Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit

Authors
Publication date
1 January 2005
Publisher

Abstract

Abstract is not available.

    Similar works

    Full text

    thumbnail-image

    Available Versions

    Online Research Database In Technology

    redirect
    oaioai:pure.atira.dk:publications...
    Last time updated on 22/08/2013