Skip to main content
Article thumbnail
Location of Repository

Manufacturing of high-precision optical coatings using cylindrical cathodes in a sputter-up configuration

By D. Rademacher, S. Kreher and M. Vergöhl

Abstract

Sputtering of high-precision optical coatings with a large number of layers as well as high precision has always been a challenging task due to insufficient long term stability of reactive sputtering processes. In previous solutions planar targets have been used that suffered from inhomogeneous surface leading to higher material cost, increased tendency to arcing and particle generation. In the present paper an approach is presented that overcomes the challenge of planar magnetrons. A rotating pattern coater is equipped with two dual cylindrical magnetrons in a sputter-up configuration. Simulated gas flows as well as material distributions are presented. Thin films prepared by metallic sputtering and plasma oxidization (metamode) as well as reactive MF-sputtering are investigated. Properties such as stress, optical density and surface roughness of Ta<sub>2</sub>O<sub>5</sub> and SiO<sub>2</sub> are discussed

Topics: sputter, sputtering, cylindrical, optical, precision, coating, magnetron, target, particle
Year: 2012
OAI identifier: oai:fraunhofer.de:N-225478
Provided by: Fraunhofer-ePrints
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • http://publica.fraunhofer.de/d... (external link)
  • Suggested articles


    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.