Cathodoluminescence and TEM investigations of structural and optical properties of AlGaN on epitaxial laterally overgrown AlN/sapphire templates

Surface steps as high as 15 nm on up to 10 μm thick AlN layers grown on patterned AlN/sapphire templates play a major role for the structural and optical properties of AlxGa1−xN layers with x ≥ 0.5 grown subsequently by metalorganic vapour phase epitaxy. The higher the Ga content in these layers is, the stronger is the influence of the surface morphology on their properties. For x = 0.5 not only periodic inhomogeneities in the Al content due to growth of Ga-rich facets are observed by cathodoluminescence, but these facets give rise to additional dislocation formation as discovered by annular dark-field scanning transmission electron microscopy. For AlxGa1−xN layers with x = 0.8 the difference in Al content between facets and surrounding material is much smaller. Therefore, the threading dislocation density (TDD) is only defined by the TDD in the underlying epitaxially laterally overgrown (ELO) AlN layer. This way high quality Al0.8Ga0.2N with a thickness up to 1.5 μm and a TDD ≤ 5x108 cm−2 was obtained.Peer Reviewe

Comparison of catastrophic optical damage in InP/(Al)GaInP quantum dot and quantum well diode lasers

The facets of InP/(Al)GaInP/GaAs quantum dot laser active regions offer superior resistance to catastrophic optical mirror damage at high facet power densities. These structures degrade by bulk damage. We have used a new range of techniques to identify changes occurring during damage in working devices: thermography through windows in the nmetallization, photoluminescence via p-metallization windows and photocurrent studies. Devices were aged with single very high current pulses or pulses of increasing size and monitored during this process with these techniques. Previous investigation with panchromatic cathodoluminescence revealed dark non-radiative spots throughout the plane of the active region. The dark spots, which were present even in unprocessed material, increased in size in the pumped regions only during lasing action. The spots and background regions darkened throughout the pumped stripe area only for the whole duration of the current pulse. Thermography after successive pulses confirmed damage originating from a point in the bulk rather than at the facet. p-windows observations of light and dark regions showed a blue shift in the photoluminescence spectra of the dark regions. Photocurrent studies of more gently aged devices showed a greater decrease in signal in the region associated in previous work with defective very large dots. Identification of such spectral regions, which were previously found to be influenced by changes in structure design and growth conditions offer a route to control degradation mechanisms by this means

Stress control of tensile-strained In_1−xGa_xP nanomechanical string resonators

We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation, a stress variation of up to 50% is observed. This enables fine tuning of the tensile stress for any given Ga content x, which implies interesting prospects for the study of high Q nanomechanical systems.publishe