КОНСТРУИРОВАНИЕ ГАЗОВЫХ МИКРОСИСТЕМ НА ОСНОВЕ НАНОПОРИСТОГО АНОДНОГО ОКСИДА АЛЮМИНИЯ

Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations. Установлено влияние пористости подложки из анодного оксида алюминия на основные параметры 4-сенсорной газовой микросистемы. В расчетах использованы зависимости компонентов тензоров модуля упругости и теплопроводности от пористости для α-Al2O3, полученные методом конечных элементов.

ЧЕТЫРЕХСЕНСОРНАЯ ГАЗОВАЯ МИКРОСИСТЕМА НА ПОДЛОЖКЕ ИЗ ПОРИСТОГО АНОДНОГО ОКСИДА АЛЮМИНИЯ: КОНСТРУКЦИЯ, ТЕХНОЛОГИЯ, МОДЕЛИРОВАНИЕ

Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt'>боты микросистемы.Разработаны конструкция и технология создания 4-сенсорной газовой микросистемы, изготавливаемой на подложках из нанопористого анодного оксида алюминия. Методом конечных элементов проведено моделирование температуры основных ее элементов и термомеханических деформаций, возникающих в конструкции при различных режимах работы микросистемы

A continual approach to Van der Waals interactions in carbon nanotube based systems

Ordered arrays of carbon nanotubes (CNT) are promising elements of nanoelectromechanical systems based on transformation of electromagnetic fields into mechanical motion. Simulation of these phenomena accounting various nonlinear interactions can be realized on the basis of macroelectrodynamics of moving media, theory of elasticity and van der Waals interactions’ phenomenological theory. The balance equations of mass, momentum, angular momentum and energy as well as entropy inequality describing interacting continua of the mass, electric charge and internal spin are presented. To include van der Waals forces the additional terms are introduced into these equations which transform the system into indegro- differencial one. It is shown that integral terms can be neglected if the gap between tubes is greater than CNT outer diameter. The occurrence of multiple resonant vibrations of ordered CNT arrays is characteristic of them. Solving the system numerically the essential influence of van der Waals forces on CNT array resonant frequencies was proved

APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN

Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations

FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION

Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt'>боты микросистемы

Ring gyroscope sensitive element based on nanoporous alumina

The paper aims to present new technological approaches of manufacturing of micromechanical gyroscope ring-sensitive element based on the nanoporous anodic alumina instead of traditional silicon technology. Simulation and the operation analyses of such elements have been performe