CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Filters
2 research outputs found
Accurate mask model implementation in optical proximity correction model for 14-nm nodes and beyond
Author
Armeanu Ana-Maria
Bork Ingo
+8 more
Buck Peter
Chomat Michael
Farys Vincent
Huguennet Frederic
Schanen Isabelle
Sundermann Frank
Yesilada Emek
Zine el abidine Nacer
Publication venue
Society of Photo-optical Instrumentation Engineers
Publication date
01/04/2016
Field of study
No full text
International audienc
Hal - Université Grenoble Alpes
HAL Université de Savoie
HAL-CEA
Accurate mask model implementation in OPC model for 14nm nodes and beyond
Author
Armeanu Ana-Maria
Bork Ingo
+10 more
Buck Peter
Chomat Michael
Farys Vincent
Hayashi Naoya
Huguennet Frederic
Kasprowicz Bryan
Schanen Isabelle
Sundermann Frank
Yesilada Emek
Zine el abidine Nacer
Publication venue
HAL CCSD
Publication date
23/10/2015
Field of study
No full text
International audienc
Hal - Université Grenoble Alpes
HAL Université de Savoie
HAL-CEA