CHOCLAB II - Standardisierte Optik- und Laserstrahlcharakterisierung. Teilvorhaben: Charakterisierung der Altersbestaendigkeit von Fluoriden Abschlussbericht

SIGLEAvailable from TIB Hannover: F04B220 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman

Triorganophosphine-dithiomonometaphosphoryl halides

The title compounds, ethyldiphenylphosphine- dithiomonometaphosphoryl chloride, EtPh2P --> PS2Cl, C14H15ClP2S2, (I), and tris-n-propylphosphine- dithiomonometaphosphoryl chloride and bromide, (Pr3P)-Pr-n --> PS2Cl, C9H21ClP2S2, (II), and nPr(3)P --> PS2Br, C9H21BrP2S2, (III), respectively, are the first phosphine-stabilized dithiomonometaphosphoryl halides to be structurally characterized. In the tris-n-propylphosphine derivatives, the central P --> P donor-acceptor bond becomes longer in the order bromo P bond. These structural features agree with the observed 31 P NMR data. In (II) and (III), the central P-P bond coincides with the crystallographic threefold axis, entailing site- occupational disorder for the S2Y group

Triorganophosphine-dithiomonometaphosphoryl halides

The title compounds, ethyldiphenylphosphine- dithiomonometaphosphoryl chloride, EtPh2P --> PS2Cl, C14H15ClP2S2, (I), and tris-n-propylphosphine- dithiomonometaphosphoryl chloride and bromide, (Pr3P)-Pr-n --> PS2Cl, C9H21ClP2S2, (II), and nPr(3)P --> PS2Br, C9H21BrP2S2, (III), respectively, are the first phosphine-stabilized dithiomonometaphosphoryl halides to be structurally characterized. In the tris-n-propylphosphine derivatives, the central P --> P donor-acceptor bond becomes longer in the order bromo < chloro < fluoro. Substitution of the tris-n- propylphosphine group in (II) by the more bulky ethyldiphenylphosphine group also leads to a longer P --> P bond. These structural features agree with the observed 31 P NMR data. In (II) and (III), the central P-P bond coincides with the crystallographic threefold axis, entailing site- occupational disorder for the S2Y group

Long term tests of resonator optics in ArF excimer lasers

The aim of this work is the optimization of the resonator optics of excimer laser systems to achieve longer lifetimes and to reduce the cost of ownership. The degradation after long-term exposure to high photon fluxes (typically 80 mJ/cm2) at the ArF laser wavelength of 193 nm was analyzed. Based on the investigations, a model describing the process of the deterioration of the out-coupling partial reflector was developed. It was found that contamination of the optics by the laser's discharge electrodes leads to absorption losses on the surface facing the inside of the resonator. As a consequence, the laser irradiation causes a temperature gradient in the CaF2-substrates which leads to crystal cleavage and braking of the optics. Defects on the outward surface are the origin for the growth of Calcite crystals and organic compounds by photo induced chemical reactions of the substrate material and contaminations in the purge gas. It was demonstrated that the lifetime of the resonator optics can be substantially increased by adapted optical designs and coatings