Biosensing microsystem platforms based on the integration of Si Mach-Zehnder interferometer, microfluidics and grating couplers

8 páginas, 7 figuras.-- Trabajo presentado en la conferencia "Silicon Photonics IV", 26-Enero-2009, San Jose, CA, USA; Editores: Joel A. Kubby, Graham T. Reed.We have achieved the design, fabrication and packaging of microfluidic networks with photonic sensors for novel labon- chip platforms which incorporate the on-chip biosensing detection. As sensors, we used an integrated Mach-Zehnder interferometer (MZI) based on TIR waveguides (Si/SiO2/Si3N4) of micro/nanodimensions for evanescent field detection of biomolecular interactions onto the sensing areas. For the lab-on-a-chip development, the biosensors have been integrated with a 3D microfluidic polymer network. In addition, we have developed a novel hybrid device for coupling light into the waveguides of the Mach-Zehnder sensor. The coupling hybrid device is composed of a thin film of diffraction gratings fixed to a polydimethylsiloxane film. The optical characterization has shown the excellent compatibility and integration between fabrication technologies of silicon MZI, SU-8 polymer microfluidic network and mountable grating couplers.Authors would like to thank the financial support of the Spanish Ministry of Education and Science (project TEC2005- 13604) and M. Botín Foundation.Peer reviewe