A 286nW, 103V High Voltage Generator and Multiplexer for Electrostatic Actuation in Programmable Matter

International audienceWe present a high-voltage-generation-and-multiplexing (HVGM) chip, specifically designed for electrostatic actuation of micro-robots. It can individually control 12 pairs of +/- electrodes using a positive and negative charge pump and mux-structure, consumes 286nW in steady state and 533nW when transitioning a 10pF electrode at 155V/s, and produces a differential voltage of 103V (29× voltage gain from 3.6V) in measurement. We also show a complete microsystem of stacked die, measuring 3×1.4×1.1mm, including HVGM, processor, radio, and harvester for energy autonomous operation