气相沉积制备高温超导薄膜中的若干物理力学问题探究

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Publication date
1 January 2015
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Abstract

利用自主研发的实验设备探索出了气相沉积制备大面积高质量双面YBCO超导薄膜的新方法,成功制得了性能优异厚度为500nm双面超导膜

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    Institute Of Mechanics,Chinese Academy of Sciences

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