr Allan variance bias instability.Ph.D.Committee Chair: Dr. Farrokh Ayazi; Committee Member: Dr. Mark G. Allen; Committee Member: Dr. Oliver Brand; Committee Member: Dr. Paul A. Kohl; Committee Member: Dr. Thomas E. Michael

Hardware Implementation of Active Disturbance Rejection Control for Vibrating Beam Gyroscope

Obtaining the approximation of rotation rate form a Z-Axis MEMS gyroscope is a challenging problem. Currently, most commercially available MEMS gyroscopes are operating in an open-loop for purposes of simplicity and cost reduction. However, MEMS gyroscopes are still fairly expensive and are not robust during operation. The purpose of this research was to develop a high-performance and low-cost MEMS gyroscope using analog Active Disturbance Rejection Control (ADRC) system. By designing and implementing analog ADRC both above requirements were satisfied. Analog ADRC provides the fastest response time possible (because the circuit is analog), eliminates both internal and external disturbances, and increases the bandwidth of the gyroscope beyond its natural frequency. On the other hand, the overall design is extremely economical, given that the system is built using pure active and passive analog components. This work, besides achieving high-performance and providing low-cost solution, furnishes two novel designs concepts. First, Active Disturbance Rejection Controller can now be build using pure analog circuit, which has never been done before. Second, it is the first time that the advanced controller has been successfully implemented in hardware to control an inertial rate sensor like gyroscope. This work provides a novel solution to applications that require high-performance and low-cost inertial sensor

Hardware Implementation of Active Disturbance Rejection Control for Vibrating Beam Gyroscope

Obtaining the approximation of rotation rate form a Z-Axis MEMS gyroscope is a challenging problem. Currently, most commercially available MEMS gyroscopes are operating in an open-loop for purposes of simplicity and cost reduction. However, MEMS gyroscopes are still fairly expensive and are not robust during operation. The purpose of this research was to develop a high-performance and low-cost MEMS gyroscope using analog Active Disturbance Rejection Control (ADRC) system. By designing and implementing analog ADRC both above requirements were satisfied. Analog ADRC provides the fastest response time possible (because the circuit is analog), eliminates both internal and external disturbances, and increases the bandwidth of the gyroscope beyond its natural frequency. On the other hand, the overall design is extremely economical, given that the system is built using pure active and passive analog components. This work, besides achieving high-performance and providing low-cost solution, furnishes two novel designs concepts. First, Active Disturbance Rejection Controller can now be build using pure analog circuit, which has never been done before. Second, it is the first time that the advanced controller has been successfully implemented in hardware to control an inertial rate sensor like gyroscope. This work provides a novel solution to applications that require high-performance and low-cost inertial sensor

Hardware Implementation of Active Disturbance Rejection Control for Vibrating Beam Gyroscope

Obtaining the approximation of rotation rate form a Z-Axis MEMS gyroscope is a challenging problem. Currently, most commercially available MEMS gyroscopes are operating in an open-loop for purposes of simplicity and cost reduction. However, MEMS gyroscopes are still fairly expensive and are not robust during operation. The purpose of this research was to develop a high-performance and low-cost MEMS gyroscope using analog Active Disturbance Rejection Control (ADRC) system. By designing and implementing analog ADRC both above requirements were satisfied. Analog ADRC provides the fastest response time possible (because the circuit is analog), eliminates both internal and external disturbances, and increases the bandwidth of the gyroscope beyond its natural frequency. On the other hand, the overall design is extremely economical, given that the system is built using pure active and passive analog components. This work, besides achieving high-performance and providing low-cost solution, furnishes two novel designs concepts. First, Active Disturbance Rejection Controller can now be build using pure analog circuit, which has never been done before. Second, it is the first time that the advanced controller has been successfully implemented in hardware to control an inertial rate sensor like gyroscope. This work provides a novel solution to applications that require high-performance and low-cost inertial sensor

High performance 3-folded symmetric decoupled MEMS gyroscopes

This thesis reports, for the first time, on a novel design and architecture for realizing inertial grade gyroscope based on Micro-Electro-Mechanical Systems (MEMS) technology. The proposed device is suitable for high-precision Inertial Navigation Systems (INS). The new design has been investigated analytically and numerically by means of Finite Element Modeling (FEM) of the shapes, resonance frequencies and decoupling of the natural drive and sense modes of the various implementations. Also, famous phenomena known as spring softening and spring hardening are studied. Their effect on the gyroscope operation is modeled numerically in Matlab/Simulink platform. This latter model is used to predict the drive/sense mode matching capability of the proposed designs. Based on the comparison with the best recently reported performance towards inertial grade operation, it is expected that the novel architecture further lowers the dominant Brownian (thermo-mechanical) noise level by more than an order of magnitude (down to 0.08º/hr). Moreover, the gyroscope\u27s figure of merit, such as output sensitivity (150 mV/º/s), is expected to be improved by more than two orders of magnitude. This necessarily results in a signal to noise ratio (SNR) which is up to three orders of magnitude higher (up to 1,900mV/ º/hr). Furthermore, the novel concept introduced in this work for building MEMS gyroscopes allows reducing the sense parasitic capacitance by up to an order of magnitude. This in turn reduces the drive mode coupling or quadrature errors in the sensor\u27s output signal. The new approach employs Silicon-on-Insulator (SOI) substrates that allows the realization of large mass (\u3e1.6mg), large sense capacitance (\u3e2.2pF), high quality factors (\u3e21,000), large drive amplitude (~2-4 µm) and low resonance frequency (~3-4 KHz) as well as the consequently suppressed noise floor and reduced support losses for high-performance vacuum operation. Several challenges were encountered during fabrication that required developing high aspect ratio (up to 1:20) etching process for deep trenches (up to 500 µm). Frequency Response measurement platform was built for devices characterization. The measurements were performed at atmospheric pressures causing huge drop of the devices performance. Therefore, various MEMS gyroscope packaging technologies are studied. Wafer Level Packaging (WLP) is selected to encapsulate the fabricated devices under vacuum by utilizing wafer bonding. Through Silicon Via (TSV) technology was developed (as connections) to transfer the electrical signals (of the fabricated devices) outside the cap wafers

Adaptive Control of a Vibratory Angle Measuring Gyroscope

This paper presents an adaptive control algorithm for realizing a vibratory angle measuring gyroscope so that rotation angle can be directly measured without integration of angular rate, thus eliminating the accumulation of numerical integration errors. The proposed control algorithm uses a trajectory following approach and the reference trajectory is generated by an ideal angle measuring gyroscope driven by the estimate of angular rate and the auxiliary sinusoidal input so that the persistent excitation condition is satisfied. The developed control algorithm can compensate for all types of fabrication imperfections such as coupled damping and stiffness, and mismatched stiffness and un-equal damping term in an on-line fashion. The simulation results show the feasibility and effectiveness of the developed control algorithm that is capable of directly measuring rotation angle without the integration of angular rate

Novel concept of a single-mass adaptively controlled triaxial angular rate sensor

This paper presents a novel concept for an adaptively controlled triaxial angular rate (AR) sensor device that is able to detect rotation in three orthogonal axes, using a single vibrating mass. Pedestrian navigation is presented as an example demonstrating the suitability of the proposed device to the requirements of emerging applications. The adaptive controller performs various functions. It updates estimates of all stiffness error, damping and input rotation parameters in real time, removing the need for any offline calibration stages. The parameter estimates are used in feedforward control to cancel out their otherwise erroneous effects, including zero-rate output: The controller also drives the mass along a controlled oscillation trajectory, removing the need for additional drive control. Finally, the output of the device is simply an estimate of input rotation, removing the need for additional demodulation normally used for vibratory AR sensors. To enable all unknown parameter estimates to converge to their true values, the necessary. model trajectory is shown to be a three-dimensional Lissajous pattern. A modified trajectory algorithm is presented that aims to reduce errors due to discretization of the continuous time system. Simulation results are presented to verify the operation of the adaptive controller. A finite-element modal analysis of a preliminary structural design is presented. It shows a micro electro mechanical systems realizable design having modal shapes and frequencies suitable for implementing the presented adaptive controller