Synchronous imaging for rapid visualization of complex vibration profiles in electromechanical microresonators

Synchronous imaging is used in dynamic space-domain vibration profile studies of capacitively driven, thin n+ doped poly-silicon microbridges oscillating at rf frequencies. Fast and high-resolution actuation profile measurements of micromachined resonators are useful when significant device nonlinearities are present. For example, bridges under compressive stress near the critical Euler value often reveal complex dynamics stemming from a state close to the onset of buckling. This leads to enhanced sensitivity of the vibration modes to external conditions, such as pressure, temperatures, and chemical composition, the global behavior of which is conveniently evaluated using synchronous imaging combined with spectral measurements. We performed an experimental study of the effects of high drive amplitude and ambient pressure on the resonant vibration profiles in electrically-driven microbridges near critical buckling. Numerical analysis of electrostatically driven post-buckled microbridges supports the richness of complex vibration dynamics that are possible in such micro-electromechanical devices.Comment: 7 pages, 8 figure, submitted to Physical Review

Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining

We have used spectral two-layer interferometry (STLI) imaging for estimation of the stress distribution profiles (SDPs) in thin film substrates, enabling fast and reliable all-optical methodology for the evaluation of pre-stress topography profiles in silicon wafers deposited with thin films. Specifically, in polycrystalline silicon (PS) and silicon nitride (SN) thin films, we demonstrate a nondestructive, systematic, and robust capability for consistent stress distribution profile (SDP) evaluation relying on STLI. In particular, for PS and SN devices, the SDP estimation is consistent and is compared with complementary characterization of the films

Fused Microknot Optical Resonators in Folded Photonic Tapers for in-Liquid Durable Sensing

Optical microknot fibers (OMFs) serve as localized devices, where photonic resonances (PRs) enable self-interfering elements sensitive to their environment. However, typical fragility and drifting of the knot severely limit the performance and durability of microknots as sensors in aqueous settings. Herein we present the fabrication, electrical fusing, preparation, and persistent detection of volatile liquids in multiple wetting–dewetting cycles of volatile compounds and quantify the persistent phase shifts with a simple model relating to the ambient liquid, enabling durable in-liquid sensing employing OMF PRs

Liquid Mass Sensing Using Resonating Microplates under Harsh Drop and Spray Conditions

We have performed in situ real time mass sensing of deposited liquid volatile droplets and sprays using plate-like microstructures, with robust and reusable performance attained over harsh conditions and multiple cycles of operation. A home-built electrooptical sensing system in ambient conditions has been used. The bimorph effect on the resonant frequency of altered mass loading, elasticity, and strain had been carefully compared, and the latter were found to be negligible in the presence of nonviscous liquids deposited on top of our microplate devices. In resonant mode, the loaded mass has been estimated from measured resonant frequency shifts and interpreted from a simple, uniformly deposited film model. A minimum submicrogram detectable mass was estimated, suggesting the system’s potential for robust, fast, and reusable sensing capabilities, in the presence of volatile liquids under harsh operation conditions

High-voltage pulsed electric field laboratory device with asymmetric voltage multiplier for marine macroalgae electroporation

Optimization of protocols is required for each specific type of biomass processed by electroporation of the cell membrane with high voltage pulsed electric fields (PEF). Such optimization requires convenient and adaptable laboratory systems, which will enable determination of both electrical and mechanical parameters for successful electroporation and fractionation. In this work, we report on a laboratory PEF system consisting of a high voltage generator with a novel asymmetric voltage multiplying architecture and a treatment chamber with sliding electrodes. The system allows applying pulses of up to 4 kV and 1 kA with a pulse duration between 1 μs and 100 μs. The allowable energy dissipated per pulse on electroporated biomass is determined by the conditions for cooling the biomass in the electroporation cell. The device was tested on highly conductive green macroalgae from Ulva sp., a promising but challenging feedstock for the biorefinery. Successful electroporation was confirmed with bioimpedance measurements