10 research outputs found

    Oxygen-induced generation of electronic traps at the SiO2-Si interface

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    Oxygen added to the annealing ambient influences the anneal kinetics of interface traps at the silicon oxide-silicon interface. After an initial decrease the interface trap density vs. time curve shows an increase dependent on the amount of oxygen present in the tube atmosphere and on the annealing temperature

    Characterization of ultrathin on stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride

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    In this study, a stable process for fabrication of dielectric dual layers consisting of a low pressure thermal oxide layer and a deposited nitride layer for gate dielectric applications was established. The ON (oxide nitride) dual layers were compared to silicon oxide layers up to 5 nm thickness thermally grown in oxygen and nitrous oxide atmosphere at low pressure in a low pressure chemical vapor deposition (LPCVD) hot wall system and in a rapid thermal processing (RTP) system, respectively. The single and dual layers were electrically characterized using MOS devices. Current transport through the ultrathin dielectric layers was systematically investigated. It was shown that the current flow through oxides thinner than 4 nm is controlled by direct tunneling, while Fowler-Nordheim tunneling predominates in transport through layers thicker than 4 nm. Examinations of ON layers of different nitride thickness revealed that lower UFB values and a higher electron trapping efficiency were obt ained for thicker nitride films. Furthermore, the current-voltage characteristics shifted to lower voltage values with decreasing bottom oxide thickness and also with decreasing effective oxide thickness. Finally, low QBD values of ON layers for effective oxide thicknesses less than 5 nm were obtained

    Reliability of metal-oxide-semiconductor capacitors on nitrogen implanted 4 H-silicon carbide

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    4H-SiC epitaxial layers were implanted with nitrogen up to doses of 1x1015 cm-2 and annealed at different temperatures. Atomic force microscopy revealed that the roughness of the SiC surface increased with the annealing temperature. It was shown that the oxide grows thicker on substrates with doping levels exceeding 1x1018 cm-3. The barrier height at the SiC/SiO2 interface, determined by voltage ramping on metal-oxide-semiconductor capacitors, decreased with increasing implantation dose. This decrease was attributed to residual implantation damage. Constant current injection experiments revealed an opposite charge buildup at the SiC/SiO2 interface for the highest implantation dose compared to samples with no implantation. It was shown that the breakdown behavior can be improved by annealing at 1700 degrees C compared to 1450 degrees C despite a higher surface roughness

    Mikrosystemtechnisch hergestelltes Sensorsystem zur Klimadatenerfassung (A-Haus). Teilvorhaben: Sensorik und Kalibrierung Abschlussbericht

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    Advances in the miniaturization of devices lead to smaller and cheaper sensors for different applications. Embedded systems also offer the possibility to communicate over standardized interfaces within an electronic network. In this paper we describe, how these technologies can be applied to an intelligent Weather Station not larger than a cup. This Weather Station is e.g. needed for an optimized energy saving management of large buildings in regard of heating and air conditioning. Using modern building management systems, heating of private and office buildings can be optimized for lower energy consumption. These days heating systems are controlled by the input of the outdoor temperature of air measured at the north side of the building. However, the thermal loss of a building is determined by more parameters. Our weather system consists of a solar radiometer, a rain detector (only qualitative), a hygrometer, a thermometer and a wind gauge. All meteorological data are monitored automatically and made available to the building management system over a digital interface like EIB. (orig.)Im Zentrum der betrachteten Loesungsansaetze standen kostenguenstige Loesungen und es musste eine geraetetechnische Ausfuehrung einbezogen werden. Es galt die am Markt vorhandenen dezentralen Wetterstationen der Gebaeudeautomatisierung durch eine kompakte zu ersetzen. Um diese geometrisch moeglichst klein und kompakt gestalten zu koennen, kamen Techniken der Mikrosystemtechnik zum Einsatz. Gegenstand der sensorischen Entwicklung war der Feuchtesensor und der kombinierte Windgeschwindigkeits- und Windrichtungssensor. Beim Feuchtesensor kam eine IDK-Struktur mit feuchteempfindlichem Polyimid zur Anwendung, bei der Windgeschwindigkeitsmessung fand ein 'thermischer Oszillator' seine Verwendung, der ein der Windgeschwindigkeit proportionales digitales Ausgangssignal liefert und bei der Windrichtungsmessung eine vektorielle Analogschaltung. Die Strahlungsleistungsdichtemessung erfolgt bei der realisierten Loesung mit zwei Fotodioden, die eine unterschiedliche spektrale Empfindlichkeit haben. Der Niederschlagssensor ist ein rein digitaler Sensor, mit dem nur das Vorhandensein von Niederschlag erkannt werden kann. Die erforderliche Schaltungsanordnung zur Auswertung des Sensorsignals basiert auf einem Laufzeitvergleich zwischen dem kapazitiven Niederschlagssensor und einem Referenzzweig. Kern des Sensorsystems zur Klimadatenerfassung ist ein Mikrocontroller ADuC 812, in dem die Messwertverarbeitung und die Speicherung der Kalibrierfunktionen erfolgt. Mit Potenzreihen 3. Ordnung wird der nichtlinearen Charakter des Feuchtefuehlers, des Windsensors und der Temperaturmessschaltung hinreichend beschrieben. An die jeweiligen Eingaenge dieses Mikrocontrollers sind die einzelnen Sensoren mit dem zugehoerigen Interface angeschlossen. Dieses fuer die einzelnen klimarelevanten Messgroessen benoetigte Sensorinterface ist aus Gruenden der Kostenminimierung und eines geringen Eigenenergieverbrauchs sehr einfach ausgefuehrt worden. Ueber eine angeschlossene Schnittstelle werden die klimarelevanten Messwerte einheitengerecht gemaess SI ausgegeben. (orig.)Available from TIB Hannover: F02B1922 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung und Forschung, Berlin (Germany)DEGerman

    Mesa-Passivierung Abschlussbericht

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    Available from TIB Hannover: FR 5361(2)+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

    Adherence to treatment in allergic rhinitis using mobile technology. The MASK Study

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    Background: Mobile technology may help to better understand the adherence to treatment. MASK-rhinitis (Mobile Airways Sentinel NetworK for allergic rhinitis) is a patient-centred ICT system. A mobile phone app (the Allergy Diary) central to MASK is available in 22 countries.Objectives: To assess the adherence to treatment in allergic rhinitis patients using the Allergy Diary App.Methods: An observational cross-sectional study was carried out on all users who filled in the Allergy Diary from 1 January 2016 to 1 August 2017. Secondary adherence was assessed by using the modified Medication Possession Ratio (MPR) and the Proportion of days covered (PDC) approach.Results: A total of 12143 users were registered. A total of 6949 users reported at least one VAS data recording. Among them, 1887 users reported >= 7 VAS data. About 1195 subjects were included in the analysis of adherence. One hundred and thirty-six (11.28%) users were adherent (MPR >= 70% and PDC = 70% and PDC = 1.50) and 176 (14.60%) were switchers. On the other hand, 832 (69.05%) users were non-adherent to medications (MPR <70%). Of those, the largest group was non-adherent to medications and the time interval was increased in 442 (36.68%) users.Conclusion and clinical relevance: Adherence to treatment is low. The relative efficacy of continuous vs on-demand treatment for allergic rhinitis symptoms is still a matter of debate. This study shows an approach for measuring retrospective adherence based on a mobile app. This also represents a novel approach for analysing medication-taking behaviour in a real-world setting.Public Health and primary carePrevention, Population and Disease management (PrePoD

    Allergic Rhinitis and its Impact on Asthma (ARIA) Phase 4 (2018): Change management in allergic rhinitis and asthma multimorbidity using mobile technology

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    Allergic Rhinitis and its Impact on Asthma (ARIA) has evolved from a guideline by using the best approach to integrated care pathways using mobile technology in patients with allergic rhinitis (AR) and asthma multimorbidity. The proposed next phase of ARIA is change management, with the aim of providing an active and healthy life to patients with rhinitis and to those with asthma multimorbidity across the lifecycle irrespective of their sex or socioeconomic status to reduce health and social inequities incurred by the disease. ARIA has followed the 8-step model of Kotter to assess and implement the effect of rhinitis on asthma multimorbidity and to propose multimorbid guidelines. A second change management strategy is proposed by ARIA Phase 4 to increase self-medication and shared decision making in rhinitis and asthma multimorbidity. An innovation of ARIA has been the development and validation of information technology evidence-based tools (Mobile Airways Sentinel Network [MASK]) that can inform patient decisions on the basis of a self-care plan proposed by the health care professional.Public Health and primary carePrevention, Population and Disease management (PrePoD
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