Plasma Nitridation of 4H-SiC by Glow Discharge of N2/H2 Mixed Gases

The mixed gas of nitrogen and hydrogen was used for the plasma nitridation of SiC surface.A small amount of hydrogen was effective to activate the nitridation reaction and suppress the oxidationreaction. The interface properties were improved by using nitride layer as an interfacial bufferlayer of SiC MIS structure.ArticleMaterials Science Forum, Vols. 821-823, pp. 504-507 (2015)journal articl

Preparation and Characterization of Nitridation Layer on 4H SiC (0001) Surface by Direct Plasma Nitridation

A nitride layer was formed on a SiC surface by plasma nitridation using pure nitrogen as the reaction gas at the temperature from 800°C to 1400°C. The surface was characterized by XPS. The XPS measurement showed that an oxinitride layer was formed on the SiC surface by the plasma nitridation. The high process temperature seemed to be effective to activate the niridation reaction. A SiO2 film was deposited on the nitridation layer to form SiO2/nitride/SiC structure. The interface state density of the SiO2/nitride/SiC structure was lower than that of the SiO2/SiC structure. This suggested that the nitridation was effective to improve the interface property.ArticleMaterials Science Forum, Vols. 778-780, pp. 631-634 (2014)journal articl

Fibrosarcomatous variant of dermatofibrosarcoma protuberans on the right cheek: A case report

A 52-year-old man presented with a subcutaneous mass on his right cheek. The tumor was resected. Histopathological examination of the resected tissue revealed fibrosarcomatous deromatofibrosarcoma protuberans (FS-DFSP). Since the resection resulted in a large skin defect, his cheek was reconstructed using a deep inferior epigastric artery perforator flap (DIEP). As the pathological findings showed positivity for tumor cells at the excised end, radiation therapy was applied to his right cheek. FS-DFSPs are found in about 10% of all DFSP cases, and are more malignant than other types of DFSP. Because there is a risk of local recurrence or distant metastasis, the patient should undergo close, long-term observation