КОНСТРУИРОВАНИЕ ГАЗОВЫХ МИКРОСИСТЕМ НА ОСНОВЕ НАНОПОРИСТОГО АНОДНОГО ОКСИДА АЛЮМИНИЯ

Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations. Установлено влияние пористости подложки из анодного оксида алюминия на основные параметры 4-сенсорной газовой микросистемы. В расчетах использованы зависимости компонентов тензоров модуля упругости и теплопроводности от пористости для α-Al2O3, полученные методом конечных элементов.

ЧЕТЫРЕХСЕНСОРНАЯ ГАЗОВАЯ МИКРОСИСТЕМА НА ПОДЛОЖКЕ ИЗ ПОРИСТОГО АНОДНОГО ОКСИДА АЛЮМИНИЯ: КОНСТРУКЦИЯ, ТЕХНОЛОГИЯ, МОДЕЛИРОВАНИЕ

Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt'>боты микросистемы.Разработаны конструкция и технология создания 4-сенсорной газовой микросистемы, изготавливаемой на подложках из нанопористого анодного оксида алюминия. Методом конечных элементов проведено моделирование температуры основных ее элементов и термомеханических деформаций, возникающих в конструкции при различных режимах работы микросистемы

FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION

Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt'>боты микросистемы

APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN

Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations

Ring gyroscope sensitive element based on nanoporous alumina

The paper aims to present new technological approaches of manufacturing of micromechanical gyroscope ring-sensitive element based on the nanoporous anodic alumina instead of traditional silicon technology. Simulation and the operation analyses of such elements have been performe