Strain state in Mn-implanted silicon annealed at high temperature

In this work an influence of thermal annealing of Mn-implanted silicon on strain state of silicon matrix is presented. During post-implantation annealing, nanocrystalline tetragonal Mn4Si7 compound is formed. A strong correlation between the size of nanoinclusions and the matrix strain state is detected

Defects in high temperature and high pressure processed Si:N revealed by deuterium plasma treatment

Deuterium is accumulated by defects in nitrogen-implanted silicon (Si:N). This effect is investigated for Si:N processed at HT ≤ 1400 K, also under enhanced hydrostatic pressure, HP ≤ 1.1 GPa. Si:N was prepared from Czochralski grown silicon by N₂⁺ implantation at E = 140 keV with nitrogen doses, DN = 1–1.8•10¹⁸ cm⁻². Si:N was subsequently processed in RF deuterium plasma to prepare Si:N,D. Si:N and Si:N,D were investigated by Transmission Electron Microscopy (TEM), X-ray and Secondary Ion Mass Spec- trometry (SIMS) methods, also after additional annealing at 723 K. In heavily implanted Si:N (DN = 1.8•1010¹⁸ cm⁻²), plasma treatment leads to deuterium pile up to сD1 = 2•10²¹ cm⁻³ at a depth, d = 50 nm, while, at d = 80–250 nm, deuterium concentration is practically constant with сD2 = 1•10²¹ cm⁻³. This suggests dominating accumulation of deuterium within the bubble-containing areas. Determination of deuterium depth profiles in Si:N,D can reveal implantation- and processing-induced defects.В работе рассмотрены эффекты влияния обработки температурным отжигом (до 1400 K) и гидростатическим давлением (до 1.1 GPa) на дефектный состав SOI-структур (silicon-on-insulator) на основе образцов Si:N – материала, широко используемого в полупроводниковых технологиях. Были получены новые данные, свидетельствующие об образовании скрытых дефектосодержащих слоев в образцах кремния, имплантированного азотом, и подвергнутых обработке высокими температурами и давлениями. Такие структуры становятся центрами абсорбции дейтерия из плазмы – его накопление и распределение внутри образца зависят от микроструктуры материала. Таким образом, показано, что обработка в дейтериевой плазме с дальнейшим определением концентрационных профилей по глубине образца может быть полезной для оценки микроструктурыУ роботі розглянуто ефекти впливу обробки температурним відпалом (до 1400 K) і гідростатичним тиском (до 1.1 GPa) на дефектний склад SOI-структур (silicon-oninsulator) на основі зразків Si:N – матеріалу, широко використовуваного в напівпровідникових технологіях. Було отримано нові дані, що свідчать про утворення прихованих дефектовміщуючих шарів в зразках кремнію, імплантованого азотом, підданих обробці високими температурами та тиском. Такі структури стають центрами абсорбції дейтерію з плазми – його накопичення і розподіл усередині зразка залежать від мікроструктури матеріалу. Таким чином, показано, що обробка в дейтерієвій плазмі з подальшим визначенням концентраційних профілів по глибині зразка може бути корисною для оцінки мікроструктури Si:N-зразка, особливо зважаючи на потенційну застосовність в SOI-технологіях

Defects in silicon heat-treated under uniform stress and irradiated with fast neutrons

Silicon samples of initial oxygen concentration [O 17 cm -3 were subjected to various high temperature-high pressure (HT-HP) treatments in the temperature range 900-1050 °C. Afterwards, the samples were irradiated by fast neutrons and then isothermally annealed at 400 °C. Infrared spectroscopy, X-ray diffraction, transmission electron microscopy (TEM), optical spectroscopy and selective etching measurements were performed. Besides the precipitates and the dislocation loops that usually form, small defect clusters were also detected in the samples. The presence of these clusters is revealed due to their decoration with radiation induced point defects, and attributed to the HP treatment

Defect structure of Czochralski silicon co-implanted with helium and hydrogen and treated at high temperature - pressure

Effect of stress created by Ar hydrostatic pressure (HP) up to 1.1 GPa during annealing at the high temperature (HT) 1070 K (HT-HP treatment) on microstructure of Czochralski grown silicon co-implanted with helium and hydrogen Si:(He,H) using the same doses of He+ and H₂+ (DH,He= 5·10¹⁶ cm⁻², at energy 50 and 150 keV, respectively) was investigated by means of X-ray (synchrotron) diffraction, transmission electron microscopy, and electrical measurements. The nanostructured sponge-like buried layers are formed in Si:(He,H) by annealing / high pressure treatment. Decreased interference, diffuse scattering and individual contrast are observed in the synchrotron topograms for HT-HP treated Si:(He,H). The treatment at 723 K and HP results in an additional donor formation as a sequence of the implantation-disturbed layer. The HP-mediated (retarded) out-diffusion of hydrogen and helium is in part responsible for the effects observed

Structural and magnetic properties of GaMnAs layers with high Mn content grown by Migration Enhanced Epitaxy on GaAs(100) substrates

We have grown the ferromagnetic semiconductor GaMnAs containing up to 10% Mn by migration enhanced epitaxy at a substrate temperature of 150^oC. The alternate supply of As2 molecules and Ga and Mn atoms made it possible to grow single crystalline GaMnAs layers at very low substrate temperature, at which conventional molecular beam epitaxial growth under excess As supply is not possible due to As condensation. Secondary ion mass spectroscopy and X-ray diffraction measurements confirmed a higher Mn content in the films grown by this method in comparison to the GaMnAs layers grown by low temperature molecular beam epitaxy. The lattice constant of hypothetical zinc-blende structure MnAs is determined to be 5.9 \AA, which deviates somewhat from previously reported values. This deviation is ascribed to growth-condition dependent density of point defects. It is stressed that this effect must be taken into account for any assessment of Mn content from X-ray diffraction data. Magnetization measurements showed an onset of ferromagnetic ordering around 75 K for the GaMnAs layer with 10% Mn. This means that the trend of falling Curie temperatures with increasing Mn concentrations above 5.5% is broken. We tentatively assign this to the variation of the carrier concentration, including contributions from donor and acceptor centers formed by antisite defects and Mn doping, and increased density of magnetically active Mn ions.Comment: No LaTeX source; gzipped postscript text + 3 gzipped postscript figure

Pressure-induced structural transformations in Si:V and Si:V, Mn

Semiconductors doped with magnetically active atoms are expected to find application in spintronics. Si samples implanted with Mn⁺ (Si:Mn) or with V⁺ (Si:V) can order magnetically after processing at high temperature (HT) and also under enhanced hydrostatic pressure (HP). This work presents new results on structure-related properties of single crystalline Si implanted at 200 keV with V⁺ as well as that co-implanted additionally with Mn⁺ ions (Si:V, Mn), with dosages DV⁺ ≤ 5·10¹⁵ cm⁻² and DMn⁺ = 1·10¹⁵ cm⁻². The samples were processed for 1–5 h at HT ≤ 1270 K under HP ≤ 1.1 GPa. Secondary Ion Mass Spectrometry, Transmission Electron Microscopy, X-ray and related methods were applied for sample characterization. The HT- (HP) treatment affects, among others, solid phase epitaxial re-growth (SPER) of amorphous silicon created at implantation and distribution of implanted species

Structure perfection variations of Si crystals grown by Czochralski or floating zone methods after implantation of oxygen or neon atoms followed by annealing

Structure perfection of the silicon crystals grown by the Czochralski and floating zone methods after implantation with oxygen or neon fast iones followed by annealing at the temperatures T ~ 1050-1150 ⁰0C, when large SiOx precipitates were formed, was studied by means of various X-ray diffraction methods. Considerable increments of integral reflectivities for different Bragg reflections of such samples in comparison with those calculated for a perfect crystal were detected. Broadening of the spatial intensity distribution curves for the Bragg-diffracted beams taken by a single crystal spectrometer as well as the maps of the diffuse isointensity distribution near a reciprocal lattice point, registered by the Philips high-resolution diffractometer, are shown. All of these diffraction effects related to creation of the SiOx precipitates formed on structural damages caused by implantation of oxygen or neon ions and subsequent annealing. Contrary to FZSi, where the appearence of SiOx precipitates was discovered due to intensive diffuse scattering near the layer contained the implanted oxygen ions only, in the case of CZSi samples with larger concentration of oxygen (up to 1*10¹⁸ at/cm³) such defects were formed not only near the burried layer, created by ions of oxygen or neon (with energy E = 4 MeV, dose 10¹⁴cm⁻²) but in a bulk of a crystal. Annealing of the FZSi crystals implanted by oxygen (E ~ 200 keV, dose ~ 10¹⁶-10¹⁷ cm⁻²) at enhanced hydrostatic pressure, additionally stimulated SiOx precipitation close to the implanted layer

Defects in high temperature-pressure treated Czochralski silicon detected by photoluminescence and related methods

Defects in oxygen-containing Czochralski silicon (Cz-Si) subjected to 2-steps pre-annealing at 720–1000 K under 105 Pa and next treated at 1170–1400 K (HT) under high hydrostatic pressure (HP, up to 1.2 GPa) were investigated by photoluminescence, infrared absorption and related methods. Microstructure of HT − HP treated Cz-Si is critically dependent on nucleation centres for oxygen precipitation created by pre-annealing