Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition and single-crystal diamond micro tools

Abstract

Insufficient experimental data from various micro tools limit industrial application of the micromilling process. This paper presents an experimental comparative investigation into micromilling of oxygen-free, high-conductivity copper using tungsten carbide (WC), chemistry vapour deposition (CVD) diamond, and single-crystal diamond micromilling tools at a uniform 0.4mm diameter. The experiments were carried out on an ultra-precision micromilling machine that features high dynamic accurate performance, so that the dynamic effect of the machine tool itself on the cutting process can be reduced to a minimum. Micromachined surface roughness and burr height were characterized using white light interferometry, a scanning electron microscope (SEM), and a precision surface profiler. The influence of variation of cutting parameters, including cutting speeds, feedrate, and axial depth of cut, on surface roughness and burr formation were analysed. The experimental results show that there exists an optimum feedrate at which best surface roughness can be achieved. Optical quality surface roughness can be achieved with CVD and natural diamond tools by carefully selecting machining conditions, and surface roughness, Ra, of the order of 10nm can also be obtained when using micromilling using WC tools on the precision micromilling machine.EU FP6 MASMICRO projec