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Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology
Authors
刘武
吴校生
+6 more
孟坤
崔峰
张卫平
李洪谊
迟鹏程
陈文元
Publication date
1 January 2011
Publisher
Abstract
为研制一种轻质仿昆虫微扑翼飞行器,提出了采用微机电系统(MEMS)领域的SU-8光刻胶作为结构材料的制作方案.基于仿生学原理和微机电系统加工技术,设计微扑翼飞行器结构及MEMS工艺方法.研究结果表明,该种结构设计及制作方案满足设计要求,为仿昆虫微扑翼飞行器的研制提供了一种很好的途径
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Shenyang Institute of Automation,Chinese Academy Of Sciences
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Last time updated on 12/02/2018