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    43 research outputs found

    Micromechanical resonator

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    VTT Research System

    Micromechanical resonator

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    VTT Research System

    High-Q micromechanical resonators for mass sensing in dissipative media

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    'IOP Publishing'
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    VTT Research System

    Manufacturing and applications of surface-micromachined and SOI-based cMUTs

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    ESAOTE
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    VTT Research System

    Manufacturing and applications of surface-micromachined and SOI-based cMUTs

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    ESAOTE
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    VTT Research System

    Temperature compensated compound resonator

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    VTT Research System

    Temperature compensated plate resonator

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    VTT Research System

    Manufacturing and applications of surface-micromachined and SOI-based cMUTs

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    ESAOTE
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    No full text
    VTT Research System

    Temperature compensated compound resonator

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    VTT Research System
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