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Fully dense, non-faceted 111-textured high power impulse magnetron sputtering TiN films grown in the absence of substrate heating and bias
Authors
Baumann
Bohlmark
+34 more
Bohlmark
Chen
Chou
Chun
Cyster
Gagnon
Gall
Greene
Hakansson
Hala
Helmersson
Hoffman
Hultman
Hultman
Hübler
J.E. Greene
Kouznetsov
Ljungcrantz
M. Lattemann
Mukherjee
Muller
Müller
Patsalas
Petrov
Petrov
Petrov
Petrov
Rebenne
Rossnagel
Sundgren
Toth
U. Helmersson
Wall
Warrender
Publication date
Publisher
'Elsevier BV'
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Last time updated on 01/04/2019