Effect of growth temperature on composition control for YBCO precursor films fabricated by vapor codeposition

The promising physical properties of multi-element functional nanofilms are essentially dependent on each particular nanostructure,which could be greatly altered by the change of stoichiometry[1].The vapor deposition techniques are good at controlling the composition of deposited atoms,and theref..

Effect of humidity on microstructure and properties of YBCO films prepared by Electron Beam Coevaporation

YBCO superconducting films were prepared by Electron Beam Coevaporation method. All the YBCO films were annealed at 760&deg;C in humidity range of 2.3%&ndash;9.5%. Microstructure of the YBCO thin films was analyzed by means of X-ray diffraction (XRD) and scanning electron microscopy (SEM). Superconducting properties of the YBCO films were measured by electromagnetic induction method. XRD results showed that c-axis-oriented grains existed in the YBCO films. Morphologies of the YBCO films showed that all the films had a smooth and crack-free surface. YBCO films prepared at 7.3% humidity condition showed J c value of 4.6 MA cm&minus;2 at 77 K in self-field.</div

多电子束物理气相沉积系统

多功能薄膜制备，主要技术指标: 蒸发源最大个数：3个；真空室极限压力：4E-4Pa，基片最大加热温度：600摄氏

电子束物理气相沉积中的非平衡蒸气射流输运模型

电子束物理气相沉积（EBPVD）是现代功能薄膜制备的重要方法之一，本文对EBPVD 中蒸气粒子的非平衡输运模型研究进展进行了综述。首先，对工程中广泛应用的自由分子流假设的适用范围进行了分析，指出了自由分子流假设失效的判别准则。当蒸发速率增大，自由分子流假设不再成立时，目前最有力的跨流域分析工具是直接模拟Monte Carlo（DSMC）方法，因此第二个关键问题是如何确定金属蒸气粒子的碰撞参数。再者，完成了多源蒸发大面积钇钛薄膜中三维低密度非平衡射流的DSMC 模拟，及薄膜检测结果和多种测量数据的对比。最后，针对多源EBPVD，给出了一个可以制备大面积多组分均匀薄膜的优化方案

Study of YBCO films prepared by E-beam evaporation

采用电子束沉积制备YBCO超导薄膜,研究了760℃-840℃的不同退火温度下高温热处理对YBCO薄膜双轴织构,表面形貌及超导性能的影响.超导临界电流密度测试,X射线衍射(XRD)和扫描电镜(SEM)的结果表明,退火温度在在800℃时,YBCO薄膜具有良好的织构和平整致密的表面形貌,在77K自场下的临界电流密度J可达4.2×106/cm

电子束物理气相沉积钇钛合金薄膜的组分和厚度分布

大面积薄膜的组分和厚度分布是实际工艺中最为关心的问题之一.利用实验和直接模拟Monte Carlo(DSMC)方法,分别研究了双电子束和三电子束物理气相沉积(EBPVD)中,钇和钛蒸气原子的三维低密度、非平衡射流,获得了它们在100和150mm单晶硅基片表面的沉积厚度和组分的分布.DSMC结果与钇和钛的蒸发速率的石英晶振探头原位测量值,沉积薄膜厚度分布的台阶仪和Rutherford背散射仪的测量数据,沉积薄膜组分分布的Rutherford背散射仪和电感耦合等离子体原子发射光谱仪测量值,均相符甚好.这表明通过DSMC方法与精细测量相结合,可在原子水平上实现EBPVD输运工艺的定量预测和设计

康铜薄膜热流传感器的电子束物理气相沉积

为满足激波风洞试验的高频响和高精度要求,研制了一种新型的康铜薄膜整体式热电偶测热传感器,以双组元电子束物理气相沉积的方法制备了热电偶的康铜薄膜热接点层,并精确控制热接点层厚度。与传统的测热传感器相比,其空间分辨率更高,敏感元件的尺寸小至直径0.1 mm,可用于测量R0.5 mm的尖锥驻点热流。风洞试

Quantitative analysis of oxygen content in copper oxide films using ultra microbalance

The oxygen content is one of the key factors that determine the property of the functional oxide films,and it is important to detect the oxygen content accurately.In this article,we try to analyze the oxygen content in copper oxide films using ultra microbalance.The Copper oxide films were prepar..

气相沉积制备高温超导薄膜中的若干物理力学问题探究

利用自主研发的实验设备探索出了气相沉积制备大面积高质量双面YBCO超导薄膜的新方法,成功制得了性能优异厚度为500nm双面超导膜