1 research outputs found
Atomic Layer Deposition of V<sub>1–<i>x</i></sub>Mo<sub><i>x</i></sub>O<sub>2</sub> Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
No full textV<sub>1–<i>x</i></sub>Mo<sub><i>x</i></sub>O<sub>2</sub> thin films were fabricated by nanolamination of VO<sub>2</sub>/MoO<sub>3</sub> alternating layers using atomic layer deposition
(ALD) process, in which tetrakis-dimethyl-amino vanadiumÂ(IV) [VÂ(NMe<sub>2</sub>)<sub>4</sub>] and molybdenum hexacarbonylÂ(VI) [MoÂ(CO)<sub>6</sub>] were used as vanadium and molybdenum precursors, respectively.
The dopant content of V<sub>1–<i>x</i></sub>Mo<sub><i>x</i></sub>O<sub>2</sub> films was controlled by adjusting
MoO<sub>3</sub> cycle percentage (<i>P</i><sub>Mo</sub>)
in ALD pulse sequence, which varied from 2 to 10%. Effects of <i>P</i><sub>Mo</sub> on V<sub>1–<i>x</i></sub>Mo<sub><i>x</i></sub>O<sub>2</sub> crystal structure, morphology,
semiconductor-to-metal transition properties, and optical transmittance
were studied. A linear reduction of phase transition temperature (<i>T</i><sub>c</sub>) by approximately −11 °C/cycle
% Mo was observed for V<sub>1–<i>x</i></sub>Mo<sub><i>x</i></sub>O<sub>2</sub> films within <i>P</i><sub>Mo</sub> ≤ 5%. Notably, dramatic enhanced luminous transmittance
(<i>T</i><sub>lum</sub> = 63.8%) and solar modulation (Δ<i>T</i><sub>sol</sub> = 23.5%) were observed for V<sub>1–<i>x</i></sub>Mo<sub><i>x</i></sub>O<sub>2</sub> film
with <i>P</i><sub>Mo</sub> = 7%
