Study on the influence of the magnetron power supply on the properties of the silicon nitride films

Silicon nitride (Si3N4) films were deposited by magnetron sputtering of silicon target in (Ar+N2) atmosphere with refractive index 1.95 - 2.05. The results of Fourier transform infrared (FTIR) spectrophotometry showed Si-N bonds in the thin films with concentration 2.41·1023 - 3.48·1023 cm-3. Dependences of deposition rate, optical characteristics and surface morphology on rate of N2 flow and properties of magnetron power supply

Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

The paper examines carbon 0.5-1 thick coatings obtained through various physical vapour deposition and chemical vapour deposition methods on stainless steel and tool steel substrates. Their composition, morphology and physical properties have also been studied. The correlations of erosive wear resistance and H3/E2 ratio (where H is hardness and E is elastic modulus) have been identified for carbon coatings in regards to the production method. Ta-C carbon coatings demonstrate high resistance to dynamic loads with erosive wear in a sand-blast machine. © Published under licence by IOP Publishing Ltd