1 research outputs found

    NORD-pie - Piezoelectric micro-electromechanical systems for Nordic industry

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    NORD-pie will form the basis for a qualified piezo-MEMS service including feasibility studies, design and production. The project will demonstrate the availability of small scale and high quality industrial fabrication of piezoelectric MEMS devices in the Nordic countries. NORD-pie aims to provide piezoelectric thin film technology to Nordic industr
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