本文阐明微波腔体用于工业检测湿度、温度、厚度、速度、材料电磁参数等的基本原理.综述近年来在测量湿度、速度、材料电磁特性及半导体材料电阻率、非平衡载流子寿命等的应用.OThe basic principle of moisture, temperature, thickness, speed and material parameter measurements using the microwave cavity is explained in this paper.Moisture, speed, material electromagnetic property, semiconductor material resistivity measurements in recent industrial applications are also summarized
