43 research outputs found

    ๊ตญ์†Œ ๋ฐ ๋น„๊ตญ์†Œ ์ธก๋„ ๋ฐ์ดํ„ฐ ๋ฌธ์ œ์˜ ์ •์น™์„ฑ ์ด๋ก 

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    ํ•™์œ„๋…ผ๋ฌธ(๋ฐ•์‚ฌ) -- ์„œ์šธ๋Œ€ํ•™๊ต๋Œ€ํ•™์› : ์ž์—ฐ๊ณผํ•™๋Œ€ํ•™ ์ˆ˜๋ฆฌ๊ณผํ•™๋ถ€, 2023. 2. ๋ณ€์ˆœ์‹.In this thesis, we establish various regularity results for nonlinear measure data problems. The results obtained are part of a program devoted to nonlinear Calderรณn-Zygmund theory and nonlinear potential theory. Firstly, we obtain maximal integrability and fractional differentiability results for elliptic measure data problems with Orlicz growth and borderline double phase growth, respectively. We also obtain fractional differentiability results for parabolic measure data problems under a minimal assumption on the coefficients. Secondly, we obtain gradient potential estimates and fractional differentiability results for elliptic obstacle problems with measure data, by using linearization techniques. In particular, we develop a new method to obtain potential estimates for irregular obstacle problems. For the case of single obstacle problems with Lยน-data, we further obtain uniqueness results and comparison principles in order to improve such regularity results. Lastly, we show existence, regularity and potential estimates for mixed local and nonlocal equations with measure data. Also, as a first step to the regularity theory for anisotropic nonlocal problems with nonstandard growth, we establish Hรถlder regularity for nonlocal double phase problems by identifying sharp assumptions analogous to those for local double phase problems.์ด ํ•™์œ„๋…ผ๋ฌธ์—์„œ๋Š” ๋น„์„ ํ˜• ์ธก๋„ ๋ฐ์ดํ„ฐ ๋ฌธ์ œ๋“ค์— ๋Œ€ํ•˜์—ฌ ๋‹ค์–‘ํ•œ ์ •์น™์„ฑ ๊ฒฐ๊ณผ๋“ค์„ ์–ป๋Š”๋‹ค. ํ•ด๋‹น ๊ฒฐ๊ณผ๋“ค์€ ๋น„์„ ํ˜• ์นผ๋ฐ๋ก -์ง€๊ทธ๋ฌธํŠธ ์ด๋ก  ๋ฐ ๋น„์„ ํ˜• ํผํ…์…œ ์ด๋ก ์„ ๋‹ค๋ฃจ๋Š” ๊ณผ์ •์˜ ์ผ๋ถ€์ด๋‹ค. ์ฒซ ๋ฒˆ์งธ๋กœ, ์˜ค๋ฅผ๋ฆฌ์ธ  ์„ฑ์žฅ์กฐ๊ฑด ๋ฐ ๊ฒฝ๊ณ„์„  ์ด์ค‘์œ„์ƒ ์„ฑ์žฅ์กฐ๊ฑด์„ ๊ฐ€์ง€๋Š” ํƒ€์›ํ˜• ์ธก๋„ ๋ฐ์ดํ„ฐ ๋ฌธ์ œ์— ๋Œ€ํ•˜์—ฌ ๊ฐ๊ฐ ์ตœ๋Œ€ ์ ๋ถ„์„ฑ ๋ฐ ๋ถ„์ˆ˜์ฐจ์ˆ˜ ๋ฏธ๋ถ„์„ฑ ๊ฒฐ๊ณผ๋ฅผ ์–ป๋Š”๋‹ค. ๋˜ํ•œ ํฌ๋ฌผํ˜• ์ธก๋„ ๋ฐ์ดํ„ฐ ๋ฌธ์ œ์— ๋Œ€ํ•˜์—ฌ ๋ถ„์ˆ˜์ฐจ์ˆ˜ ๋ฏธ๋ถ„์„ฑ์„ ๊ณ„์ˆ˜์— ๋Œ€ํ•œ ์ตœ์†Œํ•œ์˜ ๊ฐ€์ • ํ•˜์—์„œ ์ฆ๋ช…ํ•œ๋‹ค. ๋‘ ๋ฒˆ์งธ๋กœ, ์ธก๋„ ๋ฐ์ดํ„ฐ๋ฅผ ๊ฐ€์ง€๋Š” ํƒ€์›ํ˜• ์žฅ์• ๋ฌผ ๋ฌธ์ œ์— ๋Œ€ํ•˜์—ฌ ์„ ํ˜•ํ™” ๊ธฐ๋ฒ•์„ ์ด์šฉํ•จ์œผ๋กœ์จ ๊ทธ๋ ˆ์ด๋””์–ธํŠธ ํผํ…์…œ ๊ฐ€๋Š  ๋ฐ ๋ถ„์ˆ˜์ฐจ์ˆ˜ ๋ฏธ๋ถ„์„ฑ์„ ์ฆ๋ช…ํ•œ๋‹ค. ํŠนํžˆ ๋น„์ •์น™ ์žฅ์• ๋ฌผ ๋ฌธ์ œ์— ๋Œ€ํ•ด ํผํ…์…œ ๊ฐ€๋Š ์„ ์–ป๊ธฐ ์œ„ํ•œ ์ƒˆ๋กœ์šด ๋ฐฉ๋ฒ•์„ ๊ฐœ๋ฐœํ•œ๋‹ค. ๋” ๋‚˜์•„๊ฐ€, Lยน ๋ฐ์ดํ„ฐ๋ฅผ ๊ฐ€์ง€๋Š” ๋‹จ์ผ ์žฅ์• ๋ฌผ ๋ฌธ์ œ์— ๋Œ€ํ•˜์—ฌ๋Š” ํ•ด์˜ ์œ ์ผ์„ฑ ๋ฐ ๋น„๊ต ์›๋ฆฌ๋ฅผ ์ฆ๋ช…ํ•˜์—ฌ ์ด๋Ÿฌํ•œ ์ •์น™์„ฑ ๊ฒฐ๊ณผ๋“ค์„ ๊ฐœ์„ ํ•œ๋‹ค. ๋งˆ์ง€๋ง‰์œผ๋กœ, ์ธก๋„ ๋ฐ์ดํ„ฐ๋ฅผ ๊ฐ€์ง€๋Š” ๊ตญ์†Œ ๋ฐ ๋น„๊ตญ์†Œ ํ˜ผํ•ฉ ๋ฐฉ์ •์‹์— ๋Œ€ํ•˜์—ฌ ํ•ด์˜ ์กด์žฌ์„ฑ, ์ •์น™์„ฑ ๋ฐ ํผํ…์…œ ๊ฐ€๋Š ์„ ์ฆ๋ช…ํ•œ๋‹ค. ๋˜ํ•œ, ๋น„ํ‘œ์ค€ ์„ฑ์žฅ์กฐ๊ฑด์„ ๊ฐ€์ง€๋Š” ๋น„๋“ฑ๋ฐฉ์  ๋น„๊ตญ์†Œ ๋ฌธ์ œ์— ๋Œ€ํ•œ ์ •์น™์„ฑ ์ด๋ก ์˜ ์ฒซ๊ฑธ์Œ์œผ๋กœ์„œ, ๋น„๊ตญ์†Œ ์ด์ค‘์œ„์ƒ ๋ฌธ์ œ์— ๋Œ€ํ•œ ํš”๋” ์ •์น™์„ฑ์„ ๊ตญ์†Œ ์ด์ค‘์œ„์ƒ ๋ฌธ์ œ์˜ ๊ฒฝ์šฐ๊ณผ ์œ ์‚ฌํ•œ ์ตœ์ ์˜ ์กฐ๊ฑด ํ•˜์—์„œ ์ฆ๋ช…ํ•œ๋‹ค.1 Introduction 1 1.1 Measure data problems 1 1.1.1 Nonlinear Calderรณn-Zygmund theory 2 1.1.2 Nonlinear potential theory 4 1.2 Elliptic measure data problems with nonstandard growth 7 1.3 Elliptic obstacle problems with measure data 8 1.4 Nonlocal equations, mixed local and nonlocal equations 9 1.5 Nonlocal operators and measure data 10 1.6 Nonlocal operators with nonstandard growth 11 2 Preliminaries 13 2.1 General notations 13 2.2 Function spaces 15 2.2.1 Musielak-Orlicz spaces 15 2.2.2 Fractional Sobolev spaces 18 2.2.3 Lorentz spaces, Marcinkiewicz spaces 21 2.3 Auxiliary results 22 2.3.1 Basic properties of the vector fields V(ยท) and A(ยท) 22 2.3.2 Regularity for homogeneous equations 24 2.3.3 Technical lemmas 34 3 Elliptic and parabolic equations with measure data 35 3.1 Maximal integrability for elliptic measure data problems with Orlicz growth 35 3.1.1 Main results 35 3.1.2 Some technical results 37 3.1.3 Proof of Theorem 3.1.2 43 3.2 Fractional differentiability for elliptic measure data problems with double phase in the borderline case 53 3.2.1 Main results 53 3.2.2 Preliminaries 55 3.2.3 Regularity for homogeneous problems 56 3.2.4 Comparison estimates 61 3.2.5 Proof of Theorem 3.2.2 66 3.3 Fractional differentiability for parabolic measure data problems 71 3.3.1 Main results 71 3.3.2 Preliminaries 73 3.3.3 Some technical results 75 3.3.4 Proof of Theorem 3.3.3 79 4 Elliptic obstacle problems with measure data 83 4.1 Potential estimates for obstacle problems with measure data 84 4.1.1 Main results 85 4.1.2 Reverse Hรถlders inequalities for homogeneous obstacle problems 88 4.1.3 Basic comparison estimates 93 4.1.4 Linearized comparison estimates 109 4.1.5 The two-scales degenerate alternative 109 4.1.6 The two-scales non-degenerate alternative 111 4.1.7 Combining the two alternatives 126 4.1.8 Proof of Theorem 4.1.2 128 4.1.9 Proof of Theorem 4.1.3 132 4.2 Fractional differentiability for double obstacle problems with measure data 138 4.2.1 Main results 139 4.2.2 Comparison estimates 141 4.2.3 Proof of Theorem 4.2.2 156 4.2.4 Proof of Theorem 4.2.4 158 4.3 Comparison principle for obstacle problems with Lยน-data 162 4.3.1 Comparison principles 163 4.3.2 Applications to regularity results 166 5 Mixed local and nonlocal equations with measure data 171 5.1 Main results 171 5.2 Preliminaries 177 5.3 Regularity for homogeneous equations 178 5.4 Comparison estimates 184 5.5 Existence of SOLA 189 5.6 Potential estimates 194 5.6.1 Proof of Theorems 5.1.4 and 5.1.7 194 5.6.2 Proof of Theorem 5.1.5 197 5.7 Continuity criteria for SOLA 204 5.7.1 Proof of Theorem 5.1.8 204 5.7.2 Proof of Theorem 5.1.10 205 6 Nonlocal double phase problems 207 6.1 Main results 208 6.2 Preliminaries 211 6.2.1 Function spaces 211 6.2.2 Inequalities 212 6.3 Existence of weak solutions 215 6.4 Caccioppoli estimates and local boundedness 217 6.5 Hรถlder continuity 225 6.5.1 Logarithmic estimates 225 6.5.2 Proof of Theorem 6.1.2 235 Abstract (in Korean) 261๋ฐ•

    ํ•ฉ๋ฆฌ์  ์„ค๊ณ„์— ๋”ฐ๋ฅธ ๋‹จ๋ฐฑ์งˆ ๊ณตํ•™์„ ํ†ตํ•œ ์ธํ„ฐํŽ˜๋ก  ๋ฒ ํƒ€์˜ ์ƒโ‹…๋ฌผ๋ฆฌํ•™์  ์„ฑ์งˆ ๋ฐ ์•ฝ๋™๋ ฅํ•™์  ์„ฑ์งˆ์˜ ๊ฐœ์„ 

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    ํ•™์œ„๋…ผ๋ฌธ (๋ฐ•์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ์•ฝํ•™๊ณผ, 2014. 8. ์‹ ์˜๊ธฐ.Recombinant human IFN-ฮฒ 1a (rhIFN-ฮฒ 1a) is a single glycosylated protein (at N80, 1N) with anti-viral, anti-proliferation, and immunomodulatory activities. rhIFN-ฮฒ 1a has been approved as a drug for the treatment of multiple sclerosis (MS). rhIFN-ฮฒ is a highly hydrophobic protein that has a strong propensity for aggregation. It was already well known that aggregation reduces the activity of rhIFN-ฮฒ and can also contribute to low production yield in mammalian culture systems, resulting in the high price of therapeutics high cost of production. As with other protein drugs, rhIFN-ฮฒs also have relatively short serum half-lives that may necessitate frequent parenteral administration to achieve efficacy. The frequent injections and related local skin reactions are the most common inconveniences associated with treatment. Modification of protein drugs by the attachment of an oligosaccharide moiety or polyethylene glycol (PEG) can improve patient compliance through sustained clinical response with less frequent dosing. This is due to the fact that glycoengineered or PEGylated protein could exhibit improved thermal stability and solubility, thus prolonging the circulating half-life. Moreover, it could reduce immunogenicity of the protein drug. To address these unmet needs by designing a biobetter version of rhIFN-ฮฒ, an oligosaccharide moiety and PEG were sequentially introduced on rhIFN-ฮฒ 1a. Site-specific hyperglycosylation was introduced into rhIFN-ฮฒ 1a via site-directed mutagenesis. Glycoengineered rhIFN-ฮฒ 1a was characterized by western blotting, isoelectric focusing, enzyme immunoassay, and glycosylation analysis. Glycoengineering of rhIFN-ฮฒ 1a resulted in the production of a new molecular entity, R27T, with which we could obtain valuable competitive intellectual property rights. Glycoengineering successfully resulted in a product that exhibited unaltered ligand-receptor binding, with no observed change in the specific activity. R27T displayed improved stability and solubility, reduced aggregation, and increased half-life in pharmacokinetic (PK) studies, suggesting that hyperglycosylated rhIFN-ฮฒ could be a biobetter version rhIFN-ฮฒ for the treatment of MS. The addition of PEG is well known as an effective strategy to alter the PK profiles of a variety of drugs, thereby improving therapeutic potential. To obtain a more dramatic improvement in PK property, PEG was conjugated to R27T using several methods. PEG-R27T exhibited improved in vivo circulation half-lives over their corresponding native forms, although there was little activity loss. Taken together, rational design and engineering of rhIFN-ฮฒ 1a using glycoengineering and PEGylation resulted in improved biophysical and PK properties, suggesting that these modification products could serve as new improved therapeutics for MS.I. IN TRODUCTION 1 1. Multiple sclerosis 2 2. Therapeutics for multiple sclerosis 6 3. Implementation of rhIFN-ฮฒ therapy for multiple sclerosis 9 4. Rational design and engineering of protein therapeutics 11 II. PURPOSE OF THE STUDY 14 III. MATERIALS AND METHODS 16 1. Construction of a gene encoding rhIFN-ฮฒ glycosylation analogs 17 2. Expression of rhIFN-ฮฒ construct in mammalian cells 19 3. Purification and characterization of rhIFN-ฮฒ mutants 19 4. Analysis of expressed proteins 20 5. Glycosylation site confirmation 20 6. Monosaccharide and sialic acid composition analysis 21 7. Oligosaccharide profiling 22 8. Exoglycosidase digestion 23 9. Protein stability measurement by biophysical analysis 23 10. Determination of antiviral activity 24 11. Anti-proliferation activity 25 12. Immunomodulatory effect 25 13. Molecular modeling for R27T/IFNAR2 complex 26 14. PEGylation of R27T 27 15. Purification of PEG-R27T 28 16. In vivo pharmacokinetic analysis in rats 28 17. statistical analysis 30 IV. RESULT 31 1. Construction of rhIFN-ฮฒ glycosylation analogs, R27T 32 2. Development of cell line and its productivity 38 3. Improvement of the purification process 43 4. Glycosylation site confirmation of R27T analogs with additional glycosylation 47 5. The analysis of glycosylation 53 6. Protein stability measurement by biophysical analysis 61 7. Maintenance of in vitro activity 67 8. Molecular modeling of R27T/IFNAR2 complex 69 9. In vivo pharmacokinetics study in rats 72 10. in vitro activity of PEG-R27T 76 11. in vivo PEG-R27T pharmacokinetic study in rats 79 V. DISCUSSION 83 VI. CONCLUSION 89Docto

    ์ฐจ์„ธ๋Œ€ ์ธํ„ฐํŽ˜๋ก  ๋ฒ ํƒ€ ์„ธํฌ์ฃผ ๊ฐœ๋ฐœ ๋ฐ ๋‹จ๋ฐฑ์งˆ ์น˜๋ฃŒ์ œ์˜ ๋ถ„์„๋ฒ• ํ™•๋ฆฝ

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    Thesis(masters) --์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› :์•ฝํ•™๊ณผ,2008.2.Maste

    Electron Holographic Analysis of Polarizationinduced Charges at Heteroepitaxial Interfaces

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    DoctorAn interface between two dissimilar materials is a sort of planar defect, which gives rise to abruptly change many physical and chemical properties. The interfaces have been usually regarded as weak spots, which limit the devicesโ€™ performance. However, some engineered interfaces are endowed with the emergent properties, which do not exist in its parent materials and hence promise the realization of new functionalities. For example, the polarization discontinuity across an atomically smooth interface of group-III wurtzite nitrides or perovskite oxides can be utilized to cultivate the polarization charge and/or to redistribute the free charge carriers. However, despite successful applications followed by tremendous research utilizing the polar interface, the current understanding on polar interfaces is far from completion mostly due to the lack of suitable analytical tools which can probe into the interfacial phenomena involving structural and electrical coupling (i.e. electromechanical coupling) within a few nanometer scale. In this regard, electron holography is a unique tool capable of mapping the polarity-induced field (in short, polar field hereinafter) and the associated charge density with high sensitivity and sub-nanometric resolution over a large field of view. Recently developed dark-field electron holography facilitates a new capability of mapping the two-dimensional (2-D) strain tensors compared to the conventional electron holography, allowing comprehensive understanding of the strain-induced (piezoelectric) polar field, which for instance is an important issue in strained InGaN/GaN interfaces used for high power devices and also for electro-optical devices like light emitting diodes (LEDs). This thesis consists of three separate subjects with their own goals. The first subject concerns the development of analytical method based on inline electron holography, enabling the 2-D mapping of lattice strain, polarization-induced charges, electrostatic potential, and electric fields at polar interfaces. With the developed method at hand, the second subject deals with the InGaN/GaN heteroepitaxial interfaces, in which the epitaxial strain state, the strain-induced piezoelectric polarization, and the reorganization of free charge carriers are thoroughly analyzed. The established methodology lays a firm foundation for comprehensive analysis of the piezoelectric effects in LEDs. The third subject is about the emergent properties arising at LaAlO3/SrTiO3 heteroepitaxial interfaces, where the developed electron holography techniques were applied to visualize the โ€œinterface materialโ€ responsible for the origin of new properties, that is the two-dimensional electron gas (2-DEG). The high resolution and charge-sensitive mapping of the 2-DEGs reveals that the spatial extent of 2-DEG formed on the different interface orientations, for example (001) and (111), is indeed different, indicative of their unprecedented capability for probing interface-specific materials within a few nanometer scale. InGaN/GaN multi-quantum well (MQW) structures have been extensively used for conventional blue LEDs as the active region for light emission. In addition to the spontaneous polarization originating from the non-centrosymmetric crystal structure, the pseudomorphically grown InGaN layers on GaN possess a piezoelectric polarization which adds to the spontaneous polarization in each layer. A gradient of net polarization across the InGaN/GaN interface leaves the two-dimensional sheet charge at the interface, which in turn induces a strong internal electric field in the InGaN quantum well. This piezoelectric polarization effect is known to cause the degradation of internal quantum efficiency during high current operation, so called efficiency droop. The performance of a LED can be dramatically improved if the polarization mismatch at the InGaN/GaN interfaces is minimized through โ€œelastic strain engineeringโ€. For the successful strain engineering, the strain analysis should be accompanied by the analysis of strain-induced polarization as well as charge density. Using inline electron holography at dark-field and bright-field modes, we have obtained fully quantitative maps of the two-dimensional strain tensor and total charge density in conventional blue LEDs, respectively, and correlated them with sub-nanometer spatial resolution. The strain maps clearly show that the InGaN layers are compressively strained and elongated along the polar growth direction, exerting compressive stress/strain on the GaN layers, which has never been observed before. The interface sheet charges arising from the polarization gradient can be obtained directly from the strain data and compared with the total charge density map. The quantitative interpretation by the energy band simulation indicates that the polarization sheet charge is about 60% screened by free charge carriers, leaving a substantial internal electric field of 3.3 MV cm-1 in the active InGaN quantum well regions. The second materials system of interest is a polar oxide interface made by two band insulators of LaAlO3 and SrTiO3. The 2-DEG forming at this interface has shown a vast diversity of physical properties including superconductivity, ferromagnetism and field induced metal-insulator phase transitions. Apart from the successful applications to various advanced prototype devices, there are still compelling debates related to the formation mechanism and origin of the 2-DEG. We have succeeded in the first direct charge-sensitive imaging of the 2-DEG by using inline electron holography. From the charge density maps, we have directly observed that the 2-DEG is created only at the LaAlO3/SrTiO3 interface at which the LaAlO3 film is thicker than the critical thickness (corresponding to four unit cell of LaAlO3), where the 2-DEG is confined within few unit cells in the SrTiO3 side and its density is close to the theoretically predicted value correspondent to the transfer of 0.5 electron per unit cell. In the case of LaAlO3 film thinner than the critical thickness, the polar field induced in LaAlO3 film is partially compensated by the depolarizing buckling of constituent atoms, i.e. ionic reconstruction. The results demonstrate that the compensation mechanism of the polar field depends on the thickness of LaAlO3, i.e. for thinner films below the critical thickness the ionic reconstruction resulting in the depolarization buckling is dominant whereas for thicker films the electronic compensation leading to the formation of 2-DEG is favored. As to the origin of 2-DEG, through comprehensive electron microscopy analyses we have gathered convincing experimental data supporting that the oxygen vacancies forming at the LaAlO3 film surface act as the source to the 2-DEG, of which the formation energy varies sensitively with the internal polar field. Furthermore, the high resolution capability of inline electron holography allows the detection of a subtle change in 2-DEG distribution with the interface orientations. The results clearly illustrate that the spatial extent of 2-DEG forming at the (111) is much broader than that forming at the standard (100) orientation; the measured half width of 2-DEG peak is ~7 bilayers and ~3 unit cells at the (111) and the (100) interfaces, respectively. This finding is rationalized by taking account of the different symmetry of the electronic state of Ti-3d orbitals, at which the transferred 2-DEGs is accommodated. More specifically, ordering of the eg and t2g orbitals behaves different by the crystallographic symmetries of interface plane, and the confinement of electron carriers becomes accordingly diverse. We successfully makes sure that electron holography is a unique tool capable of mapping the polar field and the correlated charge density with high sensitivity and sub-nanometric resolution over a large field of view. By the combination with EELS and atomic resolution STEM together with inline holography, we demonstrate the comprehensive understanding of the interfacial phenomena in the InGaN/GaN and LaAlO3/SrTiO3 heteroepitaxial interface.๊ณ„๋ฉด์€ ๋ฌผ๋ฆฌ์ , ํ™”ํ•™์  ํŠน์„ฑ๋“ค์˜ ์—ฐ์†์„ฑ์ด ๊นจ์ง€๋Š” ์ผ์ข…์˜ ๋ฉด ๊ฒฐํ•จ์œผ๋กœ์„œ ์žฌ๋ฃŒ ๊ณ ์œ ํŠน์„ฑ์„ ์ขŒ์šฐํ•˜๋ฉฐ ํŠนํžˆ ์†Œ์ž์˜ ์„ฑ๋Šฅ์„ ์ œํ•œํ•˜๋Š” ์•ฝ์ ์œผ๋กœ ๊ฐ„์ฃผ๋˜๊ณ  ์žˆ๋‹ค. ํ•˜์ง€๋งŒ ๋ฒŒํฌ ํ˜•ํƒœ์—์„œ๋Š” ๋‚˜ํƒ€๋‚˜์ง€ ์•Š๋Š” ๋…ํŠนํ•˜๊ณ  ์ƒˆ๋กœ์šด ํ˜„์ƒ๋“ค์ด ๊ณ„๋ฉด์—์„œ ๋ฐœํ˜„๋˜์–ด ์ตœ๊ทผ์—๋Š” ๋ฏธ๋ž˜์†Œ์žฌ ๋ฐ ์†Œ์ž ๊ฐœ๋ฐœ์„ ์œ„ํ•˜์—ฌ ์ƒˆ๋กญ๊ฒŒ ์ด๋ชฉ์„ ๋ฐ›๊ณ  ์žˆ๋‹ค. ๊ทธ ์˜ˆ๋กœ์„œ, 3-์กฑ ์งˆํ™”๋ฌผ์ด๋‚˜ ํŽ˜๋กœ๋ธŒ์Šค์นด์ดํŠธ ์‚ฐํ™”๋ฌผ์„ ๋“ค ์ˆ˜ ์žˆ๋Š”๋ฐ, ์ด๋Ÿฌํ•œ ์†Œ์žฌ์˜ ๊ณ„๋ฉด์—์„œ ๋ฐœ์ƒํ•˜๋Š” ๋ถ„๊ทน์˜ ๋ถˆ์ผ์น˜๋Š” ๊ณ„๋ฉด์— ๊ฐ•ํ•œ ๋ฉด ์ „ํ•˜๋ฅผ ๋ฐœ์ƒ์‹œํ‚ค๊ฑฐ๋‚˜ ๋˜๋Š” ์ž์œ ์ „ํ•˜์˜ ์žฌ๋ฐฐ์น˜ํ•˜์—ฌ ๋ฌผ์งˆ์˜ ์ „๊ธฐ์  ํŠน์„ฑ์„ ์œ ๋ฐœํ•˜๋Š” ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ๋‹ค. ์ตœ๊ทผ ์ด๋Ÿฌํ•œ ๊ทน์„ฑ ๊ณ„๋ฉด์„ ์†Œ์ž๋กœ์„œ์˜ ์‘์šฉํ•˜๊ณ ์ž ๊ทน์„ฑ ๊ณ„๋ฉด์˜ ํŠน์„ฑ ์—ฐ๊ตฌ๊ฐ€ ํ™œ๋ฐœํžˆ ์ˆ˜ํ–‰๋˜๊ณ  ์žˆ์ง€๋งŒ, ํ•„์—ฐ์ ์œผ๋กœ ์ˆ˜๋ฐ˜๋˜๋Š” ์›์ž ๊ตฌ์กฐ์ , ์ •์ „๊ธฐ์  ๋ณ€ํ™”๋“ค์ด ๊ณ„๋ฉด ๊ทผ์ฒ˜์˜ ์ˆ˜ ๋‚˜๋…ธ๋ฏธํ„ฐ์˜ ์•„์ฃผ ์ž‘์€ ์˜์—ญ์—์„œ ๋ณตํ•ฉ์ ์œผ๋กœ ๋ฐœ์ƒํ•จ์— ๋”ฐ๋ผ ์ˆ˜๋ฐ˜๋˜๋Š” ๋ฌผ๋ฆฌ ํ˜„์ƒ์„ ์ดํ•ดํ•˜๊ณ  ๋ฉ”์นด๋‹ˆ์ฆ˜์„ ๊ทœ๋ช…ํ•˜๋Š”๋ฐ ๋งŽ์€ ์–ด๋ ค์›€์„ ๊ฒช๊ณ  ์žˆ๋‹ค. ์ด๋Ÿฌํ•œ ๊ด€์ ์—์„œ ๋‚˜๋…ธ๋ฏธํ„ฐ ์ดํ•˜์˜ ๊ณ ๋ถ„ํ•ด๋Šฅ์„ ๊ฐ€์ง„ ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ ๋ฐฉ๋ฒ•์€ ๋ถ„๊ทน ๋ถˆ์ผ์น˜์— ์˜ํ•ด ์œ ๋ฐœ๋˜๋Š” ์ „๊ธฐ์žฅ๋ฟ๋งŒ ์•„๋‹ˆ๋ผ ์ „ํ•˜ ๋ถ„ํฌ๋ฅผ ์ง์ ‘์ ์œผ๋กœ ๋งคํ•‘ํ•  ์ˆ˜ ์žˆ์–ด ๊ทน์„ฑ ๊ณ„๋ฉด ํŠน์„ฑ์„ ์—ฐ๊ตฌํ•˜๋Š”๋ฐ ์ตœ์ ์˜ ๋ถ„์„ ๊ธฐ๋ฒ•์ด๋ผ ํ•  ์ˆ˜ ์žˆ๋‹ค. ๋˜ํ•œ ์ตœ๊ทผ ์•”์‹œ์•ผ ๋ชจ๋“œ ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ ๋ฐฉ๋ฒ•์€ ๊ณ ๋ถ„ํ•ด๋Šฅ์˜ 2์ฐจ์› ๊ฒฉ์ž๋ณ€ํ˜• ์ •๋ณด๋ฅผ ์ง์ ‘์ ์œผ๋กœ ๋งคํ•‘ํ•˜๋Š” ๊ฒƒ์ด ๊ฐ€๋Šฅํ•˜์—ฌ ์ „ํ•˜ ๋ถ„ํฌ๋ฟ ๋งŒ ์•„๋‹ˆ๋ผ ๊ฒฐ์ •ํ•™์  ๊ตฌ์กฐ ๋ณ€ํ™” ๋ถ„์„์ด ํ†ตํ•ด ์ „๋ฐฉ์œ„์ ์ธ ๋ฌผ๋ฆฌํ˜„์ƒ์˜ ์ดํ•ด๋ฅผ ๊ฐ€๋Šฅํ•˜๊ฒŒ ํ•˜์˜€๋‹ค. ์ด์— ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” ์ตœ์ฒจ๋‹จ ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ ๊ธฐ๋ฒ•์„ ๊ทน์„ฑ ๊ณ„๋ฉด ์†Œ์žฌ ํ•ด์„์— ๋งž๊ฒŒ ์ตœ์ ํ™”ํ•˜๊ณ  ์ด๋ฅผ ์ด์šฉํ•˜์—ฌ ๊ทน์„ฑ ๊ณ„๋ฉด์˜ ๊ตฌ์กฐ์ , ์ „๊ธฐ์  ํŠน์„ฑ์„ ๊ฐ€์‹œํ™”ํ•˜๊ณ , ์ด๋กœ๋ถ€ํ„ฐ ๋‹ค์–‘ํ•œ ๋ชจ๋ธ ์‹œ์Šคํ…œ์—์„œ์˜ ๊ทน์„ฑ ๊ณ„๋ฉด์˜ ์—ญํ• ์„ ์ž์„ธํžˆ ์ดํ•ดํ•˜๊ณ ์ž ํ•œ๋‹ค. ์ด์™€ ๊ฐ™์€ ๋ชฉ์ ์œผ๋กœ ๋ณธ ์—ฐ๊ตฌ ๋…ผ๋ฌธ์€ ํฌ๊ฒŒ 3๊ฐœ ์ฃผ์ œ๋กœ ๊ตฌ์„ฑํ•˜์˜€๋‹ค. ์ฒซ ๋ฒˆ์งธ ์ฃผ์ œ๋กœ, ๋ณด๋‹ค ๊ฐœ์„ ๋˜๊ณ  ์ •๋ฐ€ํ™”๋œ ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ ๋ฐฉ๋ฒ•์„ ์ œ์•ˆํ•˜์˜€๋‹ค. ์ด๋ฅผ ํ†ตํ•ด ์ด์ข… ์ ‘ํ•ฉ ๊ณ„๋ฉด์—์„œ ์œ ๋ฐœ๋œ ๊ฒฉ์ž ๋ณ€ํ˜•๋Ÿ‰์„ ํฌํ•จํ•˜์—ฌ, ๋ถ„๊ทน ์ „ํ•˜, ์ •์ „๊ธฐ์  ํฌํ…์…œ, ๊ทธ๋ฆฌ๊ณ  ์ด์— ๋”ฐ๋ฅธ ์ „๊ธฐ์žฅ ๋ถ„ํฌ๊นŒ์ง€, ๋‹ค์–‘ํ•œ ๋ฌผ๋ฆฌ์  ํŠน์„ฑ์„ ๋‚˜๋…ธ๋ฏธํ„ฐ ์ดํ•˜์˜ ๊ณ ๋ถ„ํ•ด๋Šฅ์œผ๋กœ ์ •๋ฐ€ํ•˜๊ณ , ์ •๋Ÿ‰์ ์ธ ๋ถ„์„์ด ๊ฐ€๋Šฅํ•ด์กŒ๋‹ค. ๋‘ ๋ฒˆ์งธ๋Š” ์ด ๊ฐ™์ด ๊ฐœ์„ ๋œ ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ ๊ธฐ๋ฒ•์„ InGaN/GaN ์ด์ข…์ ‘ํ•ฉ ๊ณ„๋ฉด์— ์ ์šฉํ•˜์—ฌ ๊ฒฉ์ž ๋ณ€ํ˜•๊ณผ ์ด๋กœ ์ธํ•ด ์œ ๋ฐœ๋œ ๋ถ„๊ทน ์ „ํ•˜, ๋‚˜์•„๊ฐ€ ์ „์ฒด ์ „ํ•˜ ๋ถ„ํฌ๊นŒ์ง€ ์ •๋Ÿ‰์ ์œผ๋กœ ๋ถ„์„ํ•œ ๊ฒฐ๊ณผ๋ฅผ ์ œ์‹œํ•˜์˜€๋‹ค. ๋งˆ์ง€๋ง‰์œผ๋กœ๋Š” LaAlO3/SrTiO3 ์‚ฐํ™”๋ฌผ ๊ณ„๋ฉด์—์„œ์˜ ๋‹ค์–‘ํ•œ ๋ฌผ๋ฆฌ์  ํŠน์„ฑ์„ ์•ผ๊ธฐํ•˜๋Š” 2์ฐจ์› ์ „์ž๊ฐ€์Šค๋ฅผ ์ง์ ‘์ ์œผ๋กœ ๋ณด์—ฌ์ฃผ๊ณ , ์ด์˜ ํ˜•์„ฑ ์›๋ฆฌ์™€ ๊ทผ์›์— ๋Œ€ํ•ด ์‹ฌ๋„ ๊นŠ๊ฒŒ ๋…ผ์˜ํ•˜์˜€๋‹ค. ์ฒซ ๋ฒˆ์งธ๋กœ ์ ์šฉ๋œ ๋ชจ๋ธ ์‹œ์Šคํ…œ์€ InGaN/GaN ์ด์ข…์ ‘ํ•ฉ๊ณ„๋ฉด ์†Œ์žฌ์ด๋‹ค. InGaN/GaN ๋‹ค์ค‘์–‘์ž ์šฐ๋ฌผ ๊ตฌ์กฐ๋Š” ๋„๋ฆฌ ์ด์šฉ๋˜๊ณ  ์žˆ๋Š” ์ฒญ์ƒ‰ ๋ฐœ๊ด‘ ๋‹ค์ด์˜ค๋“œ์˜ ํ™œ์„ฑ์ธต์œผ๋กœ์„œ, ๊ทธ๋“ค์˜ ๊ฒฐ์ •๊ตฌ์กฐ๋กœ๋ถ€ํ„ฐ ๊ธฐ์ธํ•˜๋Š” ์ž๋ฐœ๋ถ„๊ทน๊ณผ ์ด์ข… ์ ‘ํ•ฉ์˜ ๊ณ„๋ฉด์—์„œ ๊ฒฉ์ž์˜ ๋ถˆ์ผ์น˜์— ์˜ํ•ด ์•ผ๊ธฐ๋˜๋Š” ์••์ „๋ถ„๊ทน ํŠน์„ฑ์„ ๊ฐ€์ง„๋‹ค. ์ด๋Ÿฌํ•œ InGaN/GaN ์ด์ข… ์ ‘ํ•ฉ ๊ณ„๋ฉด์˜ ๋ถ„๊ทน ๋ถˆ์ผ์น˜๋Š” ๊ณ„๋ฉด์— ๊ฐ•ํ•œ ๋ฉด์ „ํ•˜๋ฅผ ํ˜•์„ฑํ•˜๊ณ , ๊ฒฐ๊ณผ์ ์œผ๋กœ ๋‚˜๋…ธ๋ฏธํ„ฐ ์˜์—ญ ์•ˆ์—์„œ ๊ฐ•ํ•œ ์ „๊ธฐ์žฅ์„ ์œ ๋ฐœํ•œ๋‹ค. ์ด ๋ถ„๊ทน ์œ ๋ฐœ ์ „๊ธฐ์žฅ์€ ๋‚ด๋ถ€ ์–‘์ž ํšจ์œจ์˜ ์ €ํ•˜, ๊ทธ๋ฆฌ๊ณ  ๋†’์€ ์ „๋ฅ˜ ์†์‹ค์˜ ์›์ธ์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ์–ด, ์†Œ์ž์˜ ์„ฑ๋Šฅ ํ–ฅ์ƒ์„ ์œ„ํ•ด ๋‘ ์งˆํ™”๋ฌผ ๊ฐ„์˜ ๊ฒฉ์ž ๋ถ€์ •ํ•ฉ์„ ์กฐ์ •ํ•˜์—ฌ ๊ณ„๋ฉด์—์„œ์˜ ๋ถ„๊ทน ๋ถˆ์ผ์น˜๋ฅผ ์ตœ์†Œํ™”ํ•˜๋ ค๋Š” โ€œ์žฌ๋ฃŒ ๋ณ€์œ„ ๊ณตํ•™โ€ ์—ฐ๊ตฌ๊ฐ€ ๋งŽ์ด ์ง„ํ–‰๋˜๊ณ  ์žˆ๋‹ค. ์ด๋ฅผ ์œ„ํ•ด์„œ๋Š” ๋‚˜๋…ธ๋ฏธํ„ฐ ํฌ๊ธฐ์˜ ๊ตญ์†Œ ์˜์—ญ์—์„œ์˜ ์ •๋Ÿ‰์ ์ธ ๊ฒฉ์ž ๋ณ€ํ˜•๋Ÿ‰ ๋ถ„์„๊ณผ ์ด์— ๊ธฐ์ธํ•˜๋Š” ๋ถ„๊ทน ๋ฐ ์ „ํ•˜ ๋ถ„ํฌ์˜ ํ•ด์„๊ณผ ์ดํ•ด๊ฐ€ ๋ฐ˜๋“œ์‹œ ์š”๊ตฌ๋˜๊ณ  ์žˆ๋‹ค. ๋ณธ ์—ฐ๊ตฌ๋Š” ์ด์™€ ๊ฐ™์€ ์š”๊ตฌ์— ๋งž์ถฐ InGaN/GaN ๋‹ค์ค‘์–‘์ž์šฐ๋ฌผ ๊ตฌ์กฐ์—์„œ์˜ ๊ฒฉ์ž๋ณ€ํ˜•๊ณผ ์ „ํ•˜๋ฐ€๋„๋ฅผ ๋‚˜๋…ธ๋ฏธํ„ฐ ๋ถ„ํ•ด๋Šฅ์œผ๋กœ 2์ฐจ์› ๋งคํ•‘์— ์„ฑ๊ณตํ•˜์˜€๋‹ค. InGaN์ธต์€ ์„ฑ์žฅ ๋ฐฉํ–ฅ์„ ๋”ฐ๋ผ ๋‹จ์œ„๊ฒฉ์ž๊ฐ€ ํŒฝ์ฐฝ๋˜๊ณ  ๋ฐ˜๋Œ€๋กœ GaN ์ธต์˜ ์ˆ˜์ถ•๋จ์„ ์•Œ์•„๋‚ด์—ˆ๊ณ , ์ด๋กœ๋ถ€ํ„ฐ ๋Œ€๋žต 3.3 MV cm-1์˜ ๊ฐ•ํ•œ ์ „๊ธฐ์žฅ์„ ์œ ๋ฐœํ•˜๋Š” ๋ถ„๊ทน์ „ํ•˜๊ฐ€ ๊ณ„๋ฉด์— ํ˜•์„ฑ๋จ์„ ์•Œ์•˜๋‹ค. ์ด ๋ถ„๊ทน์ „ํ•˜๋ฅผ ์ „์ฒด ์ „ํ•˜๋ฐ€๋„ ๋ถ„ํฌ์™€์˜ ๋น„๊ต ๋ถ„์„ํ•œ ๊ฒฐ๊ณผ, ์†Œ์ž ๋‚ด๋ถ€์˜ ๋„ํ•‘์ „ํ•˜์— ์˜ํ•ด 60% ์ƒ์‡„๋จ์„ ์ด๋ก ์  ์—๋„ˆ์ง€ ๋ฐด๋“œ ๊ณ„์‚ฐ๊ณผ ๋”๋ถˆ์–ด ์•Œ์•„ ๋‚ด์—ˆ๋‹ค. ์ด๋Ÿฌํ•œ ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ ๊ธฐ๋ฒ•์„ ์ ์šฉํ•œ ๊ณ ๋ถ„ํ•ด๋Šฅ์˜ ๊ฒฉ์ž๋ณ€ํ˜• ๋ถ„์„๊ณผ ์ด์— ๊ด€๋ จํ•œ ์ „ํ•˜ ๋ถ„ํฌ์˜ ๋ถ„์„์€ ์••์ „ ๋ฌผ์งˆ์„ ๊ธฐ๋ฐ˜์œผ๋กœ ํ•˜๋Š” ๊ด‘โ€ข์ „์†Œ์ž ๋‚ด์˜ ์••์ „ ํšจ๊ณผ๋ฅผ ์ดํ•ดํ•˜๋Š” ๊ธฐ๋ฐ˜์ด ๋˜๊ณ , ๋‚˜์•„๊ฐ€ ์ „์ž์†Œ์ž๋“ค์˜ ์žฌ๋ฃŒ ๋ณ€์œ„ ๊ณตํ•™์˜ ๋ฐœ์ „์— ๊ธฐ์—ฌํ•  ์ˆ˜ ์žˆ๋‹ค. ๋˜ ๋‹ค๋ฅธ ๋ชจ๋ธ ์‹œ์Šคํ…œ์€ LaAlO3/SrTiO3๊ตฌ์กฐ๋กœ์„œ, ๋‘ ์‚ฐํ™”๋ฌผ ์ ˆ์—ฐ์ฒด์˜ ๊ณ„๋ฉด์— ํ˜•์„ฑ๋˜๋Š” 2 ์ฐจ์› ์ „์ž๊ฐ€์Šค๋Š” ์ดˆ์ „๋„์„ฑ, ๊ฐ•์ž์„ฑ์„ฑ, ๊ทธ๋ฆฌ๊ณ  ๊ธˆ์†-์ ˆ์—ฐ์ฒด ์ฒœ์ด ํŠน์„ฑ ๋“ฑ์˜ ๋‹ค์–‘ํ•˜๊ณ  ๋ฌผ๋ฆฌ์  ํŠน์„ฑ์„ ๋ณด์ธ๋‹ค. ์ด๋กœ๋ถ€ํ„ฐ 2์ฐจ์› ์ „์ž๊ฐ€์Šค๋Š” ๋ฏธ๋ž˜ํ˜• ์‹ ๊ฐœ๋… ์‚ฐํ™”๋ฌผ ๋ฐ˜๋„์ฒด๋กœ์„œ์˜ ๊ฐ€๋Šฅ์„ฑ์„ ๋ณด์ด๊ณ  ์žˆ์ง€๋งŒ ๊ทธ๋“ค์˜ ํ˜•์„ฑ ๋ฉ”์ปค๋‹ˆ์ฆ˜๊ณผ ๊ทผ์›์— ๋Œ€ํ•ด์„œ๋Š” ์—ฌ์ „ํžˆ ๋…ผ์Ÿ์ด ๋˜๊ณ  ์žˆ๋‹ค. ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” ์ด๋“ค์˜ ํ˜•์„ฑ ๋ฉ”์ปค๋‹ˆ์ฆ˜๊ณผ ๊ธฐ์›์— ๋Œ€ํ•œ ์‹ฌ๋„ ์žˆ๋Š” ๊ณ ์ฐฐ์„ ์œ„ํ•ด ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ ๋ฐฉ๋ฒ•์„ ์ ์šฉํ•˜์˜€๋‹ค. ๊ทธ ๊ฒฐ๊ณผ๋กœ์„œ, ์ž„๊ณ„๋‘๊ป˜ ์ด์ƒ์˜ ๋ฐ•๋ง‰ ๊ณ„๋ฉด ๊ทผ์ฒ˜์—์„œ 3๊ฐœ์˜ ๋‹จ์œ„๊ฒฉ์ž ๋‘๊ป˜์— ํ•ด๋‹นํ•˜๋Š” ๊ตญ์†Œ ์˜์—ญ์— ์กด์žฌํ•˜๋Š” ์ „์ž๊ฐ€์Šค์ธต์„ ์ง์ ‘์ ์œผ๋กœ ๊ด€์ฐฐํ•˜์˜€๊ณ , ์ด ์ „์ž๊ฐ€์Šค์˜ ๋Ÿ‰ (~1ร—1014 cm-2)์„ ์ •๋Ÿ‰์ ์œผ๋กœ ๊ตฌํ•˜๋Š”๋ฐ ์„ฑ๊ณตํ•˜์˜€๋‹ค. ์ž„๊ณ„๋‘๊ป˜ ์ดํ•˜์—์„œ๋Š” ์ „์ž๊ฐ€์Šค๋Š” ์กด์žฌํ•˜์ง€ ์•Š๊ณ , ๊ฒฐ์ •๊ตฌ์กฐ ๋‚ด ์›์ž๋“ค์˜ ๋ณ€์œ„๊ฐ€ ๋ฐœ์ƒํ•จ์œผ๋กœ์จLaAlO3 ๋ฐ•๋ง‰ ๋‚ด๋ถ€์˜ ๋ถ„๊ทน ์œ ๋„ ์ „๊ธฐ์žฅ์ด ์ƒ์‡„๋จ์„ ์•Œ์•˜๋‹ค. ๊ทธ๋ฆฌ๊ณ  STEM-EELS ๋ถ„์„์„ ํ†ตํ•ด ํ˜•์„ฑ๋œ 2์ฐจ์› ์ „์ž๋Š” LaAlO3 ํ‘œ๋ฉด์— ํ˜•์„ฑ๋œ ์‚ฐ์†Œ๊ณต๊ณต์— ์˜ํ•œ ๊ฒฐ๊ณผ์ž„์„ ๋ฐํ˜€๋‚ด์—ˆ๋‹ค. ๋˜ํ•œ ๊ฒฐ์ •๊ตฌ์กฐ ๋ฐฉํ–ฅ์— ๋”ฐ๋ผ ํ˜•์„ฑ๋˜๋Š” 2 ์ฐจ์› ์ „์ž๊ฐ€์Šค์˜ ์ฐจ์ด๋ฅผ ์ง์ ‘์ ์œผ๋กœ ๊ด€์ฐฐํ•˜์˜€๋‹ค. (111) ๊ฒฐ์ •๋ฐฉํ–ฅ์˜ LaAlO3/SrTiO3 ๊ตฌ์กฐ์˜ ๊ณ„๋ฉด์— ํ˜•์„ฑ๋œ 2์ฐจ์› ์ „์ž๊ฐ€์Šค๋ฅผ (001) ๊ฒฐ์ •๋ฐฉํ–ฅ์˜ LaAlO3/SrTiO3 ์—์„œ์˜ ๊ฒฐ๊ณผ์™€ ๋น„๊ตํ•œ ๊ฒฐ๊ณผ, ๋น„์Šทํ•œ ์ „ํ•˜๋Ÿ‰์„ ๊ฐ€์ง์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ๊ณ„๋ฉด์œผ๋กœ๋ถ€ํ„ฐ 7๊ฐœ์˜ ๋‹จ์œ„๊ฒฉ์ž์— ํ•ด๋‹นํ•˜๋Š” ๋ณด๋‹ค ๋” ๋„“์€ ์˜์—ญ๊นŒ์ง€ ์ „์ž๊ฐ€์Šค์ธต์ด ๋ถ„ํฌํ•จ์„ ์•Œ์•„๋‚ด์—ˆ๋‹ค. ์ด๋Š” ์ „์ž๊ฐ€์Šค๊ฐ€ ํ˜•์„ฑ๋˜๋Š” ๊ณ„๋ฉด์˜ ๊ทน์„ฑ๊ณผ ๊ฒฐ์ •๊ตฌ์กฐ์  ์ฐจ์ด์— ์˜ํ•ด ์ „์ž๊ถค๋„์˜ ๋Œ€์นญ์„ฑ์ด ๋‹ฌ๋ผ์ง์— ์˜ํ•ด ๊ธฐ์ธํ•จ์„ ๊ณ„์‚ฐ๊ฒฐ๊ณผ๋กœ ์ž…์ฆํ•˜์˜€๋‹ค. ์ด์™€ ๊ฐ™์ด ๊ทน์„ฑ๊ณ„๋ฉด์˜ ์ „์ž๊ตฌ์กฐ์˜ ๋ณ€ํ™”์— ์˜ํ•ด ๋ฏธ์„ธํ•˜๊ฒŒ ๋ณ€ํ™”ํ•˜๋Š” ์ „์ž๊ฐ€์Šค์ธต์˜ ๋ถ„ํฌ์™€ ๊ทธ ์–‘์„ ์ง์ ‘์ ์œผ๋กœ ๊ด€์ฐฐ, ๋ถ„์„ํ•จ์œผ๋กœ์จ, ์ตœ๊ทผ ์ด๋Ÿฌํ•œ ์‚ฐํ™”๋ฌผ ๊ณ„๋ฉด ํŠน์„ฑ์„ ์ƒˆ๋กœ์šด ์„ผ์„œ๋‚˜ ๋ฉ”๋ชจ๋ฆฌ ์†Œ์ž, ํˆฌ๋ช…ํšŒ๋กœ์˜ ๊ฐœ๋ฐœ์— ์ ์šฉํ•˜๋ ค๋Š” ์—ฐ๊ตฌ ๋ฐœ์ „์— ๊ธฐ์—ฌํ•  ์ˆ˜ ์žˆ๋‹ค. ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” ๋ถ„๊ทนํ˜„์ƒ์ด ๋ฌผ๋ฆฌ์  ํŠน์„ฑ์„ ์•ผ๊ธฐํ•˜๋Š” ๊ณ„๋ฉด ์†Œ์žฌ์ธ InGaN/GaN ์งˆํ™”๋ฌผ๊ณผ LaAlO3/SrTiO3 ์‚ฐํ™”๋ฌผ ์‹œ์Šคํ…œ์„ ๋ชจ๋ธ๋กœ ์„ ํƒํ•˜์˜€์œผ๋ฉฐ ์ „์ž๋น” ํ™€๋กœ๊ทธ๋ž˜ํ”ผ๋ฅผ ์ ์šฉํ•˜์—ฌ ์„ฑ๊ณต์ ์œผ๋กœ ์ด๋“ค์˜ ๋ฉ”์นด๋‹ˆ์ฆ˜์„ ์ดํ•ดํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. ์ œ์•ˆ๋œ ์ „์ž๋น” ํ™€๋กœ๋ž˜ํ”ผ ๊ธฐ์ˆ ์€ ์‹ ๊ธฐ๋Šฅ์„ฑ์ด ๊ณ„๋ฉด์— ๊ตญํ•œ๋˜์–ด ๋‚˜ํƒ€๋‚˜๋Š” ๊ณ„๋ฉด ์†Œ์žฌ์˜ ๋ฌผ์„ฑ ๋ฐœํ˜„ ๋ฉ”์นด๋‹ˆ์ฆ˜์„ ๊ทœ๋ช…ํ•˜๊ธฐ ์œ„ํ•œ ๊ฐ•๋ ฅํ•œ ๋ถ„์„ ๊ธฐ๋ฒ•์œผ๋กœ ๋Œ€๋‘๋  ๊ฒƒ์œผ๋กœ ๊ธฐ๋Œ€ํ•˜๊ณ  ์žˆ๋‹ค

    Growth and Deformation Mechanisms of Nanowires Studied by In-situ TEM

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