Structural Characterization of Aluminum Films Deposited on Sputtered-Titanium Nitride/ Silicon Substrate by Metalorganic Chemical Vapor Deposition from Dimethylethylamine alane

Alfilmsdeposited on sputtered‐TiN/Si substrate by metalorganic chemical vapor deposition(MOCVD) from dimethylethylamine alane (DMEAA) were characterized using x‐ray diffraction(XRD),Auger electron spectroscopy(AES),atomic force microscopy(AFM), and transmission electron microscopy (TEM). The TiN filmsputtered on the Si has a preferred orientation along the growth direction with the 〈111〉 of the film parallel to the Si〈111〉. Sputtering of the TiN film on the Si induced strains at the interface. The TiN/Si interface is flat while the Al/TiN interface is rough. There exist many dislocations at the Al/TiN interface. The Al2O3 phase was formed at the Al/TiN interface during the early stages of Aldeposition. In the Al grains, there exist many tangled dislocations and a few Al2O3 particles. With increasing deposition time, the Alfilm surface roughness increases

Microstructure and Deposition Rate of Aluminum Thin Films from Chemical Vapor Deposition with Dimethylethylamine alane

Deposition of aluminumfilm from DMEAA in the temperature range of 100–300 °C has been studied. In this temperature range, there is a maximum deposition rate at around 150 °C. The film deposited at 190 °C has elongated blocklike grain shapes, which are ∼600 nm in width and 930 nm in length. Grains in the film deposited at 150 °C showed an equiaxed structure with grain size in the range of 100–300 nm in a film with 600 nm thickness. Aluminum oxide particle inclusion was observed especially at high deposition temperature. Plausible reaction pathways of DMEAA dissociation were suggested to explain the experimental observations

Experimental Study of the Injection System for CO2 Geologic Storage Demonstration

AbstractThe worldwide issue of greenhouse gas reduction has recently drawn great attention to carbon capture and storage (CCS). Almost CCS studies have been focused in the capture technology of carbon dioxide and the geological investigation for underground storage. The study of mechanical injection system for carbon dioxide has not implemented nearly. We are intended to develop a ground system for underground injection of carbon dioxide. In this study, we made lab-scale underground injection system and implemented injection simulation test experimentally. The 10,000 ton/year pilot plant for geological storage of carbon dioxide will be designed on the base of these test results. Major components of the lab-scale underground injection system include a pressure pump and an in-line heater to bring liquid carbon dioxide into its supercritical state. Test results assure that this system readily achieves the designed injection pressure and temperature, showing satisfactory control performance