- Publication venue
- Elsevier BV, North-Holland
- Publication date
- 15/12/2007
- Field of study
- Publication venue
- 'Materials Science and Engineering'
- Publication date
- Field of study
- Publication venue
- Materials Science in Semiconductor Processing: Pergamon
- Publication date
- Field of study
- Publication venue
- Materials Science in Semiconductor Processing: Pergamon
- Publication date
- Field of study