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1 research outputs found
Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit
Author
Abadal G.
Boisen Anja
+11聽more
Borris茅 X.
Campabadal F.
Davis Zachary James
Esteve J.
Figueras Costa E.
Fors茅n Esko Sebastian
Perez-Murano F.
Teva J.
Uranga A.
Verd J.
Villaroya Gaud贸 M.
Publication venue
Publication date
01/01/2005
Field of study
No full text
Online Research Database In Technology
No full text
