1 research outputs found
Encapsulated Silicon Nitride Nanobeam Cavity for Hybrid Nanophotonics
Most existing implementations of
silicon nitride photonic crystal
cavities rely on suspended membranes due to their low refractive index.
Such floating membranes are not mechanically robust, making them suboptimal
for developing a hybrid optoelectronic platform where new materials,
such as layered 2D materials, are transferred onto prefabricated optical
cavities. To address this issue, we design and fabricate a silicon
nitride nanobeam resonator where the silicon nitride membrane is encapsulated
by material with a refractive index of ∼1.5, such as silicon
dioxide or PMMA. The theoretically calculated quality factor of the
cavities can be as large as 10<sup>5</sup>, with a mode-volume of
∼2.5Â(λ/<i>n</i>)<sup>3</sup>. We fabricated
the cavity and measured the transmission spectrum with the highest
quality factor reaching 7000. We also successfully transferred monolayer
tungsten diselenide on the encapsulated silicon nitride nanobeam and
demonstrated coupling of the cavity with both the monolayer exciton
and the defect emissions